MY1

Auto Switch Proper Mounting Position for Stroke End Detection MY1CW 16, 20 MY1MW 16, 20 B A Reed switch D-A90(V), D-A93(V), D-A96(V) Solid state switch D-F9N(V), D-F9P(V), D-F9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) Mounting position 16 20 20 16 20 Mounting position Mounting position 16 A 70 90 93 73 94 A A 74 B 90 110 107 87 106 B B 86 Operating range Note) 11 7.5 6.5 8.5 6.5 Operating range

Environment

1000 1000 1000 X Motorless 500 500 500 500 LAT 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 LZ Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 LC3F2 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16

CM2

10 14 MB +0.070 0 0.1 0.3 12 16 24 50 M14 x 1.5 92 20 14 13 +0.070 0 0.1 0.3 12 16 69 22 24 55 M14 x 1.5 15.5 20 Double Knuckle Joint MB1 Y (Max.)

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Stroke range (mm) O P AJ AI AH AG AB AA V U T S N M L A K J I B AP AK AL Rc 1/8 20 95 82 125 112 11 12 48 82 12 26 45 25 80 60 55 30 108 99 6.6 25 9 75, 100, 125, 150, 200 M6 x 1 depth 9 Rc 1/8 25 108 92 150 134 13 16 57 100 13 31 54 35 100 70 65 35 130 30 109 9 9 M6 x 1 depth 13 75, 100 125, 150 200, 250 300 Rc 1/8 32 118 102 150 134 16 16 65 114 16 38 60 35 106 80 73 40 135

Vacuum System Peripherals:

/S (8 points output) R2 09 9 Can accommodate up to 16 solenoids.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG The above values are the maximum allowable values for moment and load.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

MK

Content 12 MK-12-PS 16 MK-16-PS 20 to 32 Bore size (mm) Not able to disassemble Set of nos. above @4 @5 @6 @7 @8 Seal kit includes @4 to @8.

MK

Refer to the following table for the tightening torque for mounting. 10 Allen wrench 9 Wrench 10.5 Nm Arm Standard tightening torque 0.4 to 0.6 2 to 2.4 4 to 6 8 to 10 14 to 16 Bore size (mm) 12 16 20, 25 32, 40 50, 63 7 6.5 11.5 10.5 4.1-7 Series MK 12, 16, 20, 25 Through hole (Basic)/MKB 12 16 A B C D Model 0 0.043 0 0.043 E F G H 8 MKB12 MKB16 5 15.5 M3 X 0.5 5.5 11h9 6 25 32 20 7 M5 X

SFOD-OMT0009CN

(DIN ) 1) 2) 3) 25 No.SFOD-OMT0009CN-B 4.2 (1) (9) (2) (10) (3) (4) (15) (16) (7) (11) (5) (12) (17) (8) (18) (19) (6) (20) (13) (14) 1 PWR LED() ON OFF 2 RUN LED I/O USB 3 USB USB LED USB USB 4 ALM LED 5 USB USB 6 C PWR 2 (+)(-) 7 I/O 1 I/O 40 I/O PLC 8 I/O 2 I/O 40 I/O PLC 9 ENC1 (16 ) 1 10 MOT1 (6 ) 11 ENC2 (16 ) 2 12 MOT2 (6 ) ) (+)1 (+) 1 (+)2 (+)2 (+) 13 CI 1 2 )

ZSE F/ISE

Auto preset 16-2-41 16-2-43 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation. 16-2-42 Manual fine adjustment Peak hold Key lock Bottom hold Unit conversion Can retain the maximum pressur displayed during measurement. Prevents incorrect operation such as overwriting set point value by mistake.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Fitting plug KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 Dimensions L (mm) A Applicable fitting size d A L D Part number KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 5 6 8.5 10 11.5 31.5 32 35 39 43 1/8 5/32 1/4 5/16 3/8 16 16 18 20.5 22 D Used to block unused cylinder port. L DIN rail AXT100-DR12.5 (Pitch) 5.25 7.5 Suffix number into from the dimension table below.

CNS

For details, refer to page 9-15-42. 9-8-22

ISA2

-8-16.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

15 17 20 25 118 139 167 202 14 16 19 24 15 17 20 25 Single Shaft Type The dimensions below show pressurization to B port

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

34 13 20 3 22 50 19 5 1/4 CDRA1BSU80 M12 x 1.75 depth 14 0 0.036 8 112 172 28 25 12.5 16 73.5 M24 x 1.5 85 33 12 22 40 45 85 39 16 34 13 25 4 22 60 19 5 3/8 CDRA1BSU100 Foot style: CDRA1LSU Single shaft flange style: CDRA1FSU Foot bracket Auto switch D-A53 Mounting holes A port B port The dimensions above show pressurization to B port

10

Made to Order (For details, refer to pages 16 to 21.)

4-channel Flow Monitor ( compatible)

to 31 CH4: Flow measurement value With symbol 16 bit 32 to 47 CH3: Flow measurement value With symbol 16 bit 48 to 63 CH2: Flow measurement value With symbol 16 bit 64 to 79 CH1: Flow measurement value With symbol 16 bit Bit offset 79 78 77 76 75 74 73 72 71 70 69 68 67 66 65 64 Item CH1: Flow measurement value (PD) Bit offset 63 62 61 60 59 58 57 56 55 54 53 52 51 50 49 48 Item CH2: Flow

MHS

20 25 32 40 50 63 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 21 37 63 111 177 280 502 1 N 23 42 71 123 195 306 537 mm 4 4 6 8 8 12 16 g 58 96 134 265 345 515 952 1) 1625 L=20mm 3263 L=30mm 0.5MPa MHS3 16D MHS320D MHS325D MHS332D MHS340D MHS350D MHS363D MHS380D MHS3100D MHS3125D MHS3mm 16 20 25 32 40 50 63 80 100 125 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 30 14 25 42

Cylinder with Lock Series CNS

(same side) (n 4) 2 (n 4) 2 25 + 55 135 + 55 125 + 55 BT-12 BT-12 BT-16 F5W/J59W/ F5BAL/F5F n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 2 pcs.(different side, same side), 1 pc. D-F5W, J59W D-F5BAL D-F59F D-F5NTL 155 35 145 D-A3/A4/G39/K39 BS1-125 BS1-140 BS1-160 (n 4) 2 (n 2) 2 (n 4) 2 155 + 55 35 + 55 145 + 55 "n" pcs.