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TB N L 3 2 1 PE 3 2 1 PE L N TB ILS ILS MC TDR TDR MC MC TDR TDR MC PTC MC OLR OLR MC PTC MC CM CM MC TDR MC MC TDR C11 PRS FM1 PRS FM1 P P C12 FM2 FM2 MOV MOV M For Option M M For Option M M For Option M M For Option M IDU11E-10-T IDU8E/11E-23-T GFCI R For Option R GFCI GFCI GFCI R For Option R R For Option R GFCI R For Option R R For Option R For Option R R For Option R TB N L 3 2

IDX-OM-W026-A / Series IDF22E-20(-A,C,K,L,M,R,T) IDF22E-30(-A,C,K,L,M,R,T) IDF37E-20(-A,C,K,L,M,R,T) IDF37E-30(-A,C,K,L,M,R,T) IDF55E-30(-A,C,L,M,R,T) IDF75E-30(-A,C,L,M,R,T) URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC ISO4414 *1) JIS B8370 *2 ) *1) ISO4414Pneumatic fluid power General rules and safety requirements

Pin Clamp Cylinder D series Series CKQ D/CLKQ D G P G P How to Order Built-in standard magnet With magnetic field resistant auto switch D A 50 177 R A L P4DWSC KQG C Built-in strong magnet With magnetic field resistant auto switch D A 50 198 R A L P79WSE C KQP With lock on the clamp side Number of auto switches L Nil Without lock With lock S Nil 2 pcs. 1 pc.

42 54 100 105 120 20 24 24 134 146 162.5 135 140 155 210.5 226 250 130 150 180 Flange Type Port size: 65F, 80F Electrical entry hole: G1/2 Manual override (Non-locking) 4 x 2-18 mouting hole (80F: 8 x 2-18) Model Applicable flange 65 80 H F E D C B A 1 4 1 4 405.5 441.5 VNC81 -65F VNC91 -80F 65 80 140 150 204 235 175 185 305.5 341.5 210 240 17-4-26 7 Series VNC Coolant Valve: Air Operated

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

e f g Nil Reed switch L R Solid state switch S h Nil L R S Operating direction Left Right a b h g d c f e Note) Lead wire length symbols 0.5m .

F 10(5) PFM725--C/E 25(12.5) PFM725--D/F 25(12.5) PFM750--C/E 50(25) PFM750--D/F 50(25) PFM711--C/E 100(50) PFM711--D/F 100(50) ( )CO2 ( ) CO2 () 25[L/min] 10[L/min] [L/min] [L/min] 50[L/min] 100[L/min] [L/min] [L/min] -57No.PF-OMJ0005CN-I (350[kPa]) 25[L/min] 10[L/min] [kPa] [kPa] [L/min] [L/min] 100[L/min] 50[L/min] [kPa] [kPa] [L/min] [L/min] -58No.PF-OMJ0005CN-I PFM7-(N)01/(N)02

Operating model: MHY2-16D Opening time: 0.15 s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b c B part e f d 2.

Note 12 16 20 25 32 40 50 D-F7 , J79 D-F7 V D-J79C D-F7 W, J79W D-F7 WV D-F7BAL, F7BAVL D-F7 F D-F7NTL D-F7, D-F7V D-J79, D-J79C D-F7W, D-F7WV D-J79W D-F7BAL, D-F7BAVL D-F7NTL, D-F79F Switch mounting screw (M3 x 0.5 x 10 ) Switch spacer Switch mouinting nut D-A7 , A80 D-A73C, A80C D-A7 H, A80H D-A79W 6 6 6 32, 40 50 BQ-2 D-F7LF 8 7 8 D-F9V D-F9W, D-F9WV D-F9BAL Switch mounting bracket Switch

