3 Port Air Operated Valve VPA3145/3165/3185 Series

118 45 113 36 71 95 1 1 4 1 1 1 1 4 1 2 VPA3185 118 13 2 132 14 80 95 140 52 140 41 81 105 2 1575

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

40 60 Suction flow 45 20 30 15 0 0 20 40 60 80 100 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Suction flow [L/min(ANR)] Supply pressure [MPa] 256 Vacuum Pad with Ejector ZHP Series Construction A-A Component Parts t !

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

75 G 6.5 8.5 F 12.5 25 EK 4 6 ED 9.5 13 E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15 CYP32 L 67 90 Z 118 155 Y 2.5 3.5 WB 17 27 WA 32 46 W 69 115 TB 18 22 TA 13 17 T 23 29 R 45 79.5 QW 48 87 N 4.5 7.5 Q 105 138 M 6 8 PB 60 100 MM M4 x 0.7 M6 x 1 PA 25 50 LW 69 115 P M5 x 0.8 Rc 1/8 LD 5.6 8.6 Model CYP15 CYP32 Note 1) These dimension drawings indicate the case of piping

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

TB W Counterbore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60 100

Heat Resistant 2-Color Indicator

Specications [mm] Table 1 Cylinder Strokes Bore size Stroke 16 15, 20, 25, 30 20, 25 15, 20, 25, 30, 35, 40, 45, 50 32 to 63 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Ambient and uid temperature range 32 to 302F [0 to 150C] Seal material Fluororubber Grease Heat resistant grease Standard stroke See Table 1. Dimensions See below.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(Default settings) Vibration resistance No malfunction occurred in a one-sweep test between 45 and 2000 Hz. Test was performed in both energized and de-energized states in the axial direction and at right angles to the main valve and armature.

PF-OMM0004_C

[F 2] OUT2 c()F( oF)() -40No.PF-OMM0004-D -41No.PF-OMM0004-D [F 3] [F 3] [RES] [F3] 7 s -42No.PF-OMM0004-D [F10] OUT1 OUT2 OUT1 OUT2 OFF [F10] [SUb] [F10] -43No.PF-OMM0004-D -44No.PF-OMM0004-D 9L 3 1.5s6 3s 9L [9] [F30] 1S =0 =0 [F20]45 9L 3 1.5s6 3s 9L 6 0 [0] [F30] 1S = = [F20]45 -45No.PF-OMM0004-D == 1 / ,/ ([F20](47 )) (53 )[F82] c () -46No.PF-OMM0004-D [F20

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Vibration resistance allows for normal operation of up to 30 m/s2 (45 to 250Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibration or impacts. High temperature type (temperature specification / H0 H4 H5) 1.

Rotary Table

Allowable load a b Allowable thrust loadN Allowable momentNm Size Allowable radial load a b Basic type High precision N type 1 31 41 41 0.56 0.84 2 32 45 45 0.82 1.2 3 33 48 48 1.1 1.6 7 54 71 71 1.5 2.2 Unit used as flange mount Rotary table can be mounted from three directions-Two side of axial direction and one side of lateral face.

LEC-T1_C

Test DRV 1 Start test Safety speed SET 75 - StopSET AX IS. Test DRV 1 Step No. 0 Posn 0.00mm Stop SET 1 Return SET AX IS. Test DRV 1 Step No. 0 Posn 123.45mm Complete(Return) (5-3-4) ON/OFF (5-3-4-1) SET AX IS.

MHK2

73 14 19 33 443 Series MHKL2/Long Stroke Type Note) Width at opening (mm) L2 Width at closing (mm) L1 Effective gripping force per finger (N) Action Opening/Closing stroke (mm) L2L1 Max. operating frequency (c.p.m) Weight (g) Model Bore size (mm) MHKL2-12D 12 External grip: 14 Internal grip : 16 11 9 20 104 Double acting Single acting External grip: 27 Internal grip : 30 External grip: 45

