HRX-OM-X010

Table 3-5 Facility water temperature range Installation conditions Facility water temperature range(deg C) Ambient Relative temperature(deg C) humidity(%) 70 29 to 30 60 27 to 30 35 50 24 to 30 40 20 to 30 30 15 to 30 70 24 to 30 60 22 to 30 30 50 19 to 30 40 15 to 30 30 11 to 30 70 20 to 30 60 17 to 30 25 50 14 to 30 40 11 to 30 30 10 to 30 70 15 to 30 60 13 to 30 20 50 10 to 30 40 30 70

2/3 Port Valve for Various

) Oil (Standard) (D, E) High temperature oil (3) (S) (D) 99 100 183 AC DC AC DC 60 40 80 60 60 40 40 60 Maximum Minimum 1 10 (1) 10 5 (2) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E etc. in parentheses are option symbols.

ITV

VBA VBAT AP100 841 Series ITV009 Dimensions Manifold 27.5 40 40 27.5 4 x M3 x 0.5 thread depth 3.5 Mounting hole 11 11 25 L1 L2 Port Location z x c 8 No.

10

For Saturated Steam (664)(183) Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) [MPa] (663)(179) 0.8 (662)(174) (661)(170) Subsonic Critical pressure 0.9 0.6 (660)(164) 0.7 0.8 (658)(158) Sonic 0.4 0.6 (656)(151) 0.5 (654)(143) 0.4 (650)(133) 0.2 0.3 0.2 (646)(120) 0 0.1 2 5 10 15 25 20 3 10 15 20 25 45 40 35 30 4 20 10 30 40 50 60 5 30 40 50 60 70 80 20 7 20 30

3 Port Solenoid Valve

Note) If the inch-size lock bracket screw (No. 4-40 UNC) is needed, the port size of air SUP/EXH block should also be inch size (straight only).

Cylinder with lock

Auto switch model Bore size (mm) 32 40 50 63 80 100 D-M9/ M9V D-M9W/ M9WV D-M9A/ M9AV D-A9/ A9V BMB5-032 BMB5-032 BA7-040 BA7-040 BA7-063 BA7-063 D-A3/ A44 D-G39/ K39 BMB2-032 BMB2-040 BMB1-050 BMB1-063 BMB1-080 BMB1-100 D-F5/ J59 D-F5W/ J59W D-F59F/ F5BA D-F5NT D-A5/ A6/ A59W BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 D-P3DWA BA10-032S BA10-040S BA10-050S BA10-050S BA10-063S BA10-063S D-P4DW BMB3T

5 Port Solenoid Valve Series VQZ1000/2000/3000

Body Ported Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQZ1121-C6 SJ SY 800 700 600 500 400 300

VQZ1000/2000/3000

Body Ported Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB/CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQZ1121-C6 Courtesy of Steven Engineering,

2/3 Port Valve for Various

LVC Refer to pages 17-3-40 and 17-3-41 for specifications and models.

ARM10/11

Panel Display cover Display cover Panel nut 14-4-40 23 Series ARM10 Regulator Single Unit Type 5. Unit representation 4.

ARM10/11

Panel Display cover Display cover Panel nut 14-4-40 23 Series ARM10 Regulator Single Unit Type 5. Unit representation 4.

Compact and

Flow Rate Characteristics ZU07LA 100 80 100 50 60 50 Vacuum pressure Vacuum pressure Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] 50 80 80 40 40 Vacuum pressure [kPa] Vacuum pressure [kPa] Air consumption Vacuum pressure [kPa] Vacuum pressure [kPa] 60 Vacuum pressure Vacuum pressure 40 60 60 30 30 Air consumption

20

Material Applicable blow gun model Model Male thread nozzle 1 to 2.5 Male thread nozzle 3 to 4 Width across flats 17 Nozzle type P5670129-01 P5670129-01F P5670129-02 P5670129-02F HNBR Fluororubber HNBR Fluororubber VMG1mm-m-01 to 04 VMG1mm-m-05 to 07 m25 VMG1m-mm-1 to 04 Width across flats 17 m23.5 VMG1m-mm-05 to 07 Cover for copper extension nozzle (mm) Nozzle cover part no.

LVQ

B A Inch sizes 03 05 07 11 13 19 25 N.C. 1/8 3/16 1/4 3/8 1/2 3/4 1 Double acting With bypass PA PA N.C. PB B A B A Double acting N.C. Double acting N.C. With flow rate adjustment & bypass PA Basic size With reducer N.C. B A N.C. With indicator PA N.C. B A N.C. With indicator & bypass PA N.C.

HRX-OM-K003

C Facility water temp. +15C Circulating fluid rated flow rate L/min 4 30 40 40 (1.1 [gal]/min) (7.9 [gal]/min) (10.6 [gal]/min) (10.6 [gal]/min) Facility water minimum necessary flow rate L/min 10 20 25 40 (2.6 [gal]/min) (5.3 [gal]/min) (6.6 [gal]/min) (10.6 [gal]/min) Operating temperature range C 20 to 90 Temperature stability *1 C 0.3 Circulating fluid *2 Galden HT200 or FluorinertTM

HRX-OM-I051

(Only for HRZ010-W*S) 0, 15 to 40 LPM 0, 4 to 10.6 GPM 6 LOW FLOW 0, 8 to 40 LPM 0, 2.1 to 10.6 GPM (Only for HRZ010-W*S) 7 FLOW UNIT LPM, GPM Allows the selection of the unit of flow rate. 8 PRESS UNIT MPa, PSI Allows the selection of the unit of pressure. 9 SLAVE ADRS. 1 to 16CH Allows the selection of the slave address for serial RS-485 communication.

ZU

40 40 40 10 5 27 27 27 27 Suction flow rate Vacuum pressure 13 13 13 13 0 0 0 4 8 12 14 0 0.1 0.2 0.3 0.4 0.5 0.6 0 5 10 15 20 25 0 0.1 0.2 0.3 0.4 0.5 0.6 Suction flow rate N (l/min(ANR)) Supply pressure (MPa) Supply pressure (MPa) Suction flow rate N (l/min(ANR)) How to Read Flow Characteristics Graph Flow characteristics are expressed in ejector vacuum pressure and suction flow.

PC Wiring System

PLC I/O card (KZ-C32X, KZ-C32T) Dimensions Series PCW-02 With power lines Without power lines PLC connection side PCW unit connection side PLC connection side PCW unit connection side Reduced-wiring Fieldbus System FCN manufactured by FUJITSU LIMITED 40 pin connector FCN manufactured by FUJITSU LIMITED 40 pin connector MIL-C-83503 40 pin connector MIL-C-83503 40 pin connector Static Electricity

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size Flat head screwdriver 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80,

ZU

Flow Characteristics 93 93 93 93 Vacuum pressure Air consumption 80 80 80 80 Suction flow rate N (l/min(ANR)) Suction flow rate N (l/min(ANR)) Suction flow rate Air consumption N (l/min(ANR)) Air consumption N (l/min(ANR)) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure kPa 67 67 20 67 10 67 Air consumption 53 53 53 53 40 40 40 40 10 5 27 27 27 27 Suction