Vacuum System Peripherals: Series ZM 13-14-20 4.
V = 400 mm/s (16) l = 100 mm, V = 400 mm/s 50 50 100 100 100 100 80 80 80 80 63 63 50, 63 50, 63 50 50 10 10 40 40 40 40 5 5 Load weight m (kg) Load weight m (kg) 32 32 32 32 25 25 25 25 20 20 20 20 1 1 16 16 16 16 12 12 12 12 0.1 10 20 30 40 50 51 100 300 200 0.110 20 30 40 50 51 100 300 200 Stroke (mm) Stroke (mm) 8-19-15 Series MGP Horizontal Mounting (Ball bushing bearing) (17) l = 50
17 17 17 17 17 17 13 13 13 14 14 15 Note) Average value at normal temperature including hysteresis.
36 75 155 74 35 4.6 12 88 9 9 18 40 77.5 50 224 3 264 43 20 186 44.5 84 16 6.4 115 11 11 20 93 50 70 3.3 303 277 43 20 191 44.5 16 84 6.4 117.5 11 11 20 50 98 70 316 3.3 280 46 20 196 44.5 84 13 6.4 117.5 11 20 11 50 70 98 319 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of Optional specification Note 2) the piping.
< 200st 200 200 200 200 200st< 300st 100st< 200st 105 105 117 117 200st< 300st 300st< 60 60 77 77 14 48 54 70 78 22 25 30 38 20 24 24 24 110 110 120 120 M5 X 0.8 10 10 12 12 40 44 44 44 300 300 3 3 3 4 5 5 17 17 56 62 81 91 15 17 29 29 3.5 3.5 3.5 4.5 25 27 39 39 41 46 54 64 50 56 72 82 12 16 20 25 37 38 44 50 CY1 16 M5 X 0.8 18 167 167 M6 X 1.0 MY1 26 M6 X 1.0 MGPM(Slide Bearing)/Dimensions
Magnet Brake spring Zinc chromated 16 NBR Stainless steel Rod seal 20, 25: Hard chrome plated 17 6 Piston rod NBR Carbon steel Piston seal 32: Hard chrome plated 18 NBR 7 8 9 Chrome molybdenum steel Lock ring seal Pivot Electroless nickel plated 19 NBR Carbon steel Tube gasket A Dust cover holding bolt Nickel plated 20 NBR Stainless steel Tube gasket B Dust cover 21 NBR Scraper 20: Nickel
Insulation resistance M/km, 20C 5 or more L Note) The minimum bending radius of the circular connector cable is 20 mm. 60 30 Plug terminal no. 15 14 2 1 17 16 25 24 13 3 18 23 12 4 26 19 22 11 5 21 20 10 9 8 7 6 Socket side Note) Lengths other than the above are also available. Please contact SMC for details. Note) For CE compliant models, DC-type only.
Insulation resistance M/km, 20C 5 or more L Note) The minimum bending radius of the circular connector cable is 20 mm. 60 30 Plug terminal no. 15 14 2 1 17 16 25 24 13 3 18 23 12 4 26 19 22 11 5 21 20 10 9 8 7 6 Socket side Note) Lengths other than the above are also available. Please contact SMC for details. Note) For CE compliant models, DC-type only.
40.2 M14 x 1 16.8 -06E 4.7 17 6 12.8 22.3 10.1 18.4 17 1/8 19 43.4 M16 x 1 20 -08E 18.5 8 30.2 15.7 6 22.6 22 24 46.4 M20 x 1 22 -10E 21 10 54.7 22.6 17 47 M14 x 1 16.8 KK4P-06E 4.7 17 6 12.8 30.6 10.1 17 19 50.2 M16 x 1 20 -08E 6.2 18.5 8 22.6 38.2 19.8 25.2 1/4 22 24 53.2 M20 x 1 22 -10E 7.7 21 10 35.3 61.4 27.6 54.2 -12E 9 75.2 40.2 24 27 M22 x 1 23 22 12 50.9 60.1 KK6P-12E 9.2 86.1 41.2
40.2 M14 x 1 16.8 -06E 4.7 17 6 12.8 22.3 10.1 18.4 17 1/8 19 43.4 M16 x 1 20 -08E 18.5 8 30.2 15.7 6 22.6 22 24 46.4 M20 x 1 22 -10E 21 10 54.7 22.6 17 47 M14 x 1 16.8 KK4P-06E 4.7 17 6 12.8 30.6 10.1 17 19 50.2 M16 x 1 20 -08E 6.2 18.5 8 22.6 38.2 19.8 25.2 1/4 22 24 53.2 M20 x 1 22 -10E 7.7 21 10 35.3 61.4 27.6 54.2 -12E 9 75.2 40.2 24 27 M22 x 1 23 22 12 50.9 60.1 KK6P-12E 9.2 86.1 41.2
