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Secondary pressure (psig) 87 Secondary pressure (psig) 72.5 58 29 15 43.5 30 15 27.6 0 0 141.3 282.5 424 565 Flow (SCFM) 00 141.3 282.5 424 565 Flow (SCFM) 0 30 43.5 58 72.5 87 101.5 116130.5 145 Supply pressure (psig) 152 Return to Menu Specialty Regulators NAR Series Pressure Regulator NAR425, 435, 625, 635, 825, 835, 925, 935 Construction No.

Connector Socket Lead wire Hook 776 Compact Pressure Switch Series ZSE1/ISE1 Dimensions Grommet type: ZSE1-00-14/-15/-18/-19 Connector type: ZSE1-00-14C/-15C/-18C/-19C 4 . 23 4 . 23 Indicator light (Red) Indicator light (Red) 23 23 15 15 H HYS SET L H L H HYS SET L H Pressure setting trimmer Hysteresis setting trimmer Hysteresis setting trimmer Pressure setting trimmer 4 . 23 4 . 23 Indicator

64 76 10 00 Spain (34) 945-18 41 00 Belgium (32) 3-355 14 64 Netherlands (31) 20-531 8 Germany (49) 6103 4020 Sweden (46) 8-603 12 00 (420) 5-414 24611 Norway (47) 67 12 90 20 Austria (43) 2262-62 280 Italy (39) 02-927 11 Fig.2-1 P-clip Fig.2-2 U-clip Fig.2-3 Soldering Country Telephone Country Telephone *Websites Kingdom Ireland (351) 1-403 9000 United SMC Corporation www.smcworld.com SMC

(mm) Applicable fitting size Model KJY02-M3 KJY02-M5 2 M3 x 0.5 M5 x 0.8 KJR02-04 4 2 KJU02-00 2 KJU02-23 KJU02-04 2 Bulkhead union KJE Plug KJP Applicable tubing O.D. (mm) Model Applicable fitting size Model KJE02-00 2 KJP-02 2 2 Polyurethane tubing Series TU 2 Miniature fittings Series M

Spain (34) 945-18 41 00 Denmark (45) 70 25 29 00 Poland (48) 22-548 50 85 Greece (30) 1-342 60 76 Switzerland (41) 52-396 31 31 Belgium (32) 3-355 14 64 Netherlands (31) 20-531 8 Germany (49) 6103 4020 Sweden (46) 8-603 12 00 Protection ground terminal (420) 5-414 24611 Norway (47) 67 12 90 20 Austria (43) 2262-62 280 Italy (39) 02-927 11 terminal on the end of motor, using a metal P-clip

B C D 44 Mounting J ig to the piston 43 Mounting to workpiece Fem ale thread type Male thread type D o No.LZ-OM00401 B (3/3) (44) 1908-56 38 88 Hungary (36) 1-371 1343 Turkey (90) 212 221 15 12 Finland (358) 9-859 580 Portugal (351) 22 610 89 22 Denmark (45) 70 25 29 00 Poland (48) 22-548 50 85 Greece (30) 1-342 60 76 Switzerland (41) 52-396 31 31 France (33) 1-64 76 10 00 Spain (34) 945-

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

Manually operated type (For high pressure and high flow) Diaphragm Valve for Ultra High Purity Series AP3100 Suitable for UHP gas supply line Body material: 316L SS secondary remelt High pressure type: 20.7 MPa and 9 MPa Designed for bulk specialty gas (BSGS) delivery LOTO standard with AP3157, optional AP3125 How to Order (Inlet) (Outlet) AP31 00 2PW MV8 MV8 S Model Ports Code Maximum operating

ML2B / W1 ML2B / M1 0 0 0 0 Momentum Nm 0 0 Load N 0 Piston Speed m/s Piston Speed m/s ML2B / W2 ML2B / M2 Momentum Nm Load N Piston Speed m/s Piston Speed m/s ML2B / W3 ML2B / M3 20 10 Momentum Nm 5 Load N 3 2 1 Piston Speed m/s Piston Speed m/s ML2B / W4 Allowable Kinetic Energy 00 H or izontal M ounting 100 5 00 Ver tical M ounting 50 Load N 0 0 1 00 Load N 0 50 5 Piston Speed

/ / INC()/ / b c 2mm d e f / P.41 7.2 / P.43 7.2 g INP ON INP INP ON / P.41 7.2 h / P.41 7.2 / P.42 7.2 i 100 % 150 % LEY16A 200 % LEY25A / P.42 7.2 j 12AREA ON 12 INC ABS() No.1 148 250 AREA k INP No.0 50+20 = 70 -24- 1 -IN INPAREA a b c d e f g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 ABS 100 100.00 3000 3000 0 0 0 100 80.00 90.00 0.50 No.00

When the controller is turned ON next time, the default value (January 1st, 2000. 00:00:00) will be set. Therefore, set the date and time again. -13No. JXC-OMU0026 (a) Change to remote mode Change the mode to remote mode in the main window. When the mode is changed to the remote mode, the motors of the connected actuators will turn ON.

