[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Nil F N T Rc G NPT NPTF Nil Non-locking type M Locking type (Tool required) Valve option Surge voltage suppressor Nil V Standard For vacuum Nil None CE-compliant CE-compliant With surge voltage suppressor Port size CE-compliant Nil Q 02 1 4 AC: Can be attached to Grommet, Conduit, Conduit terminal.

Table of Contents

VQ1000 (VV5Q13)-Plug-in Unit, Flip Type (F, P, J, L, S kit) . VQ0 (VV5Q04)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ1000 (VV5Q14)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ2000 (VV5Q24)-Plug Lead Unit, Flip Type (F, P, T, S kit) .

CE

) Black F 0V (power supply) (Shield) G Shield 3 High Precision Scale Cylinder Series CEP1 Construction 12, 20 !

Air Cylinder RSQ Series Stopper Cylinder

Use this box ior inductive loads, 5 metersor more ol lead wires, or 100,200VAC applica" D-48 swlch is used iof IooVAC or lsss Sin@ lhere F no votage lmilalon, you can s 6ct a suilable model lor your 2 AND connections for 2-wire system 2 OR connctions lor 2-wire system -go-f1;rw el rwo >w !r e\ " f = ; C ; i r _ , i o q m l r a 6 d . t o a d J o r . \\.:j+_ | aq6 oe.orr qredrasa I | -!

FSQ seies

Use this box ior inductive loads, 5 metersor more ol lead wires, or 100,200VAC applica" D-48 swlch is used iof IooVAC or lsss Sin@ lhere F no votage lmilalon, you can s 6ct a suilable model lor your 2 AND connections for 2-wire system 2 OR connctions lor 2-wire system -go-f1;rw el rwo >w !r e\ " f = ; C ; i r _ , i o q m l r a 6 d . t o a d J o r . \\.:j+_ | aq6 oe.orr qredrasa I | -!

Bernoulli Gripper

Dimensions [mm] Model A B C D E F G H J K L M N P Q R S T U V W Weight [g]*1 Outer body dia.

Rotary Table/

2 q @0 u !

reduces flow setting time

1 AS-F AS-F !1 !2 TMH !2 !3 w ASD t y q i o e u t y q i o e u AS w AS-FE !0 KE !0 AS-FG !9 AS-FP Meter-in type Meter-out type Meter-out type Meter-in type AS-FM Seal method: Face seal For G thread AS-D AS-T r !8 !4 !6 !7 !5 !1 ASP ASN !2 AQ w t y q i o e ASV AK !0 VCHC ASR ASQ u @0 Meter-in type Meter-out type Component Parts No.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

QL 6 13.5 Prepared hole diameter 3.3 2-M3 x 0.5 (Plug: M-3P) 6 (fitting seat surface dimension) 170.05 M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port 2-M3 x 0.5 A 5 5.5 A 3.2 J 2.4 Z Section AA 3.5 Depth 2 2.5 +0.030 0 7 +0.030 0 Depth 2 2.5 Q QL 11-/22-MXPJ6-10 4M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27 37 28 8 5 44 11-/22-MXPJ6-51 30 35

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

fitting Sensor (Breathing port) PB H G C PA A B N E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

EA h EB W F Stroke adjustment unit S (Shock absorber stroke) T Shock absorber MY1W16/20 F MY1W50/63 EC EY (mm) h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 EC EY F 4 4 6 6 6 6 6 E EA EB 30 32 38 50 57 66 77 T TT W Shock absorber model RB0806 RB0806 RB1007 RB1412 RB1412 RB2015 RB2015 FC 14 14 13 17 17 26 31 S 40.8 40.8 46.7 67.3 67.3 73.2 73.2 FB 54 67 78 FH 13 16 17.5 FW 66 80 91 Model MY1W16

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

0 q t r i S u y o !4 !8 !

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

MY1

1 u t q w e y !2 i r #3 !4 !0 !9 !8 !5 !

LEC-OM02704CN

F L O F F L S N S N 1 S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F O F F L L S N S N 2 S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L S N O F F L S N 3 S S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N L S N O F F L S N O F F 6 39 6 6.4.4 (PC31PC34) PD20 PD20 0 1 2 3 0() 1() 2() 3() PD20 0 S S S S () 0 r / m i n 0

RQ

Basic style (Through-hole/Both ends tapped common): RQB/RDQB 2-M5 x 0.8 (port size) 2-cushion needle 2 x 4-9 depth of counter bore 7 H thread effective depth C E1 E2 Q F 4-5.4 through D M E 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Flat washer 4 pcs.

MRQ

When the cylinder is pressurized from port A, range F can be adjusted by regulating angle adjustment screw D.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

CompoBus/D compatible EX140-SDN1 Q 0.1A F, H, J1, J2 Q, R1, R2, V Current consumption (within unit) OMRON Corporation: CompoBus/S (16 points) compatible EX140-SCS1 R1 OMRON Corporation: CompoBus/S (8 points) compatible EX140-SCS2 R2 Mistubishi Electric Corporation: CC-Link compatible EX140-SMJ1 V Type SR1/SR2 OMRON Corporation CompoBus/S compatible Type SV Mitsubishi Electric Corporation

Rotary Actuator

2 q w o r With air cushion Without air cushion With auto switch !9 @1 @3 !7 !6 !8 @0 @2 Component Parts No.

Bag Filter

F-91S F-87S FGFC5-60 FGFL3-40 Carbon steel F-88S FGFR5-60 FGFC5-60 150(6B) F-92S F-88S 280 240 166.6 23 22 FGFS5-60 FGFR5-60 Stainless steel F-89S AL-80S AI-18S FGFL5-60 FGFS5-60 F-93S F-89S FGFL5-60 Note) 2 pieces are required per filter unit. JIS10KFF is used for this flange. Foundation bolt L1 (mm) Nominal thread size d M16 L1 R Applicable model d1 S L Part No. (Approx.) (Approx.)