5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Switch (when equipped with switch) Internal pilot manifold L: Dimensions n : Stations (n1 + n2) External pilot manifold L: Dimensions n : Stations (n1 + n2) L n 4 160.5 150 129 16 L n 4 173 162.5 139.5 17 2 135.5 125 108 14 3 148 137.5 118.5 15 5 173 162.5 139.5 17 6 185.5 175 150 18 7 185.5 175 160.5 12.5 8 198 187.5 171 13.5 9 210.5 200 181.5 14.5 10 223 212.5 192 15.5 2 148 137.5 118.5

SZ3000

150 18 7 185.5 175 160.5 12.5 8 198 187.5 171 13.5 2 148 137.5 118.5 15 3 160.5 150 129 16 4 173 162.5 139.5 17 5 185.5 175 150 18 6 185.5 175 160.5 12.5 7 198 187.5 171 13.5 8 210.5 200 181.5 14.5 L1 L2 L3 L4 L1 L2 L3 L4 26 Cassette Type Manifold Series SZ3000 Dimensions/SZ3000: Serial Transmission Type SS5Z3-60S DB Stations Scale: 37% [With external pilot] 2-One-touch fitting (X,PE ports

Series VQ Metal Seal/Rubber Seal Body Ported

5m Speed controller: AS3000F-06 (S=6.5mm2) Cylinder stroke 100mm Fitting (One-touch fitting) Effective area (mm2)(Cv) Cylinder Speed (mm/s) Model AS3000F-06 (S=6.5mm2) Cylinder stroke 50mm 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 6 4.5 (0.25) VQ1000 (Metal seal) 6 6.3 (0.35) VQ1001 (Rubber seal) Series VQ2000 Cylinder bore size (mm) Series CJ2 Pressure

0.4

(packaged together) 50 80 650 F 40 550 G 10 300 H 4 200 J Filter (IN port) Nil Without filter F With filter Note) 100 Note) Flow reduction rate 50 L/min: 5% or less 100 L/min: 5 to 10% 150 L/min: 10 to 15% 80 600 K 40 500 L 10 250 M 4 150 150 Specifications Flow rate (L/min) [at 0.25 MPa] 50 100 150 Power consumption (W) 80 40 10 4 80 40 10 4 80 40 10 4 Type of actuation 2-position 2 port

Compact Manifold Regulator

Flow rate L/min (ANR) Flow rate L/min (ANR) Condition: Inlet pressure 0.7 MPa ARM11AA1-310-1 (One-touch fittings: IN 8, OUT 6) Condition: Inlet pressure 0.5 MPa ARM11AA1-310 (One-touch fittings: IN 8, OUT 6) 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0.00 0 0 50 100 150 200 0 50 100 150 200 250 300 Flow rate L/min (ANR) Flow

LEH_C

1% / 150% 0.01mm / /0.5 (+) +(0.01mm) (-) -(0.01mm) () JOG () ON/OFF No.

MX-OMP0051

3 , , 13 OFF MXQ6(A) 2.85 5.65 MXQ8(A,C) 2.4 5.6 MXQ12(A,C) 4 5.5 MXQ16(A) 5 5.5 MXQ20(A) 5.5 5 MXQ25(A) 10 8.5 ON 14 2-9 3mm 3mm 2-10 5~6mm 0.05~0.15Nm 90 ( ) 15 D-M9M9W A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 18 7.4 7.4 7.4 7.4 0 0.6 3.6 5.6 5.6 MXQ8(A,C) 13.9 13.9 13.9 13.9 13.9 13.9 5.1 5.1 5.1 11.1 28.1 5.1 MXQ12(A,C) 16.5 16.5 16.5 16.5 16.5

S070

3.4 mounting hole Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 150 (Lead wire AWG#26) 22 5 6 22 20.5 3 2 11 1 7 6 5 12 12.3 12 25 M5 x 0.8 3 (EXH) port M5 x 0.8 2 (OUT) port M5 x 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (

Blow Gun Series VMG

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size Nozzle length 1.5 2 1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5

3 Port Solenoid Valve

wire AWG#26) 3.5 27 6 26 23.5 20.5 3 9.5 28.5 3.5 4 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21 2-3.4 Mounting hole 150 (lead wire AWG#26) 22 5 6 22 20.5 3 2 1 11 7 6 5 12 12.3 12 25 M5 0.8 3 (EXH) port M5 0.8 2 (OUT) port M5 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (lead wire AWG#26) 3.5 27 27.5 25 22

33

HRS HRS 090 HRS 100/150 HRSH 090 HRSH HRSE HRSE HRZ HRZD Lots of variations are available in response to the users requirements.

