5

Applicable mounting bracket T2 V M W Type A mounting bracket Type B mounting bracket Joint 32, 40 YU-03 YA-03 YB-03 50, 63 YU-05 YA-05 YB-05 T1 80 YU-08 YA-08 YB-08 2 x O counterbore 2 x D through B J 100 YU-10 YA-10 YB-10 E K (Width across flats ) H (With locking) Material: Stainless steel (mm) Part no.

S Couplers Series KKA

Body size Port size KKA3 S-01 M KKA3 P-01 M R1 / 8 R1 / 8 1 / 8 KKA3 S-02M 1 / 8 KKA3 P-02M R1 / 4 R1 / 4 KKA3 S-03 M KKA3 P-03 M R3 / 8 R3 / 8 KKA4 S-02M KKA4 P-02M R1 / 4 R1 / 4 KKA4 S-03 M 1 / 4 KKA4 P-03 M 1 / 4 R3 / 8 R3 / 8 KKA4 S-04 M KKA4 P-04 M R1 / 2 R1 / 2 KKA6S-03 M KKA6P-03 M R3 / 8 R3 / 8 KKA6S-04 M KKA6P-04 M 1 / 2 1 / 2 R1 / 2 R1 / 2 KKA6S-06M KKA6P-06M R3 / 4 R3 / 4 Built-in

reduces flow setting time

AQ ASV Inch Size [mm] AK Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FS1-M5E-01 1/8 VCHC 7.2 9.4 9 17.2 19.8 17.5 33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FS1-U10/32-01 AS131FS1-M5E-03 5/32 8.2 AS131FS1-U10/32-03 AS131FS1-M5E-07 1/4 11.2 18.6 20.9 20.4 36.6 8 AS131FS1-U10/32-07 ASR ASQ M5 x 0.8 10/32UNF 8 593 AS-FS Series Dimensions: Elbow

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

0.8 10/32UNF 8 9.6 9.4 AQ ASV Inch Size [mm] AK Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FSG1-M5-01 1/8 VCHC 9.4 9.4 11.6 19.4 17.5 33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FSG1-U10/32-01 AS131FSG1-M5-03 5/32 8.2 19.8 AS131FSG1-U10/32-03 AS131FSG1-M5-07 1/4 11.2 11.5 20.9 20.4 36.6 8 AS131FSG1-U10/32-07 7.2 ASR ASQ M5 x 0.8 10/32UNF 8

Smooth Cylinder/Low Speed Cylinder

B J Type A mounting bracket Type B mounting bracket 32, 40 YU-03 YA-03 YB-03 CY 50, 63 YU-05 YA-05 YB-05 Material: Stainless steel CX CX 80 YU-08 YA-08 YB-08 (mm) 100 YU-10 YA-10 YB-10 Bore size (mm) B D E J M O Part no.

NCQ8

*Lead wire length symbols: 20in (0.5 m) . Nil (Example) M9N 118in (3 m) . L M9NL 197in (5 m) .

VQZ1000/2000/3000

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Series MB/CA1 Body ported Series CJ2 Series CM2 Tube x Length T0604 x 1 m VQZ1151-01 Speed controller AS3001F-06 Silencer AN110-01 Tube x Length T0604 x 1 m T0806 x 1 m VQZ2151-02 Speed controller AS3001F-06 AS3001F-08 Silencer AN200-02 Tube x Length T0604 x 1 m T1075 x 1 m T1209 x 1 m VQZ3151-03 Speed controller AS3001F

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

L dimension 1.5 m 3 m 5 m Part no. L dimension 1.5 m 3 m 5 m AXT100-MC26-015 AXT100-DS25-015 AXT100-MC26-030 AXT100-DS25-030 AXT100-MC26-050 AXT100-DS25-050 When a commercially available connector is required, use a 25 pin female connector conforming to MIL-C-24308. L L (60) 44 Approx. 10 8 16 14 25 1 13 47.04 55 Multi-core vinyl cable 0.3 mm 2 x 25C 2 x M2.6 x 0.45 Terminal no.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

S type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(Initial value) Base mounted Solenoid specifications Grommet(G)/(H), L plug connector (L), M plug connector (M), DIN terminal (D), M8 connector (W) Electrical entry JIS Symbol G, H, L, M, W D Internal pilot Rated coil voltage V DC AC50/60Hz 24, 12, 6, 5, 3 24, 12 10-SYJ51 M 2 4 10-SYJ52 M 2 4 100, 110, 200, 220 10% of rated voltage Allowable voltage fluctuation (A) 2 (A) 2 Standard 0.35

