Air Preparation Equipment

L-131S L-135S FQ-OP001 BP-13S BP-14S BP-15S L-131S L-135S FQ-OP001 BP-13S For port size Rc 1 For port size Rc 3/4 For port size Rc 1/2 Bracket Stainless steel 304 BP-14S BP-15S 272 Low Maintenance Filter Series FN1/FN4 P.483 1 Replacement Procedure is Replacement Parts and Seal List How to Order Actuators Modular F.R.L.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

1 i q !4 r e !0 !1 q i !2 o !3 y Component Parts No.

Series PF2W Digital Flow Switch For Water

PF2W704 Model PF2W740 PF2W711 Measured fluid Flow rate measurement range Set flow rate range Rated flow range Minimum set unit Water 1.7 to 17.0 L/min 0.35 to 4.5 L/min 3.5 to 45 L/min 7 to 110 L/min 1.7 to 17.0 L/min 0.35 to 4.5 L/min 3.5 to 45 L/min 7 to 110 L/min 2 to 16 L/min 0.5 to 4 L/min 5 to 40 L/min 10 to 100 L/min 0.1 L/min 0.05 L/min 0.5 L/min 1 L/min 0.1 L/pulse 0.05 L/pulse

JA/JAH/JB/JS

4 4 4 14 16 18 18 22 22 16 20 20 22 24 28 32 41 41 46 55 70 1.25 2 2 2.5 3 3 9000 14000 22000 36000 55000 55000 20Data Option: Heavy Load Type Hydraulic: Up to 7 MPa JAHL63-24-200 JAHL80-30-200 JAHL100-42-300 63 80 100 24 30 42 155 187 213 88 96 116 56 67.5 78 4.1 6.4 10 2 2 3 38 45 55 66 79 96 54 60 74 36 44 48 102 125 144 70 80 90 69 79 89 4 4 4 18 18 22 20 22 24 41 46 55 24 38 42 2 2.5

JA/JAH/JB/JS

4 4 4 14 16 18 18 22 22 16 20 20 22 24 28 32 41 41 46 55 70 1.25 2 2 2.5 3 3 9000 14000 22000 36000 55000 55000 20Data Option: Heavy Load Type Hydraulic: Up to 7 MPa JAHL63-24-200 JAHL80-30-200 JAHL100-42-300 63 80 100 24 30 42 155 187 213 88 96 116 56 67.5 78 4.1 6.4 10 2 2 3 38 45 55 66 79 96 54 60 74 36 44 48 102 125 144 70 80 90 69 79 89 4 4 4 18 18 22 20 22 24 41 46 55 24 38 42 2 2.5

MHC2

MHZ MHC2/MHCA2/MHCM2 MHF MHL F MHR L MHK MHS F MHC MHC2-6D/MHCA2-6D MHC2-6S/MHCA2-6S MHCM2-7S MHT Pressure 0.6MPa 4 4 2 MHY Pressure 0.6MPa 0.5 Pressure 0.6MPa MHW Gripping force N Gripping force N Gripping force N 3 3 0.4 MRHQ 0.5 0.5 Misc. 2 2 1 0.3 0.4 0.4 D0.2 1 1 0.3 200 30 20 10 0 30 20 10 0 30 20 10 Gripping point L mm Gripping point L mm Gripping point L mm 12-8-11 12 Series MHC2/

MHC2

DGripping force (N) Gripping force (N) 20Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Gripping point L (mm) Gripping point L (mm) Gripping force (N) Gripping force (N) Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Gripping point L (mm) Gripping point L (mm) 12-8-3 4 Series MHC2 Double Acting: Size 10, 16, 20, 25 MHC2-10 2-M3 x 0.5 thread depth

Compact Cylinder

4 x N through H thread effective depth C 2 x M3 x 0.5 (Port size) I D M E Z L B + Stroke K A + Stroke M G J W Standard [mm] Bore size Stroke range Without magnet for auto switch With magnet for auto switch C D E F G H I J K L M N Q W Z A B A B 12 5 to 30 19.5 16 23 19.5 6 6 23 4 21.5 M3 x 0.5 26 1.5 5 3.5 14 3.5 7 23 8 16 5 to 30 20.5 17 24 20.5 6 6 26 4 25 M3 x 0.5 31 1.5 5 3.5 17 3.5 8

CXS

side: Same) 4-M5 x 0.8 with depth 4.5 (Piping port) (Opposite side: Same) (L) (Z) 5 QQ C Q R 8 (I) (L) (Z) U N (G) NN (mm) V A B C D E F G H I J L M N NN P Q QQ R X Y U Model 2-3.4 through 2-6.5 counterbore with depth 3.3 4-M3 x 0.5 with depth 4.5 2-M4 x 0.7 with depth 7 2-M3 x 0.5 with depth 5 M3 x 0.5 x 10 46 17 44 15 7.5 2-M4 x 0.7 35 20 4 8 20 6 33.6 8.5 7 30 M5 x 0.8 x 5 CXS10 2-4.3

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

M5 x 0.8 Prepared hole diameter 4.2 20 W 0.50.05 D B Vacuum port M5 x 0.8 Piping port 2 x M5 x 0.8 33 32 10 J depth 1.5 3 5.5 5 12 9.5 +0.030 0 4 Section AA B D Mounting base side +0.030 0 depth 1.5 3 Q QL 11-/22-MXP12-25 Without magnet and switch rail 2 x M2 x 0.4 depth 3 8 5.7 3.5 L 20 20 6 x M4 x 0.7 depth 4.5 2 x M3 x 0.5 depth 3.5 (mm) G H J K L M Q QL S V W Z Model 11-/22-MXP12-15