Nozzle Type Ionizer

mm x 150 mm, capacitance: 20 pF) as defined in the U.S.

Support Guide/11-LEFG Series

(= E) 150 60 Dimensions [mm] Dimensions [mm] Model L A B n D E 11-LEFG40-S-150 354 157 328 4 150 11-LEFG40-S-200 404 207 378 6 2 300 11-LEFG40-S-250 454 257 428 11-LEFG40-S-300 504 307 478 11-LEFG40-S-350 554 357 528 8 3 450 11-LEFG40-S-400 604 407 578 11-LEFG40-S-450 654 457 628 11-LEFG40-S-500 704 507 678 10 4 600 11-LEFG40-S-550 754 557 728 11-LEFG40-S-600 804 607 778 Model L A B n D

MGP

60204-1: Safety of machinery -Electrical equipment of machines (Part1:General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -(1:) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 MGP series 113) 3) 1 1 () 4 2 T (d=) 2 T 2 2 RSQ 400mm (mm) 3 1mm MGPM MGPL (mm) MGPS (mm) (mm) 10% 25% 140% (/MGPM50) MGPS MPGM 50 30 25 80 45

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQZ3000 VFS VS 0.7 0.9 VS7 Bore size (mm) Cylinder speed (mm/s) Base mounted (With sub-plate) Cv Series CJ2 Series CM2 Series CA1 6 10 16 20 25 32 40 40 50 63 80 100 150 300 VQZ1000 Body width 10 450 0.3 V V V 600 750 150 300 VQZ2000 Body width 15 0.6 450 V 600 V V 750 150 300 VQZ3000 Body width 18 0.9 450 V V V V V 600 750 Cylinder speed marked with can be controlled by speed controller

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

C4 C6 C4 C6 Stations L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 123 135.5 125 102 16.5 148 148 160.5 150 173 185.5 175 198 210.5 200 112.5 91.5 15.5 137.5 137.5 123 12.5 162.5 144 14.5 187.5 165 16.5 133.5 13.5 154.5 15.5 175.5 17.5 112.5 17.5 Stations SS5Y3-45GUBC4 C6 2 3 4 5 6 7 8 9 10 Stations L1 L2 L3 L4 135.5 125 108 13.5 148 160.5 150 129 15.5 173 185.5 175 150 17.5 185.5 175 198 210.5 200 223

CE2

Counter value 10-12-44 10-12-45 3 Flow Chart to Confirm Utility of Stroke Reading Cylinder with Brake Precautions Depending on the operating conditions, stable stopping accuracy may not be obtained. Therefore, make sure to follow the flow chart shown below. Be sure to read before handling. For Safety Instructions and Actuator Precautions, refer to page 10-24-3 to 10-24-6.

Auto Switch Guide

Weight (g) D-P5DW Auto switch model 0.5 Lead wire length (m) 3 150 5 244 Magnetic Field Resistance Auto Switch Internal Circuit When the AC welding current is 16000 A or less, the operational distance between the welding conductor (welding gun or cable) and the cylinder or auto switch can be 0 mm. Please consult with SMC when exceeding 16000 A.

Wireless System

EX600-ZT1 y Communication Cable with Connector/Communication Connector Cable with M12 RJ-45 connector EX9-AC 020 EN-PSRJ (Plug/RJ-45 connector) 14.8 Cable length (L) M12 RJ-45 6.4 010 1000 mm 020 2000 mm 030 3000 mm 050 5000 mm 100 10 mm (47.3) (44) L Cable core wire colors 1 2 1 2 3 4 5 6 7 8 Terminal no. Terminal no.

EX250-SEN_eng

Safety cannot be assured in the case of unexpected malfunction. 7 3 5 6 9 1 2 4 8 10 0 Blue : 24 VDC (for input and controlling) 118.5 76.5 97.5 108 139.5 55.5 66 87 129 150 L1 45 4 3 Black : 0 V (for input and controlling) 236.8 152.8 194.8 215.8 278.8 L2 110.8 131.8 173.8 257.8 299.8 89.8 Power supply connector Provide grounding to assure the safety and noise resistance of the Fieldbus