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Pod NVF3000 NVF5000 Supply SUP Cylindet cYL.1, CYL.2 A , B Exhaust EXH.1, EXH.2 Rl, R2 Symbol (SirEle solenoid) l c 1 : c Y L . 1 l IC2:CYL.2 lEl :EXH.r I {E2:EXH.2] Lubricant 1.

ZISE20.eng

Set value P_1 Hysteresis H_1 Piping Tightening the connection thread For connecting to the body (piping specification: -M5) After hand tightening, apply a spanner of the correct size to the spanner flats of the piping body, and tighten with a 1/6 to 1/4 rotation. As a reference, the tightening torque is 1 to 1.5 Nm.

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50 How to Order 30 03 RZ VHS Made to Order Standard Nil Body: Red X1 Built-in silencer (EXH port) X502 Pressure relief Optional specifications 3 port valve Des

Body size Port size Thread type Nil N F Symbol Port size Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 A spacer or spacer with bracket is required if the valve is combined with modular FRL. SUP SUP Applicable air preparation equipment Spacer with bracket part no. Pressure relief 3 port valve VHS20 VHS30 VHS40 VHS40-06 VHS50 IN OUT Spacer part no.

Model: 31, Orifice: 3 (3mm), Style: 4 (COM, Single Unit), Option: G (Stainless Steel, Seals: NBR, Class B), Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 31, Orifice: 3 (3mm), Style: 2 (N.O., Single Unit), Option: H (Stainless Steel, Seals: FKM, Class B), Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: Rc, Voltage: 5 (24VDC), Electrical Entry: T (with Conduit Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 31, Orifice: 3 (3mm), Style: 4 (COM, Single Unit), Option: H (Stainless Steel, Seals: FKM, Class B), Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: Rc, Voltage: 5 (24VDC), Electrical Entry: T (with Conduit Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 31, Orifice: 3 (3mm), Style: 4 (COM, Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: Rc, Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil)

Model: 31, Orifice: 3 (3mm), Style: 4 (COM, Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: Rc, Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 31, Orifice: 2 (2.2mm), Style: 0 (N.C., Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 31, Orifice: 3 (3mm), Style: 2 (N.O., Single Unit), Option: H (Stainless Steel, Seals: FKM, Class B), Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: Rc, Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 31, Orifice: 3 (3mm), Style: 0 (N.C., Single Unit), Option: G (Stainless Steel, Seals: NBR, Class B), Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 31, Orifice: 3 (3mm), Style: 2 (N.O., Single Unit), Option: G (Stainless Steel, Seals: NBR, Class B), Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 31, Orifice: 2 (2.2mm), Style: 0 (N.C., Single Unit), Option: A (C37, Seals: FKM, Class B), Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil)

Model: 31, Orifice: 2 (2.2mm), Style: 2 (N.O., Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 31, Orifice: 2 (2.2mm), Style: 0 (N.C., Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil)

Model: 31, Orifice: 3 (3mm), Style: 0 (N.C., Single Unit), Option: J (Stainless Steel, Seals: EPDM, Class B), Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil)

Model: 31, Orifice: 3 (3mm), Style: 4 (COM, Single Unit), Option: H (Stainless Steel, Seals: FKM, Class B), Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil)

Model: 31, Orifice: 3 (3mm), Style: 4 (COM, Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil)

Model: 31, Orifice: 3 (3mm), Style: 4 (COM, Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)