Made to Order

135 180 66 100 Rc 1/4 104.5 19.5 75 65 30 192 108 20 9 86 69 187 323 350 to 1000 M12 x 1.75 depth 23 M12 x 1.75 depth 23 138 160 214 76 115 Rc 3/8 119.5 20.5 90 75 35 224 128 23 8.5 104 69 201 358 350 to 1000 M14 x 2 depth 28 153 190 245 80 125 Rc 3/8 150 23 102 95 40 262 143 33 10.5 128 87 249 431 350 to 1000 M14 x 2 depth 30 153 190 245 80 125 Rc 1/2 170 23 116 114 40 262 143 37.5 10.5

F

16 6.0 6.0 13 4 1/4 KQT04-02S 14 10.4 10 18 26 25 16 6.0 6.0 19 6 M5x0.8 KQT06-M5 8 12.8 8 20 16 18 17 4.3 4.3 8 6 1/8 KQT06-01S 10 12.8 10 20 23 25.5 17 13.9 13.9 13 6 1/4 KQT06-02S 14 12.8 10 20 27 27.5 17 13.9 13.9 21 6 3/8 KQT06-03S 17 12.8 10 20 29 29 17 13.9 13.9 35 8 1/8 KQT08-01S 12 15.2 12 23 24.5 28 18.5 26.3 18.2 15 8 1/4 KQT08-02S 14 15.2 12 23 28.5 30 18.5 26.3 18.2 23 8 3/8

2/3 Port Valve

VXD21/22/23 Single unit Single unit VXP21/22/23 VXR21/22/23 Body Single unit N.C.

Table of Contents

For more information, please refer to page 8-14-23.

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection 4 4 thread 1.6 6 15 10 66 23 43 15 71 28 25 81 38 33 18 D B 02 1.2 Width across flats 12 A N S U F GN GS B3 B5 04 06 N4 U4 6 33 18 15 10 66 23 43 15 71 28 25 81 38 J K ZP T U 04 A8 1.6 6 33 18 J: 2.5 K: 2 15 10 66 23 43 15 71 28 25 81 38 06 08 C2 Dimensions Per Vacuum Inlet: Female Thread Vacuum inlet: One-touch

SQ1000/2000

A 23 6 () 11 Station 8 SOL.

1

165 115 23 62.2 23 165 140 26 72.7 Specifications other than above are the same as standard type.

TABLE OF CONTENTS

except 53 Models 23, 33 MANIFOLD MOUNT AN CONNECTOR 1/2 NPT Model 23**, 33, 53, 73 All Models BODY OPTIONSsee page 80 FLANGE MOUNT SPLICE BOX HOUSING METERING TO ORIFICE Models 23**, 73 All Models 3.52 3.22 (81.8) .34 (8.6) Model 23, 33, 53 2.50 (63.5) (89.4) PORT 90 RIGHT JIC HOUSING METERING TO ORIFICE All Models except 53 Model 23 Model 23, 73 YOKE MISCELLANEOUS OPTIONSsee page 76 METERED

ZP

) 30 (22) 29 (23) 31 (22) ZPR10 29 (23) 31 (21) 29 (23) 31 (22) ZPR13 31 (23) 31 (22) ZPR16 ZPR20 (51) 65 (50) 68 (48) (51) 57 (50) 61 (48) (51) 57 (50) 61 (48) (51) 57 (50) 61 (48) ZPR25 ZPR32 64 (56) 67 (54) 64 (56) 67 (54) 65 (57) 68 (55) 64 (56) 67 (54) 66 (58) 69 (56) 66 (58) 69 (56) 67 (59) 70 (57) ZPR40 ZPR50 ( ): Figures for female thread connections.