58.0 35.5 55.0 32.5 56.5 33.5 53.0 30.0 CC 40 70.0 39.5 64.0 33.5 69.0 38.5 65.5 35.5 67.0 36.5 63.5 33.0 RB Auto switch model Bore size (mm) Operating Range Auto Switch Mounting Height D-C7 D-C80 D-H7 D-H7W D-H7NF D-H7BAL D-B5 D-B64 D-B59W D-G5NTL D-H7C J 20 25 32 40 D-G39 D-K39 D-A33 D-A34 Bore size (mm) D-C7/C80 D-C73C/C80C D-C73C D-C80C D-A44 8 10 9 10 D8 10 9 10 D-B5/B64 13 13 14 14

L3 Max. 1 4 1 2 L1 L2 D Min. L3 Max. Model Port size Model Port size 120 150 AS800 AS900 1 1 , 2 74 93 204 262 192 250 80 94 AS420 AS500 AS600 67.5 74 90 1/4, 3/8, 1/2 3/4 1 38 42 55 122 115 158 112 105 148 50 50 62 15-9-33

For detailed specifications, refer to page 10-20-1. 50 7 63 9 80 9.5 100 10.5 CV D-Z7/Z80 D-A3/A44 D-A3C, D-A44C D-A5/A6 D-B5/B64 D-A59W D-B59W D-Y5/Y6 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-F5/J5 D-F5W/J59W D-F5BAL/F5NTL D-F59F D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL D-G59F D-G39/K39 D-G39C, D-K39C MVGQ Electrical entry (Fetching direction) D-A53/A56 D-A64/A67 D-B64 D-Z80 D-F59/F5P/J59 D-F59W/F5PW/J59W

Unit: g Model D-M9N D-M9B D-M9P 0.5 8 7 8 Lead wire length m 3 41 38 41 Auto Switch Dimensions Auto Switch Internal Circuit D-M9 M2.5 x 4l mounting hole Slotted set screw Indicator light D-M9B, N, P D-M9N DC(+) Brown 2.6 Main circuit of switch Main circuit of switch Main circuit of switch OUT Black 2.7 2.8 4 22 DC(-) Blue 3.2 D-M9N, P (3-wire) D-M9P Most sensitive position 6 DC(+) Brown 22

, D-A93, D-A96, D-A90V, D-A93V, D-A96V (mm) B E Stroke Model Stroke A 100 30 50 75 20 10 100 75 50 30 20 10 8 (5.5) 11.1 (8.6) 13.8 (11.3) 18.7 (16.2) 8 (5.5) 3 (0.5) 11.1 (8.6) MXF8 9.5 10 5 10 27.1 (24.6) 23.8 (21.3) 20.7 (18.2) MXF12 12 29.1 13.1 13.1 44.8 (42.3) 44.2 (41.7) 68.7 (66.2) MXF16 17.2 46.8 25.8 15.8 MXF20 19.4 70.7 46.2 22.7 20.7 Solid State Switch: D-M9B, D-M9P, D-M9N

0.4 340 10 4.5 6 8 250 1.0 3 8 (10A) 340 0.4 10 10 1 2 (15A) 420 Note) Refer to Glossary on page 17-3-15 for details of max. operating pressure differential and max. system pressure.

DIN (B ) DIN No. 1 2 DIN +(-) -(+) 612mm 0.50.6Nm (612) 0.50.6Nm 912 mm (G1/2) M3 0.50.6Nm 0.50.6Nm + M3 0.50.6Nm A-A () -9No.PS-OMF0005CN-E * 30 * 1 2 3 O 4 (0.40.5 Nm) (AR ) * 0.020.2 MPa 0.2 MPa 0.2 MPa ([]) ([] ) ()60mm -10No.PS-OMF0005CN-E N P R 1 IISA2 C S L 6 5 D E 2 IISA2 *1 16 1~6 C +2 *2 *A V 2 E2 (MPa) 0.2MPa 0.4MPa G2 (MPa) *P2 (MPapsi) SR *Z2 (psi) SL E4 (

type D-Z7 type Note 1) Note 1) D-Z8 type D-A9 type D-F9 type D-Y6 type D-Y7 type Note 1) Vertical outlet types cannot be mounted.