HEC_W-E

Product Development Div. 6, Engineering Headquarters Japan Technical Center, SMC Corporation, Address: 4-2-2 Kinunodai, Tsukubamirai-city, Ibaraki-ken, 300-2493 TEL: +81 297-52-6 FAX: +81 297-20-5007 E-mail: kaihatsu_6_g3@.smcjpn.co.jp Note: The contents of this manual are subject to change without notice. i Warranty Scope of warranty and liability to the Thermo-con Please thoroughly understand

CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

Compact Type

Standard Stroke (mm) Manufacturable stroke range Model Standard strokes CXSJ6 CXSJ10 CXSJ15 CXSJ20, 25, 32 60 to 100 10, 20, 30, 40, 50 80 to 150 10, 20, 30, 40, 50, 75 110 to 150 10, 20, 30, 40, 50, 75, 100 110 to 200 Strokes beyond the standard stroke range are available as a special order.

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

AMH X6 AMH X15 Body size Body size Options specification Options (Not available with element service indicator "T") Thread Accessories Thread Accessories Port size Port size Dimensions Dimensions Model Port size A 239 252 258 284 B 80 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 11/2, 2 AMH150 AMH250 80 Model Connection A 240 260 300 380 B 256 300 349 496.5 AMH450 AMH550

Scale Cylinder & Counter Series CE

DATA OUT 1 2 3 SET 1 2 SET MONOSASHI-KUN AC100V OUT1 COM OUT2 COM COM OUT3 Series Guide Series CE1 Bore size (mm) Available stroke range Standard stroke (mm) Series CEP1 Standard stroke (mm) Bore size (mm) 12 equiv. 250 400 500 300 175 200 150 125 100 75 50 100 25 75 50 25 12 25 to 150 20 equiv. 20 25 to 300 32 25 to 400 40 25 to 600 50 25 to 600 63 25 to 600 CEU1 CEU5 Output transistor system

5 Port Solenoid Valve Series SQ1000/2000

300 External pilot specification Supply/Exhaust block Blanking plate Individual supply spacer Individual exhaust spacer Supply block plate Exhaust block plate Built-in silencer Name plate Port plug Back pressure check valve SQ1000 0.25 0.18 450 600 750 150 300 SQ2000 0.82 0.65 450 600 750 Cylinder speeds marked with a are controlled by a fixed orifice.

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Clip type Quick change coils Clip design makes coil replacement easy (2 port) Improved corrosion resistance Special material introduced Threaded assembly Simplifies maintenance Brass/Stainless steel manifolds added to series (2 port) High flow rate: Cv factor 0.03 to 0.44 (2 port) Universal porting VDW200/300 (3 port) Bottom mounting threads Mounting bracket also available Series of compact

XL

For further details on solenoid valves, refer to the SMC solenoid valve catalog "SYJ 300, 500, 700" (E143-B). Note 3) Solenoid valves are shipped facing downward (flange side), but can be rotated to face upward.

NCA1

Oceania SMC Corporation of America (Tampa) 18167 US19 North Suite 150 Clearwater, FL 33764 TEL: (813) 243-8350 FAX: (813) 243-8621 SMC Corporation of America (L.A.) 14191 Myford Road Tustin, CA 92780 TEL: (714) 669-1701 FAX: (714) 669-1715 AUSTRALIA SMC Pneumatics (Australia) Pty. Ltd. NEW ZEALAND SMC Pneumatics (N.Z.) Ltd.

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CN5 parallel I/O connector CN4 serial I/O connector 150 132 141 CN3 encoder connector CN2 motor power connector CN1 power supply connector 4.6 for body mounting b) DIN rail mounting (LEC6D-) Refer to page 19 for L dimension and part number of DIN rail. (11.5) (81.7) 35 66 1 31 64.2 35 167.3 (When locking DIN rail) 173.2 (When removing DIN rail) 150 132 (91.7) Note) When two or more controllers

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Load N 0 50 100 150 Load N 0 50 100 150 Load N 200 16 16 16 L = 120mm L = 120mm L = 120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table displacement mm Table displacement mm Table displacement mm 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load N 150 100 50 200 250 Load N 150 100 100

