Series VCS

1 5 1 0 25 20 1 5 30 25 25 2.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

20 10 10 1.

Compact Guide Cylinder

For bore size 20 or more, choice of Rc, NPT, G port is available. (Refer to page 3.)

PSE540/560

200 g 194 g 201 g 187 g 203 g 193 g Weight With sensor cable 101 g 108 g 102 g 109 g 95 g 111 g 101 g Without sensor cable 16-3-27 6 Series PSE560 Internal Circuit PSE56Voltage output type 1 to 5 V Output impedance Approx. 1 k PSE56--28 Current output type 4 to 20 mA Allowable load impedance 500 or less (at 24 VDC) 100 or less (at 12 VDC) Brown LINE(+) Brown DC(+) Load Main circuit Main

CE2

Description Material 40 NLP-40A PDU-16Z PSD-22 x 16 P44 DSM-20 CA40-1606 CA40-1601 P3 50 NLP-50A PDU-20Z PSD-27 x 20 P50 DSM-25 CA63-1608 CA50-1602 P3 63 NLP-63A PDU-20Z PSD-27 x 20 P60 DSM-25 CA63-1608 CA63-1603 P3 100 NLP-100A PDU-30Z PSD-38 x 30 P90 DSM-35 CA100-1610 CA100-1605 P5 Piston seal Rod seal A Rod seal B Brake piston seal Cushion seal Piston gasket Tube gasket Cushion valve seal

3 Port Air Operated Valve Series SYJA300 1

VVTA300 05 1 01 Exhaust type Thread type Stations 02 1 Nil F N T 2 stations Individual exhaust 3 Common exhaust Rc G NPT NPTF For manifold Caution 20 20 stations 1. Each valve is fixed on the manifold with two M4 mounting screws. Please tighten the screws properly when valves are reassembled. Screw tightening torque: 1.4 Nm 2.

HRX-OM-W038

Model number: HRS040-N-20 The transition connector from Rc to NPT is enclosed as an accessory. For NPT piping, be sure to use this connector. Model number: HRS040-F-20 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

ZP3

G Dimensions Per Vacuum Inlet: One-touch Fitting Width across flats F Model E F G Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

55 79 141 0.4 11 32 45 80 0.3 8 24 34 60 0.6 17 47 68 121 28 79 113 201 Weights Standard Strokes (g) (mm) Body weight 80 105 130 210 210 320 640 830 Additional weight of magnet & rail 10 10 13 20 17 23 20 23 Model MXP 6 MXP10 MXP12 MXP16 Model MXP 65 MXP 6-10 MXP10-10 MXP10-20 MXP12-15 MXP12-25 MXP16-20 MXP16-30 Standard strokes 5, 10 10, 20 15, 25 20, 30 With shock absorber Shock Absorber

Compact Type

32 32 25 25 0.1 0.1 20 20 15 15 10 10 0.01 0.01 0 0 20 40 100 60 80 20 40 100 60 80 Overhang L (mm) Overhang L (mm) CXSJM CXSJL Graph V = over 400 mm/s; up to 50 mm stroke 13 CXSJM CXSJL Graph V = up to 400 mm/s; up to 50 mm stroke 12 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 15 15 10 10 0.01 0 20 40 100 60 80 0.01 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) 5 Compact

Compact Type Dual-Rod Cylinder Series CXSJ

) 32 32 25 25 0.1 0.1 20 20 15 15 10 10 0.01 0.01 0 0 20 40 100 60 80 20 40 100 60 80 Overhang L (mm) Overhang L (mm) CXSJM CXSJL Graph V = over 400 mm/s; up to 50 mm stroke 13 CXSJM CXSJL Graph V = up to 400 mm/s; up to 50 mm stroke 12 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 15 15 10 10 0.01 0 20 40 100 60 80 0.01 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) 5 Compact

Pin Clamp Cylinders

198 19.9 199 20.0 200 19.5 10 7.5 20 14 10.5 25 20 13 27 4 4.5 9.2 6 5.5 12.6 6 8 17.2 145 14.6 146 14.7 147 14.8 148 14.9 149 15.0 150 10.5 105 10.6 106 10.7 107 10.8 108 10.9 109 11.0 110 14.5 D11 7.5 20 15 10.5 25 4 4.5 9.8 6 6 13.3 -X 533 C(L)KQG32 Series Dimensions CLKQGl32 (Clamping height LOW type) The figures below indicate the CLKQGB32-lRCL-X2081.

76

Mounting hole dia.: 0.41 (10.5) 10 Series IDF100FS/125FS/150FS Data Condensed Water Calculation 45 Atmospheric pressure 14.5 psi (0.1 MPa) 40 Relative humidity 100% Amount of moisture in air g/m3 29.0 (0.2) 35 43.5 (0.3) 58.0 (0.4) 72.5 (0.5) 87.0 (0.6) 101.5 (0.7) 116.0 (0.8) 80% 60% 40% 30 25 145 (1.0) Amount of condensed water CH 18.23.0=15.2 g/m3 20% 20 203 (1.4) B C D 232 (1.6) 15 10

SZ3000

(up to 24 solenoids possible) 20 20 20 stations 20 stations Connector mounting position Mounting position Symbol D PG: Flat cable connector (20 pins) PH: Flat cable connector (10 pins) D Side Note Symbol 02 Note Symbol 02 Stations Stations 2 stations 2 stations ... ... ... ...

2–4

2 pcs. 5 10 15 15 20 20 25 15 32, 40, 50 32, 40, 50 5 15 10 5 1 pc. 10 10 20 1 pc. 5 5 10 15 15 20 25 15 Besides the models listed in How to Order, the following auto switches are applicable.

PSxx-OMT0001CN

) EH5 kPa EH5 kPa EPL:25kPa EPH:50kPa -46No.PS-OMT0001CN-E 4 (1)(100 kPa200 kPa) (2) () (1) OUT1 (2) OUT1 1 () (3) OUT2 (4) [F 2](52 ) OUT [EPH] OUT [EPL] (5) -47No.PS-OMT0001CN-E 4 2 [F 0] [F] 2 [Function ][]] F 0(Unit) [ PA] kPa 49 ISA3-F[ 20] ISA3-G[ 50] ISA3-H[ 50] F 1(oUt1) OUT1 50 ISA3-F[ 3] ISA3-G[ 20] ISA3-H[ 20] [ SoG] ON OFF out2[ Ewin] OUT 2ot[ 2_P] F 2

VQC

For example, changing from F Kit (D-sub connector) to S Kit (serial transmission) is achieved by simply changing the kit piece. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram) Printed circuit board patterns between connectors are shifted at every station

Title not found

G Equipped with stop switch Specifications Item Description Standard functions Chinese character display Stop switch is provided.

53

time 1 min 30 s 20 s Max.

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-