-11-R1-100-MW 3/8" Polyurethane Tubing 100 ft. - Red TIUB-01-W-50-MW 1/8" Polyurethane Tubing 50 ft. - White TIUB-01-W-100-MW 1/8" Polyurethane Tubing 100 ft. - White TIUB-03-W-50-MW 5/32" Polyurethane Tubing 50 ft. - White TIUB-03-W-100-MW 5/32" Polyurethane Tubing 100 ft. - White TIUB-07-W-50-MW 1/4"

-11-R1-100-MW 3/8" Polyurethane Tubing 100 ft. - Red TIUB-01-W-50-MW 1/8" Polyurethane Tubing 50 ft. - White TIUB-01-W-100-MW 1/8" Polyurethane Tubing 100 ft. - White TIUB-03-W-50-MW 5/32" Polyurethane Tubing 50 ft. - White TIUB-03-W-100-MW 5/32" Polyurethane Tubing 100 ft. - White TIUB-07-W-50-MW 1/4"

-11-R1-100-MW 3/8" Polyurethane Tubing 100 ft. - Red TIUB-01-W-50-MW 1/8" Polyurethane Tubing 50 ft. - White TIUB-01-W-100-MW 1/8" Polyurethane Tubing 100 ft. - White TIUB-03-W-50-MW 5/32" Polyurethane Tubing 50 ft. - White TIUB-03-W-100-MW 5/32" Polyurethane Tubing 100 ft. - White TIUB-07-W-50-MW 1/4"

VFA3000

port) 2 x 18 (R1, R2 port) 1764 Series VFA3000 5 Port Air Operated Valve Dimensions: Body Ported 2 position double: VFA3230-01 02 2 x 18 (Pilot port) 2 x 4.3 (Mounting hole for manifold) Max. 3 Max. 3 2 x 4.2 (Mounting hole) 3 x , 14 18 (P , A, B port) 2-3 (Breathing port) 2 x 3 2 x 18 (R1, R2 port) SYA 3 position closed center/exhaust center/pressure center: VFA3 30-X1 3 4 5 01 02 SYJA

AS-FPQ/AS-FPG

8 for details. 711 AS-FPQ/FPG Series How to Order AS 2 1 1 2 F P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

AS-FPQ/AS-FPG

8 for details. 711 AS-FPQ/FPG Series How to Order AS 2 1 1 2 F P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

5 Port Solenoid Valve Series SV

SV1000 3 position 73 (.16) (B) 2 (A) 4 4 position dual 3 port 71 (.15) SOL.b SOL.a Single solenoid 74 (.163) 3 (EB) 5 (EA) Double solenoid 78 (.17) SV2000 1 (P) 3 position 83 (.18) 4 position dual 3 port 78 (.17) 4 position dual 3 port valve: N.C./N.O.

Ozone Resistant

-00 80-VM230-02-00 80-VM430-01-00 80-VZM450-01-00 80-VZM550-01-00 80-VFM350-02-00 80-VHS400 80-VHS500 80-VHS2500 80-VHS3500 80-VHS4500 80-VHS2000 80-VHS3000 80-VHS4000 80-VEX12080-VEX13080-VEX15080-VEX170VEX1A33B VEX1B33B 80-VEX123380-VEX153380-VEX173380-VEX350 80-AR435 to 935 4, 5-port solenoid valve 3-port solenoid valve Directional control valves Mechanical valve 3-port residual pressure

IZN10_C

IZN10 IZN10 IZN10 IZN10 01 01 01 01 P P P P 06 06 06 06 Z Z Z Z B1 B1 B1 B1 IZN10 AC 01 02 11 Rc1/8 NPN P PNP 06 6 07 6.351/4) 16 6 ( 17 6.351/4() (3m) Z (10m) N IZN10-NT L DIN IZN10A002 IZN10B1 L B2 B3 DIN 01 06 ES 2 01 ES 17mm 2 2 02 3 3 11 Rc1/8 4 4 /IZS30 /IZS30 /IZS30 /IZS30-M2 M2 M2 M2 06 6: 07 6.351/4: 16 6 :( 17 6.35(1/4):() IZN10-CP(3m) IZN10-CPZ(10m) IZN10A003 NPN

