ML2B

I F RHC (mm) (mm) MK(2) M 30.5 32 41.5 K 46 58 68 J 40 46.5 55 I 76.5 91 110 N 16 15 19 H 73 88 106 F 93.5 107.5 130.5 O 18.5 19.5 21.5 N 16 15 19 M 13 15 19 K 46 58 68 J 40 46.5 55 H 73 88 106 F 76.5 91 110 Applicable cylinder ML2B25 ML2B32 ML2B40 Applicable cylinder ML2B25 ML2B32 ML2B40 RS Q G MM 16 21.5 24.5 PA Rc 1/8 Rc 1/8 Rc 1/4 LL 28 30.5 37.5 KK 15 16 17.5 O 69 84 102 PP 56 62.5 77

One-touch Fittings Series KQ2

O e b u t ) m m ( e l b a c i l p p A e z i s g n i t t i f d . o N t r a P D L1 L2 P Q A M n o l y N e n a h t e r U 2 . 3 2 . 3 9 9 3 2 U 2 Q K 6 . 9 0 5 5 . 7 1 6 . 9 9 5 3 5 . 5 1 4 . 3 9 . 2 6 4 4 9 9 4 0 U 2 Q K 4 . 0 1 5 . 1 5 8 1 4 . 0 1 7 . 9 5 . 5 3 6 1 2 . 4 2 . 4 2 1 6 6 9 9 6 0 U 2 Q K 8 . 2 1 5 . 5 5 0 2 8 . 2 1 7 . 1 1 5 . 8 3 7 1 4 . 3 1 4 . 3 1 9 1 8 8 9 9 8 0 U 2 Q K 2

1

40 24.5 1/4 32 35 52.5 28 69.5 57.5 104.5 73.5 XSA3-32V 56 XSA3-43S 64.5 31 3/8 XSA3-43V 67 82.5 72 58.5 66 72 64 66 5 Normal Close High Vacuum Solenoid Valve XSA Series Dimensions: (Rc, NPT) Female Thread Grommet: G Female thread type D 300 G F C H E P Fitting size 2 1 Q B 2 x M5 thread depth M A Q Grommet: GS Flat terminal: F Conduit: C 11 G F 300 G F 280 G F Terminal part Flat terminal

MXQ

8 q @0 !2 e !3 !5 MX MTS t !6 r u y w !

240

Allowable Lateral Load on the Rod End Model Allowable lateral load on the rod end [N] LEPY6 (Basic) 0.50 F LEPY10 (Basic) 1.0 LEPY10L (Compact) 1.0 377 Step Motor (Servo/24 VDC) Electric Actuator Miniature Rod Type LEPY Series LEPY6, 10 How to Order LEPY 10 K 50 1 1 R 6N q w e r t y u i o !

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal

Series VCL

Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Eleclrical entry E-Grommet terminal D-DIN connector @tu f f i w ) q{pi4 XA-Non-|ocking push type B-Lock type (Screw) Voltage X C-Lock type (Lever) Manual option xgpecial order Note 1) indicate in parentheses at end of part no. Ex. (AC24V).

-fl Seies

Eleclrical entry E-Grommet terminal D-DIN connector @tu f f i w ) q{pi4 XA-Non-|ocking push type B-Lock type (Screw) Voltage X C-Lock type (Lever) Manual option xgpecial order Note 1) indicate in parentheses at end of part no. Ex. (AC24V).

Environment

0 i o e r t q u !1 !2 !3 !

Intrinsically Safe Valve

5 1 LL 3 SY 53 20 01 Thread type UL/CSA compliant Nil F N T Rc G Series NPT 5 7 NPTF 53-SY5000 53-SY7000 Thread piping A, B port size Type of actuation Symbol Port size Applicable series 1 2 3 4 5 A Note) 01 02 1/8 53-SY5000 2-position single 1/4 53-SY7000 2-position double 3-position closed center One-touch fitting (Metric size) Note) 3-position exhaust center Symbol C4 C6 C8 C8 C10 Port

RZQ

N] F=-q x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

VXA21/22

Thread T F N Orifice size 2 3 4 5 6 Rc(PT) NPTF G(PF) NPT 3mm 4.5mm 6mm 8mm 10mm Refer to table q for configuration. Port size 01 02 03 04 1 8 1 4 Valve/Body 0 2 Normally closed (N.C.)/single unit Normally open (N.O)/single unit 3 8 1 2 Refer to table q for configuration.

C95

6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

3 q e w t !2 !4 !3 e !0 q o Spring acting/Spring return/With auto switch (Built-in magnet) Single acting/Spring extend/With auto switch (Built-in magnet) 12, 16 !2 t w !4 y i !1 !3 e !0 q o t w !0 r q o i !1 !3 e 20, 25 w t !2 !4 !1 !3 e !0 q o w t !0 r o q !1 !3 e Component Parts Rod end nut No.

CXT

Vertical mounting: f=W =0.3(Slide bearings) =0.1(Ball bushing bearings) MGC W MGF b 0.5 q CY1 q MY1 NO Confirmation of adjusting bolt capacity W WA Determine the movable weight WA which can be operated only by adjusting bolts.

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

Approx. 300 F D Approx. 280 D Q F C G (PF) 1/2 C R R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Decimal display Hexadecimal display 10 A 11 b 12 c 13 d 14 E 15 F Note 4) Applicable to non-magnetizing lock 583 LECP2 Series Controller Details e r No. Display Description Details t q PWR Power supply LED Power supply ON/Servo ON : Green turns on. Power supply ON/Servo OFF: Green flashes. q y w w ALM Alarm LED With alarm : Red turns on.

AR20-B to AR60-B

IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

Process Valve

Applicable cable O.D. 6 to 8 (D, DZ) P Pg9 J (DIN terminal: D, DZ) I (Grommet: G) F (Air operated) Pilot port 12 (P1) 2 x (Back side 10 (P2)) 4 x M 8 1 Manual override (Non-locking push type) P1 D S Q E 15 B A H (DIN terminal: D, DZ) G (Grommet: G) A R B C Main port 1 (A) (Back side 2 (B)) Port side: refer to table below Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S VNB2V