MY1

(except for 50) MY1MW16, 20, 50, 63 MY1CW16, 20, 50, 63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25, 32, 40 MY1CW25, 32, 40 L L This port is not available for use. (except for 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 39 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

Refrigerated Air Dryer

0.4 [9 to 11 mm]) Drain tube (O.D.: 0.4 [10 mm], Length: 39.4 [1.0 m]) J P L K 4 to 0.5 [4 to 13 mm] M N Dimensions Unit: inch [mm] A B C D E F G H J K L M N P Q R Model Port size 31.5 [800] 34.2 [868] IDFB55E 2 18.5 [470] 33.7 [855] 5.0 [128] 17.9 [455] 4.3 [110] 9.8 [250] 2 [50] 0.5 [13] 19.7 [500] 3.0 [75] 27.6 [700] 20.7 [526] 20.4 [519] 1.4 [36] 35.4 [900] 38.1 [968] IDFB75E 2 96 Series

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

0 15 W 0.50.05 B D 2-M5 x 0.8 Piping port M5 x 0.8 Vacuum suction port 28 27 10 4.5 depth 1.5 3 J 6 +0.030 0 10 9.5 4 Section AA Mounting base side B D +0.030 0 Q QL depth 1.5 3 11-/22-MXP10-20 Without magnet and switch rail Max. 2.5 2-M2 x 0.4 depth 3 8 2.5 4.7 15 15 L 6-M3 x 0.5 depth 4 2-M3 x 0.5 depth 3.5 (mm) G H J K L M N Q QL S V W Z Model 8 32 52.4 20 20 21 6.5 32 14 10 44 40 60

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

3 Product image Socket Socket Plug Plug Socket For DeviceNetTM (Plug, A-coded) Number of functional poles M12: 5 pins Key type A-coded (Normal key) DeviceNetTM / CANopen2 5 3 4 4 3 5 1: DRAIN: NC 2: V+: NC 3: V: NC 4: CAN H 5: CAN L 1: DRAIN 2: V+ (Red) 3: V (Black) 4: CAN H (White) 5: CAN L (Blue) 1: 2: 3: CAN GND 4: CAN H 5: CAN L 1 2 Pin assignment 2 1 Plug, A-coded Socket, A-coded (

Tie-rod Type Hydraulic Cylinder

W W D E d M a MA Q C A K F NA NB B H S + Stroke M ZZ + Stroke With rod boot e 10 l f h + l ZZ + l + Stroke (mm) Bore size (mm) A a d B C F G GA GB K M MA NA NB R S Q V W T P J MM E D 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 45 23 10 60 17.5 M8 x 1.25 18 M14 x 1.5 7.5 8 44 18 9.5 13 11 25 20 1/4 14 30 22 37 106 5

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

/Y7PV D-Y7WV 10 + 30 n = 2, 4, 6, 8 (n 2) 2 100 + 30 n = 4, 8, 12, 16 (n 4) (n 4) (n 4) 2 90 + 30 n = 4, 8, 12, 16 2 95 + 30 n = 4, 8, 12, 16 n 2 2 (Different sides, Same side), 1 115 130 20 120 125 n D-Y7BAL 20 + 45 n = 2, 4, 6, 8 (n 2) 2 (n 4) (n 4) (n 4) (n 4) 2 115 + 45 n = 4, 8, 12, 16 120 + 45 n = 4, 8, 12, 16 125 + 45 n = 4, 8, 12, 16 130 + 45 n = 4, 8, 12, 16 2 2 2 6-9-8

Low Profile Guide Type

CY1F10 to 25-AAL CY1F10 to 25-AAR For shock absorber fixing L Set screws (4 positions) Note1) approx.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Cylinder: Non-lube type 1 2 1 2 2 1 2 1 1 1 VER 3 L L 2 2 VEA 10 AFM AF ARP20K/30K/40K VHS VY1 1 1 12 2 4 14 Solenoid valve: Non-lube type VBA VBAT 5 1 3 AP100 2 1 2 1 2 1 L L AFM AF ARP 701 Direct Operated Precision Regulator/Modular Type ARP20 to ARP40 RoHS Direct Operated Precision Regulator with Backflow Function/Modular Type ARP20K to ARP40K Symbol Regulator with backflow function Regulator

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Cylinder: Non-lube type 1 2 1 2 2 1 2 1 1 1 VY1 3 L L VBA VBAT 2 2 10 AFM AF ARP20K/30K/40K VHS AP100 1 1 12 2 4 14 Solenoid valve: Non-lube type 5 1 3 2 1 2 1 2 1 L L AFM AF ARP 759 Direct Operated Precision Regulator/Modular Type ARP20 to ARP40 Series RoHS Direct Operated Precision Regulator with Backflow Function/Modular Type ARP20K to ARP40K Series Symbol Regulator with backflow function

MLGP

YY depth YL Section XX Bottom view Extension locking Retraction locking LOCK LOCK Section XX 4-OA through 4-OB depth of counter bore OL Section XX 4-NN through IH Z WA IA IC IC L 4-MM depth ML X 0.02 HA: T-slot for hexagon bolt IG X 0.02 DA IB VA H ID R VB X U T PW DB 2-Rc 1/8 (plug) IF unlocking port XAH7 depth 6 2-Rc 1/8 Unlocks when pressurized PB GA GB J K PA + Stroke Q XAH7 depth 6 S