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Inch Size [mm] Model d T H D1 D2 D3 L1 L2 L3 L4 L5 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS23l1FG-01-01(S)A 1/8" 13.3 24 17.5 36 30.6 29.2 27.5 26.1 13.3 10 (9) AS23l1FG-01-03(S)A 5/32" 8.2 13.9 25.1 10 (10) AS23l1FG-01-07(S)A 1/4" 11.2 10.2 16.4 29.1 20.2 38.7 11 (10) AS23l1FG-01-09(S)A 5/16" 13.2 30.1 21.5 40 14.2 12 (11) AS23l1FG-02-03(S)A 5/32" 7.2 9.6 12 1/8

Table of Contents

2.5 10 m 1.2 Response time (sec) Response time (sec) 8 m 2 0.9 5 m 8 m 1.5 0.6 5 m 1 3 m 3 m 0.3 0.5 1 m 0 0.02 0.04 0.06 0.08 0.1 0.12 0.14 0.16 1 m 0 0 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 Detection distance (mm) Detection distance (mm) Piping tubing lengthResponse time Piping tubing lengthResponse time Nozzle Shape Please keep the nozzle shape as illustrated below.

VS 8-2/VS 8-4

The total number of solenoids (points) must not exceed 24. 1.5 m 3 m 5 m Cannot be used for transfer wiring. Lengths other than the above is also available.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

plug connector (M) 1 (P) 3 (R2) VQZ1000 M plug connector (M) 0.2 0.35 (A) 4 1 (P) 5 (R) DIN connector (Y) DIN connector (YZ) VQZ2000 N.C.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

X Port size) Silencer System Solenoid valve Speed controller VFS 4 X 1/8 AS2301F01-04 A VS SYJ5l40-01 Rc(PT)1/8 (S = 4.5mm2) AS2301F01-06 B VS7 AN110-01 (S = 35mm2) Plate fixing screw 6 X 1/8 AS3301F -06 02 03 C 8 X 1/8 AS3301F -08 02 03 D Note) Do not loosen plate fixing screw. 1.2-31 Series SYJ5000 How to Order Light and surge voltage suppressor For electrical entry G,H,L and M Configuration

Series H, DL, L, LL Self-align Fittings

M L1 L2 1 4 8 6 DEF06-02 48 20 11 16 16 50.5 46.5 17 15 13 11 19 17 14 12 14 12 6max. 4max. 3 8 DEF08-03 66 3 8 3 8 DEF10-03 10 12 53.5 89 DEF12-03 54.5 34 51 17 17 17 17 15 17 19 19 104 17 19 17 19 7max. 7max. 105 Series H, DL, L, LL Self-align Fittings Plug: DP Applicable tube O.D. Weight (g) Part No.

5 Port Solenoid Valve SY Series

SGP10A x 1 m AS420-03 AN200-02 Series CS1 SGP10A x 1 m AS420-03 AN300-03 SY9120-03 Tubing bore x Length Speed controller Silencer SY7140-03 Tubing bore x Length Speed controller Silencer SY9140-04 Tubing bore x Length Speed controller Silencer SGP15A x 1 m AS420-04 AN400-04 Features 1 Valve Variations Note 1) Electrical entry Actuation Voltage Light/surge voltage suppressor 2 position 3

SV

A, B port size (metric) A, B port size (inch) P, E port Applicable series P, E port Applicable series A, B port Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 C8 C10 C12 02 03 02F 03F M A, B port Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 N9 N11 02N 03N 02T 03T M One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch

Prevents Micro-Bubbles

Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 VN Symbol 01 02 01 02 02 03 03 04 04 06 10 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Body class Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.

LEC-OM02704CN

-3-TMH5B () LE-CSB-RA LE-CSB-RB 13 8 13 (2) LE-CSB-RA LE-CSB-RB LE-CSB-SA LE-CSB-SB MR -BK S1CBL M-A1-H MR -BK S1CBL M-A 2 H MR-BKS2CBL03M-A1-L MR -BK S2CBL 03 M-A 2 L ( ) AWG 20 B1 AWG 20 B2 . 13 9 13 13.2 (1) [W] LEC-MR-RB-032 LEC-MR-RB-12 [40] [40] LECSC-S5 30 LECSC-S7 10 30 100 LECSC-S8 10 30 100 (2) (2) PA02 PA02 0 0 00 100W 200W / 400W 02 LEC-MR-RB-032 03 LEC-MR-RB