CM2

No. of auto switches mounted 2 Different sides C85 Auto switch model Same side n Different sides 1 Same side C95 D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 10 50 15 50 + 45 (n 2) n 2 2 15 + 45 ( ) (n = 2, 4, 6) CP95 10 60 15 60 + 45 (n 2) NCM NCA n 2 2 15 + 50 ( ) (n = 2, 4, 6) 10 65 15 65 + 50 (n 2) Dn 2 2 D-B5/B6 D-G5NTL 15 + 50 ( ) (n = 2, 4, 6) 75 10 15 -X 75 + 55

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Positioning Operation Pushing Operation ON OFF ON OFF IN IN Input Input 15 ms or more Output the step data no. 15 ms or more Output the step data no.

Environment

10 5 0 15 10 5 20 25 30 0 15 10 5 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 1500 1000 1000 1000 1000 L8 [mm] L8 [mm] L8 [mm] L8 [mm] Z 500 500 500 500 Mep m 0 0 0 0 0 2 1 3 4 5 0 15 10 5 0 15 10 5 20 0 15 10 5 20 25 30 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

Vacuum System Peripherals:

U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

15 17 20 25 118 139 167 202 14 16 19 24 15 17 20 25 Single Shaft Type The dimensions below show pressurization to B port

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Note) Other dimensions are the same as the single shaft. l 25 30 40 45 N 15 17 20 25 U 89 105 130 156 L 14 16 19 24 Model G 11 13 15 19 H 27 29 38 44 UU 109 127 155 186 K 5 5 5 5 UU 134 158 192 232 Model H 27 29 38 44 G 11 13 15 19 M 20 22 25 30 N 15 17 20 25 L 14 16 19 24 Model H 36 41 50 60 CRA1BY50 CRA1BY63 CRA1BY80 CRA1BY100 CRA1BX50 CRA1BX63 CRA1BX80 CRA1BX100 CRA1BZ50 CRA1BZ63 CRA1BZ80

LJ1H

Refer to page 204 regarding brake wiring. 600 a = 2000 a = 1000 400 a = 3000 a 200 L3 Mey 0 5 10 20 15 Transfer load m (kg) Refer to page 145 for deflection data. 42 43 Standard Motor/Vertical Mount Specification Series LJ1H30 Dimensions/LJ1H303NA Scale: 10% 8H10 depth 10 4-M8 x 1.25 thread depth 10 120 4-M12 x 1.75 thread depth 15 20 80 LJ1 LG1 LC1 LX LC6D/LC6C Switches 12.5 16.5 Cable entry

VS 8-2/VS 8-4

SOL.A 1 Station 1 Station 2 Station 3 Station 4 SOL.A 14 SOL.A 2 1 SOL.A 14 15 2 SOL.A 15 3 3 4 5 6 7 8 9 Station 5 16 17 18 19 20 SOL.B 16 SOL.A 4 External pilot port Station 6 SOL.B 17 SOL.A 5 Station 7 21 22 23 SOL.B 18 10 SOL.A 6 11 12 13 Station 8 SOL.B 24 Port plug AXT95419 25 18 mm and 26 mm sizes mixed COM. 13 Connector terminal no.

V

15 40.5 6.5 3.3 ZPT16 U C 16 18 12.5 17.5 20 38.5 25 43.5 3.5 1.2 ZPT50U C 50 53 19.5 25.5 3 15 51.5 4.5 15 41.5 7.5 3.8 D E E P T Y P E D E E P T Y P E G:M5x0.8 G:M6x1 Model A B C D E F E F Y H:M6x1 H:M6x1 H O W T O O R D E R S E E N E X T P A G E Model A B D E Y C F G C F G ZPT10D 10 12 15 20 20 41 25 46 6 ZPT40D 40 43 29 35.5 3 25 61 4.5 15 51 17 ZPT16D 16 18 16 21 20 42 25 47 7 Courtesy

C95

K2 H6 EU 11 11 15 15 18 18 10 12 12 16 16 20 6.6 6.6 9 9 11 11 38 41 50 52 66 76 51 54 65 67 86 96 10 10 12 14 18 20 21 24 33 37 47 55 7 9 11 11 12.5 13.5 18 22 30 35 40 50 26 28 32 40 50 60 31 35 45 50 60 70 32 36 45 50 63 71 8 10 12 12 14 15 10 11 12 15 15 19 32 40 50 63 80 100 11 11 15 15 18 18 10 12 16 16 20 20 21 24 33 37 47 55 8.5 8.5 10.5 10.5 11.5 12.5 10 10 12 12 14 15 6.6 6.6 9

NCA1

/64 2.76 1 3/8 2.34 4 1/4 2.72 8.02 1 1/2 2 7/16 2 5/8 2.40 M24x1.5 400 (4) 1 3/4-16 1 1/8 4.7 1 1/2 1/2 7/8 3/8-24 4 1/2 0 1/2 1.57 1.10 5/8 27/64 3.32 1 3/8 2.34 4 1/4 2.72 8.02 2 1/16 2 7/16 2 5/8 2.40 M24x1.5 (in) Bore (in) TN XT SN d mm NT ND 150 (1.5) 5/8 1 15/16 2 1/4 1.81 M16x1.5 1/4-20 9/32 200 (2) 7/8 1 15/16 2 1/4 1.81 M16x1.5 5/16-18 7/16 250 (2.5) 1 1/4 1 15/16 2 3/8 1.69 M16x1.5

