3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

kPa 10 to 105 kPa 0.001 0.1 0.001 0.001 0.01 PSE564 PSE574 0 to 500 kPa 50 to 525 kPa 0.001 1 0.01 0.01 0.1 PSE530 PSE540 PSE560 PSE570 0 to 1 MPa 0.105 to 1.05 MPa 0.001 1 0.01 0.01 0.1 PSE575 0 to 2 MPa 0.105 to 2.1 MPa 0.001 1 0.01 0.01 0.2 PSE576 0 to 5 MPa 0.25 to 5.25 MPa 0.01 0.1 0.1 1 PSE577 0 to 10 MPa 0.5 to 10.5 MPa 0.01 0.1 0.1 1 0 to 1.6 MPa 0.105 to 1.68 MPa 0.001 1 0.01

VHS20/30/40/50

Port size Body size Thread size Thread type Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

Series 10-, 21- AF-A Air Filter

8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1070 A

Air cooled Thermo-con (Compact type)

Symbol Terminating resistance FG FG FG Connector Connector Connector shell shell shell 2201/2W + + + 1 1 1 2 2 2 9 9 9 5 SG 5 SG 5 SG Figure1-1 Communication Connection (RS-485) Host Computer Thermo-con RS-232C RS-232C Symbol Pin No.

MHx-OMY0001

Z M9NWZ () 2 2 PLC 2 3-4 2 1-4 -16- 5. 5-1. 5-2.

Vacuum Filter AFJ Series

AFJ AFJ r t y u w AMV q Body size 20 30 40 ZH -X185 Symbol Description Related Products w Pipe thread type Nil Rc N NPT F G + 01 1/8 02 1/4 03 3/8 04 1/2 + e Port size a Mounting Nil Without mounting option Option r B Note 1) With bracket + b Element 5 5 m 40 40 m 80 80 m + Nominal filtration rating t c Water drop removal type/ Large flow type S Water drop removal type Type y T Large

Air cooled Thermo-con (Compact type)

Connection drawing for communication is shown in the Figures 1-1.

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

Port size Body size Thread size Port thread Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

I

Pod NVF3000 NVF5000 Supply SUP Cylindet cYL.1, CYL.2 A , B Exhaust EXH.1, EXH.2 Rl, R2 Symbol (SirEle solenoid) l c 1 : c Y L . 1 l IC2:CYL.2 lEl :EXH.r I {E2:EXH.2] Lubricant 1.

ZISE20.eng

Set value P_1 Hysteresis H_1 Piping Tightening the connection thread For connecting to the body (piping specification: -M5) After hand tightening, apply a spanner of the correct size to the spanner flats of the piping body, and tighten with a 1/6 to 1/4 rotation. As a reference, the tightening torque is 1 to 1.5 Nm.

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50 How to Order 30 03 RZ VHS Made to Order Standard Nil Body: Red X1 Built-in silencer (EXH port) X502 Pressure relief Optional specifications 3 port valve Des

Body size Port size Thread type Nil N F Symbol Port size Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 A spacer or spacer with bracket is required if the valve is combined with modular FRL. SUP SUP Applicable air preparation equipment Spacer with bracket part no. Pressure relief 3 port valve VHS20 VHS30 VHS40 VHS40-06 VHS50 IN OUT Spacer part no.

Model: 31, Orifice: 3 (3mm), Style: 4 (COM, Single Unit), Option: G (Stainless Steel, Seals: NBR, Class B), Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 31, Orifice: 3 (3mm), Style: 2 (N.O., Single Unit), Option: H (Stainless Steel, Seals: FKM, Class B), Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: Rc, Voltage: 5 (24VDC), Electrical Entry: T (with Conduit Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 31, Orifice: 3 (3mm), Style: 4 (COM, Single Unit), Option: H (Stainless Steel, Seals: FKM, Class B), Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: Rc, Voltage: 5 (24VDC), Electrical Entry: T (with Conduit Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 31, Orifice: 3 (3mm), Style: 4 (COM, Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: Rc, Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil)

Model: 31, Orifice: 3 (3mm), Style: 4 (COM, Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: Rc, Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 31, Orifice: 2 (2.2mm), Style: 0 (N.C., Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 31, Orifice: 3 (3mm), Style: 2 (N.O., Single Unit), Option: H (Stainless Steel, Seals: FKM, Class B), Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: Rc, Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 31, Orifice: 3 (3mm), Style: 0 (N.C., Single Unit), Option: G (Stainless Steel, Seals: NBR, Class B), Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)