ZP

) D E F A5 M5 x 0.8 (M3 x 0.5 With female thread) A6 M6 x 1 (M3 x 0.5 With female thread) A8 M8 x 1 (M5 x 0.8 With female thread) Width across flats H G B J J Model A B C2 D E F G H J K Vacuum inlet direction q Pad dia.

Table of Contents

Hexagon width across flats 8 Hexagon width across flats (M6: 8, M8: 12) Hexagon width across flats 12 Hexagon width across flats 12 (Miniature tube fitting Series M5) (Miniature tube fitting Series M5) Hexagon width across flats 7 Hexagon width across flats 7 H: M5 x 0.8 H: M6 x 1 F H: M6 x 1 H: M8 x 1 A B K L Y Model A B C D E C D E L K Y Model F G G G G F F ZPY10B ZPY13B ZPY40B ZPY50B 10

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Gripping point L (mm) MRHQ F F Misc.

Table of Contents

Z Y X S NN NB NA MM LZ LY LX LT LH LC LA H F D C B A Bore size (mm) 10 16 90 [91] 7 5 46 M8 x 1 9.5 12.5 M4 x 0.7 32 16.5 24 1.6 9 4.5 38 28 8 4 14 12 15 91 [92] 9 6 47 M10 x 1 9.5 12.5 M5 x 0.8 42 25 33 2.3 14 5.5 46 28 8 5 20 18 15 Rod Side Flange Style (F) CVJ5F Rod extended/retracted when energized M5 x 0.8 M5 x 0.8 53.5 [54.5] M5 x 0.8 Manual override 28 [34.5] Width across flats B1

ZP

Hexagon width across flats 8 Hexagon width across flats (M6: 8, M8: 12) Hexagon width across flats 12 Hexagon width across flats 12 (Miniature tube fitting Series M5) (Miniature tube fitting Series M5) Hexagon width across flats 7 Hexagon width across flats 7 H: M5 x 0.8 H: M6 x 1 F H: M6 x 1 H: M8 x 1 A B K L Y Model A B C D E C D E L K Y Model F G G G G F F ZPY10B ZPY13B ZPY40B ZPY50B 10

V100

1.4 (PE port) L plug connector (L): SYJ52-L-M5 (-F) M plug connector (M): SYJ52-M-M5 (-F) DIN terminal (D): SYJ52-D-M5 (-F) M8 connector (MO): SYJ52-WO-M5 (-F) Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 60.9 28.1 [35.1] 53.4 Max. 10 74.6 42.1 12.7 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 65.5 [67.7] 75.5 55.7 [57.9] 64.6 57.2 50.7 34.7 8 9 8 9 8

ZP

) Rc1/8 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) 20 29.5 25 6 6 60.5 25 6 6 4 x M5 x 12 59.5 70 F (G) 19 28.5 F (G) 50 Y X Y X 4 x M4 x 10 30 30 E B A D 34 4 E B A D 40 4 Dimensions Dimensions B 65 83 ZP2-TF63HB ZP2-TF80HB Model D 46 58 A 63 80 E 68 85 F 31.5 37 G 91 96.5 X 40.6 46.1 Y 21 27.5 B 103 129 ZP2-TF100HB ZP2-TF125HB Model D 69 89 A 100 125 E

Air Slide Table

J I Pilot port 2 x M5 x 0.8 7 5H9 ( ) depth 2 +0.030 0 43 7.3 (Maximum screw-in depth) 5.5 38.6 +0.030 0 5H9 ( ) depth 2 3.3 (Minimum screw-in depth) B 30 42 60 3 72 36 B N x M5 x 0.812 F N 2 1 x F 29 Cross-sectional view B-B 2 x M5 x 0.8 thread depth 7 27 16 36 48 M 0.5 7 ZZ Z J I Bottom view of MXQ20A-50Z Pilot port 2 x M5 x 0.8 (Plug: Width across flats 7) G (NN 1) x H 5H9 ( ) depth

Table of Contents

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

ZP

Hexagon width across flats 8 Hexagon width across flats (M6: 8, M8: 12) Hexagon width across flats 12 Hexagon width across flats 12 (Miniature tube fitting Series M5) (Miniature tube fitting Series M5) Hexagon width across flats 7 Hexagon width across flats 7 H: M5 x 0.8 H: M6 x 1 F H: M6 x 1 H: M8 x 1 A B K L Y Model A B C D E C D E L K Y Model F G G G G F F ZPY10B ZPY13B ZPY40B ZPY50B 10

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

(-F) M plug connector (M): 10-SYJ5123-M-M5(-F) DIN terminal (D, Y): 10-SYJ5123-M5(-F) M8 connector (WO): 10-SYJ5123-WO-M5(-F) D Y Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 Max. 10 60.9 28.1 [35.1] 53.4 12.7 42.1 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 73 [75.2] 63.2 [65.4] 82.1 83 72.1 3 3 58.2 64.7 3 3 42.2 19.5 19.5 19.5 11 11 11 19.5 11 2 x 2.6

Table of Contents

NH NC DTT UU TT UU Auto switch magnet holder M5 x 0.8 (Port) -X GA GA 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) Cushion needle G G 20GB M5 x 0.8 (Hexagon socket head plug) N A M5 x 0.8 (Port) Data Z + Stroke M5 x 0.8 (WW) (WW) (Hexagon socket head plug) 2 x 2-J depth K M5 x 0.8 (Hexagon socket head plug) XX XX M5 x 0.8 (Port) VV VV 2-M5 x 0.8 (Hexagon socket

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F F E E B C Cross interface E: 4-Rc F: Without thread A D E (mm) Model Y14-M5 Y24-01 Y24-02 Y34-01 Y34-02 Y44-02 Y44-03 Y54-03 Y54-04 Applicable model Port size M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 C 14 D 25 B 16 A 23 AC10 AC20 22 40 40 40 AC25, AC30 28 48 43 49 Caution on Mounting AC40 36 54 48 60 62 When mounting a cross interface directly on the IN side of the lubricator, be sure to use

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Fixed 4% F .S.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(L): 10-SYJ52M-L-M5 (-F) M plug connector (M): 10-SYJ52M-M-M5 (-F) DIN Terminal (D): 10-SYJ52M-D-M5 (-F) M8 connector (WO): 10-SYJ52M-WO-M5 (-F) Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 60.9 28.1[35.1] MAX.10 74.6 53.4 42.1 12.7 32.6 M8 x 1 15.1 39.2[46.2] Approx. 300 (Lead wire length) Pg7 65.5[67.7] 75.5 55.7[57.9] 64.6 57.2 50.7 34.7 8 9 8 9 8 9 8 9 14.5 3 14.5 3

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: None, Port Size: N3 (5/32" One-touch Fitting), Thread: M Thread, Rc, Option: F (Bracket)

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: LN (L Plug Connector w/o Lead Wire), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: None, Port Size: C6 (ø6 One-touch Fitting), Thread: M Thread, Rc, Option: F (Bracket)

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: None, Port Size: C4 (ø4 One-touch Fitting), Thread: M Thread, Rc, Option: F (Bracket)

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: H (Grommet Lead Wire 0.6m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: None, Port Size: C4 (ø4 One-touch Fitting), Thread: M Thread, Rc, Option: F (Bracket)

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: None, Port Size: C4 (ø4 One-touch Fitting), Thread: M Thread, Rc, Option: F (Bracket)