5 Port Air Operated Valve Series SYA3000/5000/7000 1

VV5FA5-20-051 1 pc. VFA5120-03 2 pcs. VFA5220-03 2 pcs. DXT156-19-1A 1 pc.

Vacuum

Flat wlth rib 1 0 1 2 21 29.946 5 6 1 . 7 1 3 1 5 't2 21 29.946 5 6 3 1 . 8 '19 20 1 6 1 8 12.5 215t301 46.S 5 3.5 Dep type 23 23 22 23 23 22 50 48 50 Applicable Tube 56 54 56 54 57 co 57 '5l3e" lube may be subslituled for 4mm.

Vacuum

Flat wlth rib 1 0 1 2 21 29.946 5 6 1 . 7 1 3 1 5 't2 21 29.946 5 6 3 1 . 8 '19 20 1 6 1 8 12.5 215t301 46.S 5 3.5 Dep type 23 23 22 23 23 22 50 48 50 Applicable Tube ) 56 54 56 54 57 co 57 '5l3e" lube may be subslituled for 4mm.

Process Valve Series VNA

(mm) Model Rc FlangeNote) Cv 7 12 11 18 11 18 19 28 19 28 29 43 29 43 Effective area (mm2) 130 220 210 320 210 320 330 500 330 500 520 770 520 770 VNB44-25A VNB4-25A VNB54-32A VNB5-32A VNB54-32F VNB5-32F VNB64-40A VNB6-40A VNB64-40F VNB6-40F VNB74-50A VNB7-50A VNB74-50F VNB7-50F 16 25 22 32 22 32 28 40 28 40 33 50 33 50 1.4 1.5 1 2.5 2.6 1 4 1 5.7 5.8 32 4.1 4.2 1 2 1 JIS Symbol Valve

Series KV2 Fittings

(g) Bag/Box Quantity MB D2 D3 D4 D5 D6 L1 L2 L3 5/32** 5/32 5/32 5/32 1/4** 1/4 1/4 1/4 3/8** 3/8** 3/8 3/8 3/8 1/2** 1/2** 1/2** 1/2 1/2 1/2 5/8** 1/4 5/32 5/32 5/32 3/8 1/4 1/4 1/4 1/4 1/4 3/8 3/8 3/8 1/4 3/8 3/8 1/2 1/2 1/2 5/8 1/4-18 1/16-18 1/8-27 1/4-18 1/4-18 1/8-27 1/4-18 3/8-18 1/4-18 3/8-18 1/4-18 3/8-18 1/2-14 1/2-14 3/8-18 1/2-14 1/4-18 3/8-18 1/2-14 1/2-14 KV2Y03-07-35S KV2Y03

Booster Regulator/Air Tank

Quantity 1 (VBA1A) 1 (VBA2A) 20 58 (CLOSE) to 63 (OPEN) q O-ring 1 1 Hexagon socket head taper screwed plug (for drain port) w OUT port Rc1/8 1 1 1 19 4 (VBA1A) 4 (VBA2A) Hexagon socket head cap screw e 4 4 Drain valve Anchor bolt/nut r 4 30 Body material: Brass For detailed dimensions, specifications and lead times, please contact SMC.

HRX-OM-I051

of Model Label . 1-7 1.5 Safety Measures . 1-8 1.5.1 Safety Precautions . 1-8 1.5.2 Safety Interlock system . 1-9 1.5.3 Lockout/Tagout . 1-10 1.5.4 Protective equipment . 1-12 1.6 Emergency Measures. 1-13 1.6.1 Emergency off [EMO] switch . 1-13 1.7 Waste Disposal . 1-15 1.7.1 Disposal of refrigerant and compressor oil. 1-15 1.7.2 Circulating fluid disposal. 1-16 1.7.3 System disposal . 1

HRX-OM-W069

HRX-OM-W069 Contents Contents Chapter 1 Read before using . 1-1 1.1 Operation mode and operation method . 1-1 1.2 Change of operation mode . 1-3 1.3 Communication port . 1-4 1.4 Touch panel flow . 1-5 Chapter 2 Contact input/output communication /Analog output communication . 2-1 2.1 Precautions for communication . 2-1 2.1.1 Precautions wiring communication . 2-1 2.1.2 Precautions after wiring

JXCx-OMT0028CN

ID=1 bit 7 6 5 4 3 2 1 0 Address 18 19 (1) (GW [IN Data] Address.18, bit0) LEC 1(ON)0(OFF) (2) (GW [IN Data] Address.18, bit1) LEC 0(OFF)1(ON) (3) (GW [IN Data] Address.19, bit0) (GW [OUT Data] Address.2, bit0)1(ON) LEC 1(ON)0(OFF) (4)(GW [IN Data] Address.19, bit1) LEC 1(ON)( GW [OUT Data]Address.2, bit0)00(OFF) 11.3 (IN Data) GW bit 7 6 5 4 3 2 1 0 Address 250 ALARM READY 251 252 253

Thermo-chiller

1 CH1 Circulating fluid outlet Applicable hose I.D.: 19: HRL-BP001 Applicable hose I.D.: 15: HRL-BP002 e q (261) Parts List No.

45

Refer to external dimensions in pages 1-6-78 to 1-6-79, and then mount it.

3 Port Air Operated Valve

1/8, 1/4 2(A) port 19.5 12 40.5 2 x 4.2 (For mounting) 11.2 30 18.5 1/8, 1/4 3(R) port 1/8 12(PA) port 2A NO 35 43 NC 12 12 3R 1P NC (1/8) 12(PA) port 12 6.7 58.2 18.5 65.2 60 59 24 X 12 M5 x 0.8 (Breathing hole) 19.5 39 1/8, 1/4 1(P) port For vacuum/VPA344V-101 02 A B 1/8, 1/4 2(A) port 19.5 12 40.5 2 x 4.2 (For mounting) 1/8, 1/4 3(R) port 18.5 11.2 30 2A NO 35 43 NC 12 3R 1P NC 1/8 12(

45

Refer to external dimensions in pages 1-6-78 to 1-6-79, and then mount it.

KP/KPQ/KPG

19 22 M L A 12 46 58 25 H Reference dimension for R threads after installation Connection threads Note 1) Male Elbow: KPQL, KPGL Applicable tubing (M5) Effective area mm2 D1 Model L1 TPH TPS A H (width across flats) (M5) Applicable tubing O.D. mm Connection thread R Weight g M L2 D2 L1 M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Refer to page 1-7-4.)

Integrated Controller

Size Order no. 16 LE-D-6-5 25 LE-D-15-1 32 LE-D-19-1 40 LE-D-19-2 27 Replacement Parts/Grease Pack Applied portion Order no. Ball screw Rail guide Dust seal band (When Without is selected for the grease application, grease is applied only on the back side.)

Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM01301 1.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

R R 1 R 1 R 1 R 2 Inlet pressure for silencer AMC 4.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(B) 2 (A) 4 (B) 2 (A) 4 Effective area (mm2) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 3 (R) (B) 2 (A) 4 JIS Symbol 1 3 position pressure center 3 position pressure center (B) 2 (A) 4 (B) 2 (A) 4 3 (R) 1 (P) (Single) 0 (Fully open) (Fully closed) 1 2 3 4 5 6 7 1 (P) 5 (R1) 3 (R2) 1 (P) 3 (R) How to order valve with built-in speed controller SYJ5 5 When using SYJ553 model the speed controller must be opend

Electric Actuators

1 t !