DB MVGQ L S Q K J C " #$% B " #$% A " #$% G % 6 %, , %( **%' -.7 MVGQM, MVGQL Common Dimensions 55 : *; % , %(' )* )% 8% ,9% 55 #*('*' ,$% 55 B C DA G GA H J K L MM ML NN PW Q R S T V W X YY YL Z VW / / #%%, 80 0 00 0 / 00 0 1 / 1 & / 1 & / -. 100 0 0 1 1 & 1 & / 0 % < , ,,; % 5*( 6* % % (%5%'*% ,$%, % *( % ,*('*' ,$%, ;= 5%*(, 6 (,* ( * , *% % . % % %* %(= %&% % 55%

Description Material Aluminum casted Aluminum casted Top cover Bottom cover q w VOA301-M V0307E-D-X56 3 port switching valve (for operation control) e 1 VR4152-00-0 GA46-10-01 12702A 12705A NLP-100A PNY-25 SW-100 x 6 x 2 JIS B 2401P3 r t y u i o !0 !

PB 101 to 47.9 kPa Pilot Solenoid Valve Specifications JIS Symbol (Vacuum pilot type) Valve type Type 6A to 25A 32A to 50A, 32F to 50F V0301-00 Port size Pilot solenoid valve SF4--23 N.C. Normally closed N.O.

(Full span) Class 3 0 to 50C Housing: Polycarbonate/ABS resin Operating temperature range Material Port exhaust JIS Symbol Standard P V 13-7-5 6 Series ZL Option Specifications With digital vacuum pressure switch (ZSE4) Digital Vacuum Pressure Switch Specifications ZSE4-00---X105 ZSE4B-00---X105 ZSE4E-00---X105 Part no.

l 250 225.5 305 256.7 428 323.5 21775 1089 100 340.2 390.5 390.8 352 476.2 669.2 505.s 34020 l70l Table. 6.17 Mass in kg tor cylinders trom 25 to |00 mm Dia. for a Load Ratto ot 85olo wilh 5 bar working pressure. P E E D C O N T R O L The speed of a cylinder is delined by the extra force behind the piston, above the torce opposed by the load.

7 POM o POM Valve seat (B) 5-6-36 5 Port Mechanical Valve Metal Seal Series VZM400 Series VZM400 Basic VZM450-01-00 JIS Symbol Accessory mounting hole (Pilot exhaust port) SA VA SA VA 0.5 MPa supply VM 1.0 mm P.T. 16 N F.O.F. VR 2.0 mm O.T. 2-3.5 mounting hole 3.0 mm T.T.

0 0 [50 Hz] 0 10 20 30 40 50 Circulating fluid temperature [C] [60 Hz] 0 10 20 30 40 50 Circulating fluid temperature [C] HRS012-A-20/HRS012-W-20 (Single-phase 200 to 230 VAC) 2500 2500 Ambient temperature or facility water temperature Ambient temperature or facility water temperature Cooling capacity [W] Cooling capacity [W] 2000 2000 25C 25C 1500 1500 32C 1000 1000 32C 500 500 40C 40C 00

Vacuum Unit Series ZK2 RoHS How to Order Single Unit Vacuum Pump System 08 P K 5 A L ZK2 00 ZK2 08 A K 5 A L 12 Ejector System (with Valve) ZK2 08 A N 0 N N 12 Ejector System (without Valve) Remains blank when option is not selected. q e r t y u i w e Combination of Supply Valve and Release Valve Note 3) q System/Body Type Supply valve Release valve Supply valve Release valve System Body

VFR2000 series manifold, metric, Plug-in and non plug-in styles, Wiring types (non plug-in): grommet, grommet terminal, Conduit terminal, DIN connector, L plug connector M plug connector, Wiring types (plug-in): terminal block, multi-connector, D-sub connector, Maximum stations: 17 (depending on style), MFLD, VFR2*00 SERIES, VALVE, VV*FR* MANIFOLD VFR SERIES, UM, VV*FR* BUILT IN FITTINGS