PSE540/560

B 20 18 Common dimensions PSE54-IM5 18 3000 13 9.6 8.7 9 4 M5 x 0.8 PSE5401 N01 PSE54-IM5H 8.7 13 3.4 01: R 1/8 N01: NP T1/8 3 8 With across flats 12 M5 x 0.8 7 M5 x 0.8 16-3-26 5 Pressure Sensor For General Fluids Series PSE560 How to Order ZSE ISE Pressure sensing range PSE 0 1 3 4 Positive pressure (0 to 1 MPa) Vacuum (0 to 101 kPa) Compound pressure (100 to 100 kPa) Positive pressure

PFxx-OMJ0005CN

1. 2. 3. 4

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

3 !4 !

Table of Contents

SOL.b SOL.a 3(EB) 5(EA) 1(P) Conventional tie-rod base type manifolds are also available. 34 pins connector allows up to 16 stations with double solenoids. 4(A) 2(B) N.C. valve N.O. valve SOL.b SOL.a 1 2 SV C00 3(EB) 5(EA) 1(P) External pilot specifications is not available for 4 position dual 3 port valves. 3(EB) port 5(EA) port 4(A) port B side coil 2(B) port 1(P) port 1-2-2 1-2-3 3 Series

C95Series

RnDoneaUme 1.2 mS 1.2 mS 1.2mS 1.2mS Solid State Switch Type Auto swttch model I).F59 D-F5P D-J68 D-J51 1 Wire type 3 Wire 3 Wire 2 Wire 2 Wire output NPN PNP ---Application Relay.

90

NPN 1 output ISE30A-01-N-ML Digital pressure PNP 1 output ISE30A-01-P-ML NPN 1 output/ Voltage output ISE30A-01-C-ML switch Note 3) NPN 1 output/ Current output ISE30A-01-D-ML Note 1) This is an assembly of the bracket and resin panel nut. Note 2) l in part numbers for a round type pressure gauge indicates a type of connection thread.

LEC-OM07605CN

-15 3.5.1 . 3-15 3.5.2 . 3-16 3.5.3 . 3-17 3.5.4 . 3-17 3.6 . 3-18 3.6.1 (SS1) . 3-18 3.6.2 . 3-19 3.6.3 . 3-20 3.6.4 EM2 . 3-20 3.7 . 3-21 3.7.1 . 3-21 3.7.2 . 3-22 3.8 . 3-23 3.8.1 . 3-23 3.8.2 . 3-24 3.8.3 . 3-26 1- 3.9 SSCNET . 3-27 3.10 . 3-29 3.10.1 . 3-29 3.10.2 . 3-30 3.11 . 3-34 4 41 4-18 4.1 . 42 4.1.1 . 42 4.1.2 . 43 4.1.3 . 45 4.2 . 45 4.3 . 47 4.3.1

LEC-OM02904

PD01 0h PD02 0h PD03 0h PD04 0h PD05 0h PD06 0h PD07 *DO1 1(CN3-13) 0005h CN3-13MBR 0 0 CN3-13 CN3-13 00 OFF 0A SA(2) 01 (3) 0B VLC(5) 02 RD 0C ZSP 03 ALM 0D (3) 04 INP(14) 0E (3) 05 MBR 0F CDPS 06 DB 10 (3) 07 TLC(4) 11 ABSV(1) 08 WNG 121F (3) 09 BWNG 203F (3) 1. OFF 2. OFF 3. 4. OFF 5.

Smooth Cylinder/Low Speed Cylinder

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 6, 8 3.2, 4 8, 10 3.2, 4, 6 Metric size 6 4 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" Inch size 5/32" 3/16" 7 12 Air flow (L/min (ANR)) 38 Controlled flow 0.1 0.2 Effective area (mm2) 0.6 230 180 460 100 Flow rate (L/min (ANR)) 260 390

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

(N specifications) How to Order AS4200-04 AS3200-03 01 S AS 2 2 0 0 AS2200-02 AS2200-01 Option Body size AS1200-M5 None With seal Nil 1 2 3 4 M3, M5 standard S K N 1 8 1 4 , standard standard standard AS1400-M3 Hexagonal lock nut 8 3 Electroless nickel plated 2 1 If more than one option is required, write option part numbers in the order of S, K, N.