F/ISE

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2002 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

VFA3000

VFA5120-03 2 pcs. VFA5220-03 2 pcs. DXT156-19-1A 1 pc.

5 Port Air Operated Valve Series VFA3000 1

VFA5120-03 2 pcs. VFA5220-03 2 pcs. DXT156-19-1A 1 pc.

A_HEC-OM-J017

Temperature setting (without writing EEPROM) No 02 31 32 35 30 30 03 3F 38 0D 06 0D Set at 25.0 deg.C 31 32 Reading internal sensor No 05 32 33 32 0D 02 32 32 35 30 32 03 3F 3B 0D Answer 25.02 deg.C 33 Reading external sensor No 05 33 33 33 0D 02 33 33 30 30 32 03 3F 38 0D Answer 30.02 deg.C 34 Reading alarm status No 05 34 33 34 0D 02 34 30 38 30 03 3C 3C 0D Answer ERR11 Answer -1.52 deg.C

Booster Regulator Series VBA1110 to 4200 1

Tank model VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 394 Rc 3/8 VBAT20 VBAT20S 305 206 674 180 200 100 400 Rc 1/2 430 Rc 1/2 444 Rc 3/8 VBAT38 VBAT38S 355 256 824 205 250 150 500 Rc 3/4 480 Rc 1/2 14-9-9

SMC Pneumatic Clean Series

T (mm) (mm) Rod end male thread Applicable bore size V W X U R S T Q Part no.

Round Type Hydraulic Cylinder

3 e r !2 !1 u t w y CHK CHN CHM CHM CHS CH2 o !

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

SMC Pneumatic Clean Series

A 40 150 C73 21 C D M 2 R A 40 150 C73 Number of auto switches Mounting style 2 pcs. 1 pc.

Miniature Regulator

Metric size 4, 6 Inch size 5/32", 1/4" Port size Rc, NPT 1/8 2 2 1 1 Pressure gauge port size Rc, NPT 1/8 (Width across flats) 11 M5 x 0.8 (Female thread) 26 26.1 3 R, NPT1/8 13.6 18.3 26.1 Made to Order Specifications Please contact SMC for detailed dimensions, specifications and lead times.

HRX-OM-X071

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Compact Guide Cylinder

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 https://www.smcworld.com 2024 SMC Corporation All Rights Reserved Specifcations are subject to change without prior notice and any obligation on the part of the manufacturer. D-G

Regulator AR30 to 60

Regulator AR30 to 60 Related Equipment How to Order AR 30 BE F 1N 03 Optional specifications Regulator Contents 0.02 to 0.2MPa setting Non-relieving Flow direction: Right to left Symbol 1 N R Z Applicable models AR30 to 60 AR30 to 60 AR30 to 60 AR30 to 60 Note 1) Body size 30 40 50 60 1 3 8 1 2 3 4 Display units for product name plate and pressure gauge: PSI, F.

Plate Cylinder with Lock Series MLU

Please use them as guidelines. +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 9 11 13 16 142.5 150.5 8 10 10 14 9 11 13 16 0.2 0.4 0.2 0.4 0.2 0.4 0.2 0.4 159 169 CD-MU03 171 181 CD-MU04 205.5 221.5 CD-MU05 Single clevis (Double clevis bracket) Double clevis (Single clevis bracket) DX -01 -03 CX -02 -04 DY+0.4 +0.2 R (CJ) R (DJ) CDH10 DDH10 2-DT 2-CT 2-

Cylinder with Lock Series MNB

Cylinder with Lock Series MNB Taper ring Steel ball P f R R High locking efficiency Improved locking efficiency, as well as stable locking and unlocking (unlocking pressure 0.25MPa. 0.05MPa compared to conventional P/A products) have been realized by arranging a large number of precision steel ball bearings in two circular rows.

Filter Regulator AW30, 40

Filter Regulator AW30, 40 Related Equipment How to Order Integration of a filter and regulator allows simple wiring. 03 BE 30 1N AW F Optional specifications Filter regulator Applicable models AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 Symbol 1 2 6 8 J N R W Z Contents 0.02 to 0.2MPa setting Metal bowl Nylon bowl Metal bowl with level gauge Drain guide

AS-FPQ/FPG

Port size M5 01 02 03 04 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

AS-R/AS-Q

Air Saving Speed Controller AS-R/AS-Q Series How to Order Port size 01 1/8 02 1/4 03 3/8 04 1/2 2 02 06 AS R 2 With pressure reduction function Knob color: White With pressure reduction function 2 02 06 AS Q 2 With rapid supply and exhaust function Knob color: Light blue Applicable tubing O.D.

PSE200

CH kPa MPa kPa MPa MPa kPa kPa MPa kPa MPa OUT1 OUT2 CH 1 2 3 4 P R E S S U R E Copy function (page 14) Each channel's information can be copied to another channel.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 3 Construction w r y t u !2 e !1 No. q w e r t y u i o !0 !1 !