Table of Contents

Weight Unit: g End boss type (Symbol) Model H E M K 23 MHCA2-6 23 23 23 12-8-21 22 Angular Style Air Gripper Standard Type MHCM2-7S Size: 7 How to Order 7 MHC M 2 S Compact type Number of fingers Action Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 2 finger Single

SOLENOID VALVE, PROPORTIONAL VALVE, F47, 0.108 lb

Hydraulic

H B C F A E G J K L D Tolerance Size 40 double clevis type 50 double clevis type 63 double clevis type 80 double clevis type 100 double clevis type 125 double clevis type 160 double clevis type +0.027 0 +0.027 0 40 M8 x 20 21 60 45 19 12 R 15 9 12 18 32 47 44 L K counter bore depth 2 J counter bore 50 M10 x 22 23 73 50 23 12 R 18 11 14 21 35 53 53 A B +0.027 0 63 M10 x 25 27 80 55 23 15 R

ZP

G Hexagon width across flats 8 Hexagon width across flats 8 Hexagon width across flats 14 Hexagon width across flats 14 Hexagon width across flats 8 Hexagon width across flats 8 Flat with ribs Flat Type/Flat with Ribs Deep Model F Y A B C D Flat E Model H G: 4 G: 6 Flat with ribs U C ZPT25 -0-A10 U C ZPT32 -0-A10 U C ZPT20 -0-A10 ZPT25D10-0-A10 20 23 1.7 40.5 90.5 91.5 23 14 23 4 ZPT25D20

C85

12 19.5 21 20.5 26.5 21 22 18.5 25 20 25 5(30) 5(30) 55 55 80 80 16 23 19.5 23 20.5 26.5 23 22 20.5 25 20 26 22.5 25 23.5 29.5 25 25 22.5 29 ( ) for non rotating type.

Speed Controller with Indicator

, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

For details, refer to page 7-6-23.

KR

21.5 20 14 12.8 10 6 23.5 1 4 KAL06-U02 10 11.4 11.4 15 Applicable tubing 24.5 23 17 12 1 8 1 4 KAL08-U01 KAL08-U02 25.5 26 22.5 24.5 11 16 14 12 15.2 8 23 14.9 18.5 14.9 3 8 KAL08-U03 17 25.5 27 24 1 8 KAL10-U01 29.5 27 26.5 25 25 21 24 14.9 14.9 1 4 3 8 KAL10-U02 KAL10-U03 30 30.5 17 26.5 17 18.5 10 21 25.0 25.0 1 2 KAL10-U04 30 31.5 45 23 27 22 1 4 3 8 KAL12-

Table of Contents

0.32 6.2 23 0.27 5.8 25 0.21 6.2 16 0.37 4.6 18 0.41 5.1 20 0.27 5.2 23 0.32 6.1 23 0.26 5.8 25 0.20 6.1 15 0.38 4.1 16 0.31 4.3 17 18 0.31 0.28 4.6 4.7 20 21 0.33 0.30 5.4 5.4 14 0.38 3.6 17 [16] 0.39 [0.35] 4.8 [4.3] 17 0.29 4.6 18 0.29 4.6 21 [18] 23 [20] 0.31 [0.34] 5.6 [5.0] 0.27 [0.33] 5.9 [5.2] 16 [9.4] 0.39 [0.40] 4.2 [2.6] 17 0.36 4.5 20 0.31 5.3 18 [9.7] 0.32 [0.45] 5.0 [2.9] 21

KJ

(inch) Connection thread UNF NPT Model H (Width across flats) A M Min. port size Effective area (mm2) Weight (g) D1 D2 L2 L1 Nylon Urethane KSL03-34S KSL03-32 9 14 17 23 23 29 56 64 8 10-32 UNF 20.5 22 16 2.5 5 32 10.4 3.5 3.5 12 21 1 8 12.7 22 23.5 KSL07-34S 14.29 17 1 8 1 4 23 25.5 13.2 4 8.6 8.6 1 4 14 23.5 KSL07-35S KSL09-34S KSL09-35S KSL11-35S KSL11-36S 26 26.5 1 8 26.5

MXQ

23 23 23 32 44 31 56 H 55 55 55 65 80 44 66 66 NN 2 2 2 2 2 3 4 4 4 GA 23 23 23 23 32 72 88 97 122 HA 55 55 55 65 80 65 88 132 132 I 16 16 16 16 16 31 20 18 18 J 56 56 56 66 90 100 150 205 230 K 35 45 55 65 75 100 125 150 175 KA 170 223 248 NA 4 4 4 4 4 4 8 8 8 M 107 107 107 117 141 166 205 258 283 Z 105.5 105.5 105.5 115.5 139.5 164.5 203.5 256.5 281.5 ZZ 123 123 123 133 157 182 221 274