MXH

Vertical Horizontal l : Load eccentricity m Mounting orientation m L L Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Up to 300 Up to 100 Up to 500 Up to 100 Up to 300 Up to 500 Maximum speed (mm/s) (2) 50 (7) 100 (5) 50 (4) 100 (8) 200 (9) 100 (11) 50 (10) (1)

VQC

CAT.ES11-80 A 5-Port Solenoid Valve Series VQC NEW CONCEPT Connector Type Manifold Series VQC1000/2000/4000 Outstanding response times and long life Conforming to IP67 for protection from dust and moisture (Metal seal: Single type with light and surge suppressor) VQC1100: 10ms 2ms; 200 million cycles VQC2100: 20ms 2ms; 200 million cycles VQC4100: 17ms 3ms; 100 million cycles (Based on IEC529

AS-FG/ASD-FG

Male thread Proper tightening torque Nm Width across flats mm Nominal size of adjustable angle wrench mm M5 10/32-UNF 1/6 turn after hand tightening 8 100 1/8 1/4 3/8 1/2 150 200 200 200 14 17 21 24 7 to 9 12 to 14 22 to 24 28 to 30 17 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK EUROPE SWEDEN SMC Pneumatics Sweden AB SWITZERLAND SMC Pneumatik AG.

HRX-OM-W032

Table 7-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70 or

CY1F

Standard Stroke Maximum stroke available (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

Rotary Cylinder Series MRQ Size: 32, 40 1

DGraph (2) Cylinder Output on the Retracting Side (Double acting) 20150 1500 Tube bore size [mm] 100 1000 40 Side load Balance weight 40 50 400 500 32 20 25 30 200 250 300 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 15 150 Allowable Side Load on the Piston End (Nm) 10 100 Stroke of linear part Size 40 5 10 15 20 25 30 40 50 75 100 4 5 40 50 32 40 14 14 13 13 13 12 12 11

ZP

40 60 60 50 50 NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR Conductive silicon rubber 0 to 120 30 to 200 0 to 60 0 to 250 0 to 100 10 to 200 X X X X X X X X X X X X X X X X X X X X X X X The above table covers only general characteristics of subject rubber materials.

Magnetically Coupled Rodless Cylinder/ Basic Type CY3B Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Standard stroke 6 10 15 20 25 32 40 50 63 6mm 10mm 15mm Port thread type 20mm Bore size 6, 10, 15 Type M thread Rc NPT G Symbol 25mm 32mm Nil 20, 25, 32, 40 40mm TN TF 50, 63 50mm 63mm Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) 300 50, 100, 150, 200 6 500 50, 100, 150, 200, 250, 300 10 15 20 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 1000 1500 100

HEC_W-E

Table 3-1 Quality standard for fresh water (tap water) Item Standard value pH25oC 6.5 to 8.2 Electric conductivity (25oC) (S/cm) 100 to 800 Chloride ion (mgCl-/L) 200 or less 2-/L) 200 or less Sulphate ion (mgSO4 Acid consumption (pH4.8) (mgCaCO3/L) 100 or less Total hardness (mgCaCO3/L) 200 or less Calcium hardness (mgCaCO3/L) 150 or less Quality item Ion silica (mgSiO2/L) 50 or less Iron

AC Servo Motor Driver (Pulse input type)

No Initial value Recommended value Number of command input pulses per revolution *3 PA05 0 0 Electronic gear numerator *3 PA06 1 32768 65536 32768 65536 32768 65536 32768 Electronic gear denominator *3 PA07 1 150 75 75 150 75 75 250 125 125 200 100 50 Regenerative option PA02 0 0 (Non)/ 0002 (LEC-MR-RB-032) 1 1 0 0 Rotation direction selection *4 PA14 0 (+Counter (+Counter (+Counter (+Counter

Compact and Lightweight

Refer to back page 50 for Safety Instructions and pages 49 to 51 for Vacuum Equipment Precautions. Mounting Caution Caution ZK2 1.

39

Bore size (mm) Tightening torque (Nm) Description 50 2.6 to 3.5 Switch kit 63 2.6 to 3.5 50 130 to 150 Stopper bolt kit 63 160 to 200 50 1.5 to 2.0 Top cover kit (Rubber cover) 63 1.5 to 2.0 50 1.5 to 2.0 Top cover kit (Metal cover) 63 1.5 to 2.0 Note) Please make sure that the switch cassette is tightly secured to the body when it has been replaced with a new one. 24 Safety Instructions

RHC

C J G5-S 100 CV 250 = 0.7 200 MVGQ 0.5 0.1 0.3 150 CC 100 50 RB 0 1,000 2,000 3,000 J Maximum speed Vmax (mm/s) : Cylinder load ratio Vmax: Maximum speed (Refer to page 10-6-5.) D-X 20Data 10-6-19

Compact Hydraulic Cylinder

Standard Strokes Bore size (mm) Standard strokes (mm) 20 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

5 Port Solenoid Valve, Series VQC

: 20ms 2ms; 200 million cycles VQC4100: 17ms 3ms; 100 million cycles (Based on IEC529) (For kits S and T) Connector Compact and high flow Flow characteristics Note) Metal seal Applicable cylinder size (mm) Type (Series) Manifold pitch (mm) Rubber seal b C[dm3/(sbar)] Cv b C[dm3/(sbar)] Cv VQC1000 to 50 10.5 0.30 1.0 0.25 0.25 0.72 0.18 VQC2000 to 80 16 0.30 3.2 0.80 0.15 2.6 0.60 VQC4000

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power consumption (W) 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

0.5MPa 0.5MPa Gripping force N Gripping force N 0.4MPa 0.4MPa 150 150 F 0.3MPa 0.3MPa 100 100 0.2MPa 0.2MPa 50 50 0.1MPa 0.1MPa 0 0 10 10 20 20 30 30 40 40 50 50 Gripping point L mm Gripping point L mm MHS2-50D MHS2-50D F 400 400 Internal gripping Pressure 0.6MPa Pressure 0.6MPa 300 300 Gripping force N 0.5MPa 0.5MPa Gripping force N 0.4MPa 0.4MPa 200 200 0.3MPa 0.3MPa 1N: Approx. 0.102kgf

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

= 50 [mm] D-X L2 L1 20Data Item Load factor n Note 1.

VXP21/22/23

VN Rated voltage 1 2 3 4 5 6 7 8 9 Solenoid valve option Nil Standard 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 48 VAC 50/60 Hz Other (Please contact SMC separately.) LVC Select an option mark in page 17-3-10 by Applicable Fluids Check List for special fluids outside of the standard.

CEx-OMQ0011

(ON ON ON (LED)No.10() Err9 (P3)(P2) () Err9 Err9 ON ON ON ()5mm Err5 5mm 1 Err10: Err11 CPU Err12 ON 13-2 () 200 200 ( 6) 57 *200.0 PRG STEP P6 200.0 200 200 300mm/sec 50% 35% 58 141 No. No.