Mep 2000 a = 1000 L1 (mm) Pitching m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 L3 (mm) 2000 L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer
Acid consumption amount (at pH4.8) [mg/L] 100 or less v Total hardness [mg/L] 200 or less v Calcium hardness (CaCO3) [mg/L] 150 or less v Ionic state silica (SiO2) [mg/L] 50 or less v Iron (Fe) [mg/L] 1.0 or less v v Copper (Cu) [mg/L] 0.3 or less v Sulfide ion (S2) [mg/L] Should not be detected v Ammonium ion (NH4+) [mg/L] 1.0 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Free carbon
R A: 0.19 A P: 0.13 VP VG Grommet (G) Body Ported Base Mounted VZ300 VP S070 M5 x 0.8 0.66 2 3 (A R) VQ L plug connector (L) VKF (Standard) VQZ 100 VAC 50/60 Hz With surge voltage suppressor (G) (L) (M) (D) With light/ surge voltage suppressor (L) (M) (D) VZ500 200 VAC 50/60 Hz 24 VDC VZ VS 2.5 2 3 (A R) (Option) N. C. N. O.
AR425 to 935 Nil A B C D E F G H J K L M N O P Q R ARX AMR ARM ARM With pressure guage With digital pressure switch ARP IR-A Common supply block Common supply block with pressure switch IR L side L side IRV VEX Note 1) Pressure display means a pressure gauge or digital pressure switch is attached.
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
Unit Series AC20C to 40C Dimensions AC20C A Pressure gauge port size G Q F E T L P B C H IN OUT U H L J Pressure gauge (Option) F.R.L.
12.5) L1 58.4 60.9 3/5 3/5 E E 4 A 4 A 4 A 4 A 85.4 101.2 105.7 MAX.21 98.7 2 B 2 B 2 B 2 B (Station n) (Station 1) P 1 P 1 5 3 E 1 P Light/Surge voltage suppressor 1 1 Individual SUP spacer SV3000-00Interface regulator 82.7 Individual EXH spacer 63.8 75 SV3000-M1Interface regulator 12 (10) (For DIN rail mounting) B B B B 157.9 14.7 139.9 A A A A B A B A B A B A L Dimension n: Stations L
Note 5) The sensor unit conforms to the CE mark. 2 Series PF2A How to Order PF2A3 Remote Type Display Unit 0 0 A M Unit specification Flow rate range Nil M With unit switching function Fixed SI unit Note) Mounting Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min Type for sensor unit Symbol A Panel mounting Note) Fixed units: Real-time flow rate:
4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" (L4) L3 (3.2) 113.7 U side D side 3.1 8 36.3 58.2 5.5 35 18 28.8 70.7 B COM A B COM A B COM A B COM A B COM A DIN rail holding screw Manual override DIN rail (Press and turn for the locking type.) 4(A) port side:
5 port 3 Port for mixture mounting (B) 2 (A) 4 0.6 0.7 5 (R1) 1 (P) 3 (R2) Indicator light and surge voltage suppressor 3 Position exhaust center L plug connector (L) (A) 4 (B) 2 VQZ3000 (standard) 12V DC 24V DC 5 (R1) 1 (P) 3 (R2) Base Mounted Non-locking push style (Flush) 3 Position pressure center 0.9 1.2 (A) 4 (B) 2 L plug connector (L) (Option) 100V AC 200V AC 110V AC 220V AC 5 (R1
NDH10 MM MM L L RR1 E1 E1 A1 U1 NX NZ NX L1 NZ A Applicable bore size (mm) A A1 E1 L1 MM U1 NX NZ L Applicable bore size (mm) Applicable pin part no. Part no. NDH10 Part no.
PF2W740 PF2W711 Model Measured fluid Flow rate measurement range Set flow rate range Rated flow range Minimum set unit Water 1.7 to 17.0 l/min 0.35 to 4.5 l/min 3.5 to 45 l/min 7 to 110 l/min 1.7 to 17.0 l/min 0.35 to 4.5 l/min 3.5 to 45 l/min 7 to 110 l/min 2 to 16 l/min 0.5 to 4 l/min 5 to 40 l/min 10 to 100 l/min 0.1 l/min 0.05 l/min 0.5 l/min 1 l/min 0.1 l/pulse 0.05 l/pulse 0.5 l/pulse
+ 1/2 stroke MM MM Data W V TY D e D E H1 AL AL A A F BN TT K K 8 f l N C h + l B ZZ + l + 2 stroke S + Stroke H + Stroke ZZ + 2 strokes H TX TZ With rod boot on both sides ZZ + 2 l + 2 stroke Bore size (mm) Stroke range (mm) 40 50 63 80 100 MM N J K KA A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 P 1/4 3/8 3/8 1/2 1/2 M14 x 1.5 27 30 31 37 40 6 7 7 11 11 M8 x 1.25 14 18 18 22 26 30
+ 1/2 stroke MM MM Data W V TY D e D E H1 AL AL A A F BN TT K K 8 f l N C h + l B ZZ + l + 2 stroke S + Stroke H + Stroke ZZ + 2 strokes H TX TZ With rod boot on both sides ZZ + 2 l + 2 stroke Bore size (mm) Stroke range (mm) 40 50 63 80 100 MM N J K KA A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 P 1/4 3/8 3/8 1/2 1/2 M14 x 1.5 27 30 31 37 40 6 7 7 11 11 M8 x 1.25 14 18 18 22 26 30
A gripping force of 24N is obtained from the intersection point of gripping point distance L = 30mm and pressure of 0.4MPa.
Note 3) The time from when the flow is changed by a step input (when the flow 5 3-Color Display Digital Flow Switch Series PFMC Flow Range Model Flow range 100 L/min 0 L/min 200 L/min 500 L/min 1000 L/min 2000 L/min 5 L/min 500 L/min 525 L/min 525 L/min PFMC7501 5 L/min 25 L/min 10 L/min 10 L/min 1000 L/min 1050 L/min 1050 L/min PFMC7102 50 L/min 20 L/min 20 L/min 100 L/min 2000 L/min 2100
Fitting plug KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 Dimensions L (mm) A Applicable fitting size d A L D Part number KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 5 6 8.5 10 11.5 31.5 32 35 39 43 1/8 5/32 1/4 5/16 3/8 16 16 18 20.5 22 D Used to block unused cylinder port. L DIN rail AXT100-DR12.5 (Pitch) 5.25 7.5 Suffix number into from the dimension table below.
C10: 10 N11: 3/8" C12: 12 (Double sided type) ( ) 7 6 5 4 3 2 1 n D side Station U side VFR VQ7 M12 57.2 R R OUT 76.7 76.5 X 3 3 67.2 72 IN X B B B B B B B 49.5 46.2 P 12 P 12 25.6 30 25 A 1 A 1 A A A A A 10 13.5 M12 21.5 13 (7.5) 25 55 18 One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 4, 5/32" 6, 1/4" 8, 5/16" n: Stations L: Dimensions n L 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 L1
Table Spacer Weight [g] EQFS16R L 5 EQFS25R L 95 EQFS32R L 125 EQFS40R L 30 19 Easy to Operate Integrated Controller / Slider Type EQFSH Series Battery-less Absolute (Step Motor 24 VDC) Construction Model Selection EQFS H Series EQY H Series Auto Switch Electric Specifications Wiring Examples Operation Data Setting Options Specific Product Precautions In-line motor A A-A A Right/Left side
A L L L Opposite port side Guide central axis (single axis type) For the dual axis type, this is the cylinder's central axis.