Exhaust Cleaner for Clean Rooms AMP Series Description AMP320 AMP220 AMP420 AMP-EL220 AMP-EL320 AMP-EL420 Element assembly With O-ring 4 Note) The first and second elements are integrated, and cannot be replaced separately. 4 Exhaust Cleaner for Clean Rooms Series AMP Dimensions (mm) 1in = 25.4mm N Optional specifications O T: With element service indicator P R Q S SMC M D IN C Bracket (accessory) G L J I H K B A IN Bracket mounting
Series MGP Dimensions 4-MM depth ML 4-OA through 4-OB depth of counter bore OL Section XX HA:T-slot for hexagon bolt Section XX Z WA L 4-YY depth YL 4-NN through Section XX DL X0.02 X T R X0.02 X0.02 DA VB VA H 24 11 PW X U DB End lock mechanism non-locking type manual release ( ) XAH7 depth XL XAH7 depth XL GC XAH7 depth XL 2-P (plug) 2-P Q GA LL GB PB J K WB WA Z G PA + Stroke C + Stroke
137 92 80 70 M5 x 0.8 x 8 M6 x 1.0 x8 M6 x 1.0 x10 12REA 50/63 0 -0.2 L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66
Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 4 [350 (3 Port) ø4], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: None, CE Compliance: CE Marked
Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 4 [350 (3 Port) ø4], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: L (Stainless Steel Body, FKM Seal, Class B Coil), Option: None, CE Compliance: Q (CE Marked)
NS 14 14 24 24 30 30 45 55 60 LT 49 49 59 59 69 69 79 89 99 LB 20 25 30 LA 10 10 20 20 30 30 20 25 30 J 4 4 4 4 4 4 6 6 6 Stroke (mm) 5 10 15 20 25 30 40 50 60 D-X 25 MXH Series Dimensions: 16 LT 16 24 14 LA LB J x M4 x 0.7 Depth 6 2 x 2 x M5 x 0.8 Cylinder port (With plug for port) 3 x M5 x 0.8 through Pilot hole dia 4.3 2 x 3 x 7.5 counterbore depth 4.4 4 x M4 x 0.7 Depth 10 2 x M5 x 0.8
CS1G125SCS1125, #4 CS1G140SCS1140, #4 CS1G160SCS1160, #4 CS1G180SCS1180, #4 CS1G200SCS1200, #4 CS1G250SCS1250, #4 CS1G300SCS1300, #4 The drawing shows with an auto switch.
P (port f)] WB WA R 4-J Depth JK Inner cover holding screw TA TA WB WA TB TB R W (mm) C ED A EK B F E G H HA HB HG HI HL HP HS HT J JK K Model +0.030 0 CYP15 5.4 9.5 8 4 9.5 12.5 4H9 6.5 45 19.5 8.5 8.5 23 38.6 44 27 19.5 M6 x 1 10 21 +0.030 0 CYP32 8.6 6H9 13 12 14 6 25 8.5 75 39 19 19 39 64.9 73.5 49.5 39 M10 x 1.5 12 20 LD LW MM M N L P PA PB Q QW R T TA TB W WA WB Y Z Model CYP15 5.6
Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 3 [350 (3 Port) ø3], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: Stainless Steel Body, EPDM Seal, Class B Coil, Option: -, CE Compliance: -
Series: 350 [3 Port COM (Single Unit)], Voltage: 12VDC, Electrical Entry: Grommet / Tape winding, Orifice: 3 [350 (3 Port) ø3], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: Stainless Steel Body, EPDM Seal, Class B Coil, Option: -, CE Compliance: -
Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 3 [350 (3 Port) ø3], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: J (Stainless Steel Body, EPDM Seal, Class B Coil)
Series: 350 [3 Port COM (Single Unit)], Voltage: 6 (12VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 3 [350 (3 Port) ø3], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: J (Stainless Steel Body, EPDM Seal, Class B Coil)
Description Lead wire color Note 1 L+ Brown 18 to 30 VDC 1: Brown 4: Black 2 DO White Switch output 2 M12 3 L Blue 0 V 4 C/Q Black Communication data (IO-Link)/ Switch output 1 (SIO) 11 2: White 3: Blue ISE7m/7mG Series Function Details Display examples of the main and sub (set value) screens of each mode.
VENT FGG G1/4 AIR VENT DRAIN 348 A B C Dimension required for removal 4 x 15 For M12 foundation bolt FGA 0 Dimension required for cover removal 315 45 260 FGC 240 IN OUT Rp1/4 270 90 FGF IN 135 225 180 FGH 2 x R ORIENTATION 2 x R DRAIN A B C FQ1 OUT IN OUT R3/4 FN Rp1/4 203 203 R3/4 EB ES DRAIN R3/4 90 90 260 DRAIN FGES type (V-band type) (mm) FGEL type (V-band type) (mm) FGET type (Bolt
Q,/N.O. +Including armature ass y How To Ord.er Lead qiJe length When ordering the valve and long connector ass'y include both lhe valve and conneetor ass'y producl numbe6.
Q,/N.O. +Including armature ass y How To Ord.er Lead qiJe length When ordering the valve and long connector ass'y include both lhe valve and conneetor ass'y producl numbe6.
. 2. 2. 2. 50% 50% 50% 50% ( ( ( ( 6 6 6 6 ) ) ) ) 1. 1. 1. 1. () 2. 2. 2. 2. 3. 3. 3. 3. 3. 3. 3. 3. 4. 4. 4. 4
BORE B D GA'GA K MM N P x LD LH H zz h 1 3 8 (35) 2.76 2.05 t52l 0 7 9 l:20) 1.57 1.39 (10) 0.67 M8x1.25 J.2A t7l M18rl 5 1 . 1 4 3 5 4 l90l 1.06 lz7) 1 5 1 o3) 3 5 4 ls0J 2.24 (58) 1188) 2.05 (52) '11.21 2.60 (66) s T o 7 7 2 (196) 1 3 8 (35) 3.35 (85) 2.52 079 (20) 1 5 7 1.39 (10) 0.67 M10x1.25 i.2a l7l M18x1 5 1.22 (31) 3 8 6 l93l 1.34 (341 1.63 (16) 0.45 1 1 1 . 5 ) 1 9 7 t50l 6 5 4 t1661
(mm) 1in 25.4mm Bottom port diagram 2-G3/4 Conduit port 2n-1/2 (ports A, B) 144.5 143 112.5 83.5 55.5 M5 ground screw 106 59.2 46.8 9 9 34.5 34 n U side 12 X B 2 A 4 6 B A B 2 A 4 5 B A B 2 A 4 SMC SMC SMC SMC 4 B A L2 L1 58.5 P=41 B 2 A 4 3 B A B 2 A 4 2 B A 34.5 48 68.5 P=41 B A 4 1 B A 2 X 12 Stations D side 42 16 107.8 179 15.5 22 51 69 117 2-1/8 (external pilot port) L n Dimensions
P Q Supply valve and release valve Supply valve Except nozzle diameter 05 type Note) Switch mounted style is also available. P. 13-4-17 to 13-4-19 13-4-4 4 Series ZM Vacuum Ejector: With Valve and Switch Construction: LZM1-KL-E Precautions Be sure to read before handling.