ISA2

200 250 0 50 100 150 200 250 Supply pressure (kPa) Supply pressure (kPa) Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 0.6 0.4 0.5 mm 0.25 mm 0.5 Detection distance (mm) Detection distance (mm) 0.3 0.4 0.3 0.2 0.15 mm 0.2 0.15 mm 0.1 0.1 0.03 mm 0.01 mm 0 0 0 50 100 150 200 250 0 50 100 150 200 250 Supply pressure

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Heavy Duty Stopper Cylinder

300 300 200 200 Lower limit 100 100 Lower limit 0 0 10 20 30 40 0 10 20 30 40 0 Transfer speed [m/min] Transfer speed [m/min] RS2H63-30 The graphs indicate the values at normal temperature. (20 to 25C) = 0.2 = 0.1 1,000 900 800 700 600 500 400 300 200 100 0 1,000 900 800 700 600 500 400 300 200 100 0 Mass of transferred object m [kg] Mass of transferred object m [kg] 63 Operating range

Series SY100 3 Port Solenoid Valve Rubber Seal

27.8 (In case of AC) 25.3 21.2 VQ 9 A R 6 VQZ 5.5 3 3 9.5 5 4 VZ 19 VS 3-M3 X 0.5 (Piping port) L plug connector (L): SY1 4 (A)-lLll-M3 1 2 M plug connector (M): SY1 4 (A)-lMll-M3 1 2 (Indicator light and surge voltage suppressor) 15.6 (Indicator light and surge voltage suppressor) 45.6 (In case of AC) + P P 36 300 (Lead wire length) 300 (Lead wire length) 39.1 (In case of DC) + 27.7 (In

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(233) 224 (257) CRA1L50 CRA1F50 41 62 9 4 39 44 108 4.5 114 9 13 90 50 110 81 M 6 x 1.0 depth 12 235 (273.5) 263 (301.5) CRA1L63 CRA1F63 48 76 11 5 45 55 127 5 136 11.5 15 105 59 130 101 M8 x 1.25 depth 16 274 (318) 316 (360) CRA1L80 CRA1F80 58 92 13 5 55 67 154 6 165 13.5 18 130 76 160 119 M10 x 1.5 depth 20 333 (399) 375 (441) CRA1L100 CRA1F100 73.5 112 13 5 60 87 189.5 6 190 13.5 18 150

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(233) 224 (257) CRA1L50 CRA1F50 41 62 9 44 4 39 108 4.5 114 9 13 90 50 110 81 M 6 x 1.0 depth 12 235 (273.5) 263 (301.5) CRA1L63 CRA1F63 48 76 11 55 5 45 127 5 136 11.5 15 105 59 130 101 M8 x 1.25 depth 16 274 (318) 316 (360) CRA1L80 CRA1F80 58 92 13 67 5 55 154 6 165 13.5 18 130 76 160 119 M10 x 1.5 depth 20 333 (399) 375 (441) CRA1L100 CRA1F100 73.5 112 13 87 5 60 189.5 6 190 13.5 18 150

Air Cylinder NCA1 Series

R O D B O R E S I Z E 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/4 2 2-1/2 S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 1000 10 1200 12 1400 14 E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please consult P/A Customer Service for larger sizes.

Direct Solenoid

oN Opd.tion: 360 it60 131) 130 360 360 130 150 150 r5n 150 1 1 0 150 150 i $'q (46.C) (4.5) 0,177 t'r.5) (10) 0.39,1 ool (5) (5) .) 0346 19.81 0.543 03.31 03.q M6di4 air {lub.i*td d 0ll.16}, .nd non.flflm.blo mn.torlci non{orcs!.

HRX-OM-W038

(HRS050-A-20-(BJMTW)) 9.5.2 HRS040-W-20-(BJMTW) 1500 1500 Facility water temperature Facility water temperature 1200 1200 Heating capacity[W] Heating capacity[W] 40 40 900 900 32 32 25 25 600 600 20 20 5 5 300 300 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature[] Circulating fluid temperature[] 60H 50H Fig. 9-6 Heating capacity(HRS050-W-20-(BJMTW)) HRS Series