Secondary Batteries

Bore size Cylinder stroke (mm) 12 16 20 25 32 40 50 63 80 100 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Built-in Magnet Cylinder Model 12, 16 20, 25 32, 40 50 to 100 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 If a built-in magnet cylinder without an auto switch is

Series VQ Metal Seal/Rubber Seal Body Ported

) 12 or less 15 or less Single Rubber seal VQ1141 6.3 (0.35) 15 or less 20 or less Metal seal VQ1240 4.5 (0.25) 12 or less 15 or less Double (latching) Rubber seal VQ1241 6.3 (0.35) 15 or less 20 or less Metal seal VQ1340 4.5 (0.25) 20 or less 26 or less Closed center 57 VQ1000 Rubber seal VQ1341 6.3 (0.35) 25 or less 33 or less Metal seal VQ1440 4.5 (0.25) 20 or less 26 or less Exhaust center

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

0 5 10 15 20 25 0 5 10 15 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 600 600 600 Z 400 400 400 200 200 200 Mep m 0 0 0 0 5 10 15 0 5 10 15 20 25 0 5 10 15 20 L8 Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

High Purity Fluoropolymer

Model K J E L M H t W1 W2 LQ1P1A LQ1P2A LQ1P2B LQ1P2C LQ1P3A LQ1P3B LQ1P4A LQ1P4B LQ1P5A LQ1P5B LQ1P6A LQ1P6B 11.5 10 13 10.5 6 44 8 11 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 1/2" 3/8" 3/4" 1/2" 1" 3/4" M 25 1 16.5 15 14 6 17 14.5 55.5 8 15 Class 6 23 20 17 7 24 20.5 69 8 21 28 24 21 7 28 24.5 78.5 8 26 39 29 26 9 43 36.5 100 13 39 49 36 10 39.5 55 48.5 133 20 51 15 High Purity Fluoropolymer Fittings

Rotary Actuator

Single round shaft: ClRA1BT Double shaft (round shaft, with four chamfers): ClRA1BJ Double round shaft: ClRA1BK D D D H H H H UU UU M N 0 0.2 G D L 0 0.2 [mm] [mm] [mm] Size D (g6) H Size D (g6) G H M N UU L Size D (g6) H UU 30 8 25 50 15 36 63 17 41 80 20 50 100 25 60 30 8 6 25 10 8 75 7.8 50 15 11 36 20 15 118 14 63 17 13 41 22 17 139 16 80 20 15 50 25 20 167 19 100 25 19 60 30 25 202 24

CNS

For details, refer to page 9-15-68. Normally closed (NC = b contact), solid state switch (D-Y7G/Y7H type) are also available. For details, refer to page 9-15-42. 9-8-22

VM

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Voltage 2 2 4 4 15 10 250 VAC 1.5 1.5 3 3 15 10 8 VDC 1.5 2.5 3 5 15 15 14 VDC 1.5 2.5 3 5 15 10 30 VDC 1.5 2.5 3 5 6 5 125 VDC 0.3 0.05 0.3 0.05 0.5 0.05 250 VDC 0.2 0.03 0.2 0.03 0.25 125 VAC 15 15 15 15 6 0.5 0.25

42

Lead wire color Dot marking Polarity Release valve 25 SOL.B 12 SOL.A 24 SOL.B 11 SOL.A 23 SOL.B 10 SOL.A 22 SOL.B 9 SOL.A 21 SOL.B 8 SOL.A 20 SOL.B 7 SOL.A 19 SOL.B 6 SOL.A 18 SOL.B 5 SOL.A 17 SOL.B 4 SOL.A 16 SOL.B 3 SOL.A 15 SOL.B 2 SOL.A 14 SOL.B 1 SOL.A 1 (+) () Black None SV 1 2 3 Stations 1 station U side 1 14 () (+) Yellow Black 14 Pressure switch 2 2 (+) () Brown None 15 2 stations

New

(mm) Conduit Faston type Dimensions Size Port size A B B1 C D E F P H J Q R Q R K N 1 1/8 1/8 1/4 3/8 1/8 1/4 3/8 14 14 19 22 14 19 22 30 30 40 48 30 40 48 15 15 20 24 15 20 24 62.5 73.5 72 75 78 76.5 79.5 30 35 35 35 40 40 40 9 9 9 20 22 22 22 24.5 24.5 24.5 8 8 9 14 8 9 14 15 15 22.2 19 15 22.2 19 18 18 22.2 20.6 18 22.2 20.6 6.4 6.4 7.6 6 6.4 7.6 6 47.5 50 50 50 52.5 52.5 52.5 38 47.5