17 17 17 21 21 21 21 22 22 22 22 25 25 25 33 33 1.6 1.6 3.5 3.5 3.5 3.5 5.4 5.4 5.4 5.4 8.5 8.5 8.5 8.5 9.8 9.8 9.8 12.8 12.8 13 20 13 20 34 65 30 28 37 63 32 41 65 70 64 80 132 116 150 100/800 100/800 100/800 100/600 100/400 100/200 100/200 100/200 100/200 100/200 100/200 100/200 100/200 100/100 100/200 100/100 100/100 50/100 50/100 ** Non-Standard Product, consult factory for lead time
21 21 32 25.2 34.4 18.2 AS221FG-02-06 AS221FG-N02-03 17 25.2 34.4 12.8 6 10.4 5/32" 16 R(PT) 1/4 18.5 35.4 40.4 17 34.4 29.4 32 18.2 24.9 34.2 AS221FG-02-08 AS221FG-N02-05 34 18.5 27.2 36.4 15.2 8 11.4 3/16" 17 NPT 1/4 17.5 25.2 34.5 20 AS221FG-02-10 AS221FG-N02-07 36 21 33.9 43.2 18.5 10 13.2 1/4" 40.4 35.4 34.4 29.4 18.5 34 18.5 27.2 36.4 AS321FG-02-06 AS221FG-N02-09 60 17 27.8 39.3 12.8
Magnet Brake spring Zinc chromated 16 NBR Stainless steel Rod seal 20, 25: Hard chrome plated 17 6 Piston rod NBR Carbon steel Piston seal 32: Hard chrome plated 18 NBR 7 8 9 Chrome molybdenum steel Lock ring seal Pivot Electroless nickel plated 19 NBR Carbon steel Tube gasket A Dust cover holding bolt Nickel plated 20 NBR Stainless steel Tube gasket B Dust cover 21 NBR Scraper 20: Nickel
Outlet air atmospheric pressure dew point C P1 = 0.5MPa P1 = 0.5MPa 10 10 20 20 P1 = 0.7MPa P1 = 0.7MPa 30 30 40 40 0 40 80 120 160 20 40 60 80 0 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG20 IDG30 P1 = 0.3MPa P1 = 0.3MPa 0 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C P1 = 0.5MPa 10 P1 = 0.5MPa 10 P1 = 0.7MPa 20 20 P1
600 600 X 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] L5 [mm] 600 600 600 600 m Wall L5 Y 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20
Pressure switch Page 16 Compact switch M5 x 0.8 1/8, 1/4, 3/8, 1/2 Cross interface Page 17 Allows piping in all 4 directions. 3-port valve for residual pressure release Page 17 Releases residual pressure in lines. 1/8, 1/4, 3/8, 1/2 Made to Order specification Refer to page 20 for details. Accessories Refer to pages 18 and 19 for interfaces and brackets. Features 5 Feature 6 F.R.L.
20 5.1 5.1 2.6 2.6 0.6 0.6 0.1 0.1 30 30 3.4 3.4 1.7 1.7 0.4 0.4 0.1 0.1 For transfer load of 3kg For transfer load of 1kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 20 20 5.1 5.1 2.6 2.6 0.6 0.6 0.1 0.1 30 30 3.4 3.4 1.7 1.7 0.4 0.4 0.1 0.1 Refer
BA 0 0.3 CA BA 0 0.3 Drawing of view E Bore size (mm) S NA Z NB H CA GA BA CB GB 14.5 4.5 1.6 24 6 15 15 3 8 12 11 28 17 24.5 7 85.5 M3 x 0.5 14 32 57.5 T 3 M8 x 1.0 NN FB FC FT FX MM FY FZ GC F D BB A 20.5 20.5 9.5 9.5 83 82 M5 x 0.8 M4 x 0.7 55 54 M12 x 1.0 M10 x 1.0 28 28 17 20 5 5 16 10 15 15 18.3 15 18.3 12 20 14 5 4 8 8 5 5 11 11 17.5 19 5.5 5.5 2.3 2.3 33 33 20 20 42 42 With air
18 19 20 21 22 23 24 VF Station 1 Station 2 15 14 3 2 1 VP4 VV5Q21 17 16 25 24 13 Station 3 23 18 12 4 VQ 1/2 VQ 1/2 26 22 19 Station 4 11 5 21 20 10 9 8 7 6 Station 5 VQ 4/5 The total number of stations is tabulated starting from station one on the D-side.