240

) Piston area (mm2) Operating pressure (MPa) Rod size (mm) Bore size (mm) Operating direction -XC22 Fluororubber seal 0.3 0.5 0.7 19 14 8 OUT 28 6 3 14 10 6 IN 21 55 39 23 OUT 78 10 4 46 33 19 IN 66 141 101 60 OUT 201 16 6 121 86 51 IN 172 220 157 94 OUT 314 20 8 185 132 79 IN 264 Weight (g) Stroke (mm) Model 5 10 15 20 25 30 40 50 60 MXH6 MXH10 MXH16 MXH20 61 104 194 352 66 112 204 369 75

Title not found

Arm opening angle 30, 45, 60, 90, 105, 120, 135 Switch TURCK/P&F Both TURCK and P&F switches are available. Port thread NPT/G Reduces the effects of impact from unclamping the cylinder. Arm Variation Prevents the infiltration of spatter, dust and other contaminants.

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

fluid temperature With auto switch: 10 to +60C (No freezing) Integrated clevis style 0.5 l/min (ANR) or less Allowable leakage Non-lube Lubrication JIS class 2 Thread tolerance JIS symbol +1.4 0 Stroke tolerance Rubber bumper Cushion Double acting/Single rod 1 8 1 4 Piping (Screw-in) Rc(PT) Rc(PT) Standard Stroke Long stroke (2) (mm) Bore size (mm) Standard stroke (mm) 400 20 450 25 25, 50, 75

CRQ2

S: Upper space 90, Lower space 180 6 Compact Rotary Actuator Rack-and-Pinion Type Series CRQ2 TF effective depth TL Sizes 20, 30, 40 TA TB 45 BE CA CA BU 8-JJ (opposite side 4 places) 2-J through (opposite side JA counter bore depth JB) BD B With double shaft DD W D I K Auto switches b (10) Max. 2-Rc1/8 (port size) H F (US) M (UW) CB Q BC N BB BA BA G D A (AU) Max S L TF effective depth TL

CYV

TB W Counter bore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60

MHK2

73 14 19 33 443 Series MHKL2/Long Stroke Type Note) Width at opening (mm) L2 Width at closing (mm) L1 Effective gripping force per finger (N) Action Opening/Closing stroke (mm) L2L1 Max. operating frequency (c.p.m) Weight (g) Model Bore size (mm) MHKL2-12D 12 External grip: 14 Internal grip : 16 11 9 20 104 Double acting Single acting External grip: 27 Internal grip : 30 External grip: 45

MHL2

D(Finger closing port) M5 x 0.8 (Finger closing port) M5 x 0.8 20Auto switch mounting groove (4 locations) 4-M6 x 1 (Piston rod and rack screw) Width across flats 10 (4 locations) Closed E 4-M5 x 0.8 through Open F (Thread for mounting attachment) (mm) A B C D E F G H 40 70 90 J 98 152 192 Model MHL2-16D MHL2-16D1 MHL2-16D2 45 75 95 60 90 110 28 58 78 68 110 130 98 170 210 128 200 240 26

KS/KX

36.5 KSH04-M5 KSH04-M6 KSH04-01S KSH06-M5 KSH06-M6 KSH06-01S KSH06-02S KSH08-01S KSH08-02S KSH08-03S KSH10-02S KSH10-03S KSH10-04S KSH12-03S KSH12-04S 9 12 37 33 8 16 10.4 2.5 4.0 4.0 4 38 37.5 38 39.5 42.5 44 47 48 54 55 57.5 57 60 14 34 33.5 34 35.5 36.5 40 41 41.5 48 48.5 49.5 50.5 52 12 1 8 M5 X 0.8 M6 X 1.0 2.5 3 4.0 4.0 5.6 5.6 12 8 6 17 14 12.8 1 8 1 4 1 8 17 23 23 29 37 55 63 81 75

Wedge Cam Operation Provides

cover materials Chloroprene rubber (CR) (Standard), Fluoro rubber (FKM), Silicon rubber (Si) Model Series MHK/Standard models Max. operating frequency (c.p.m) Effective holding force per finger (N) Note) Action Closed distance (mm) (L1) Open distance (mm) (L2) Opening/Closing stroke (mm) (L2_L1) Bore size (mm) Weight (g) Model MHZ2 MHK2-12D 12 External hold: 15 Internal hold: 16 4 9 13 75