Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

B A NN x M5 x 0.8 thread depth 10 4H9 ( ) depth 3.5 +0.030 0 HA GA Section AA Section BB (mm) Model F 35 35 35 50 35 55 65 ZZ 99 99 99 111 131 177 231 M 71 71 71 83 103 149 203 Z 70 70 70 82 102 148 202 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 H 40 40 40 25 36 36 38 HA 40 40 40 25 36 72 76 G 15 15 15 17 15 25 35 GA 15 15 15 42 51

SMC

A 5 1 20 9 9 8.5 4.2 B A 8.5 18.5 8.5 18.5 H (NN1) x H G Section AA Section BB (mm) Model F 35 35 35 50 35 55 65 ZZ 99 99 99 111 131 177 231 M 71 71 71 83 103 149 203 Z 70 70 70 82 102 148 202 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 H 40 40 40 25 36 36 38 G 15 15 15 17 15 25 35 N 4 4 4 4 6 6 6 NA 2 2 2 2 2 4 4 GA 15 15 15 42 51

CV/MVGQ

H2 I D A N 20 25 32 40 26 M8 x 1.25 55 70.5 40 3.2 25 6.8 4 41 40 5 13 15.5 24 28 8 18 15 13 5 8 C J G5-S 32 M10 x 1.25 55 76.5 40 3.2 28 6.8 4 45 47 5.5 13 19.5 30 33.5 10 22 15 17 6 8 32 M10 x 1.25 55 78.8 40 3.2 28 6.8 4 45 47 5.5 13 19.5 34.5 37.5 12 22 15 17 6 8 CV 41 75 84.8 55 3.2 30 7 4 50 54 7 16 21 42.5 46.5 14 24 21.5 22 8 10 M14 x 1.5 Dimensions by Stroke MVGQ Stroke 1 to 50 51

C95

L3 d1 H9 MB1 Part no. d3 h KJ27D KJ36D KJ42D M27 x 2 M36 x 2 M42 x 2 110 125 142 70 80 90 37 43 49 51 56 60 4 4 4 36 41 46 125 160/200 250 30 35 40 CA2 CS1 C76 C85 C95 CP95 NCM NCA D-X 20Data 6-12-39 40 Refer to Page 6-16-1 for details on auto switches.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

switch mounting groove dimensions (4 locations) MHZ MHF MHL 10 10 MHR 40 MHK 40 MHS 5 Y 6.4 MHC MHT MHY MHW (mm) -X Model MHS3-32D MHS3-40D MHS3-50D MHS3-63D MHS3-80D L K 9 9 10 11 12 J 20 21 24 28 32 G 30.5 32 37.5 44 56 FZ 5 6 6 7 8 FY 19.5 23.5 28 34.5 43.5 FX 22 26.5 31 38 47.5 CB 16 17 20 22 27 CA 8 9 9 12 13.5 EC 8 10 11 15 21.5 EO 12 14 17 23 31.5 DC 28 31 35 43 53.5 DO 32 35 41 51

CQS

Rear flange Long stroke Standard stroke (mm) Without auto switch With auto switch Without/with auto switch Long stroke (mm) Bore (mm) Standard stroke (mm) B L L1 A B L L1 A B L L1 17 17 19.5 22.5 A 12 16 20 25 24 25.5 28.5 32.5 13.5 13.5 14.5 15 32 32 41 44 51 51 63.5 67 14 15.5 18.5 22.5 3.5 3.5 4.5 5 22 22 29.5 32.5 31 31 42 45.5 14 15.5 18.5 22.5 3.5 3.5 4.5 5 26 26 32 35.5 35 to 100 35

MGP

FB 50 Stroke 66 67.5 109 109 117.5 117.5 121 141 51 Stroke or more 97.5 99 114 114 129 129 148 166 20 25 32 40 50 63 80 100 66 67.5 71.5 78 83 88 102.5 120 19 20 22 22 23 23 24 29 * Other dimensions are same as standard.

TABLE OF CONTENTS

All Models STRAIN RELIEF CONNECTOR BOTTOM CAVITY PORT .20 (5.1) .30 (7.6) SPADE TERMINAL COIL MOLDED All Models All Models * Models 21, 31, 51 ADD .232 (5.9) FOR SPADE TERMINAL COIL OPTION SINGLE AUTOMOTIVE MANIFOLD MOUNT HIGH TEMPERATURE MOLDED COIL All Models except 51 All Models All Models DOUBLE AUTOMOTIVE FLANGE MOUNT EUROPEAN DIN STYLE COIL All Models except 51 Models 21, 71 Models

CP95

13 27 16 105 4 4 4 9 30 163 213 52 38 17 4 M16 x 1.5 50 32 40 20 G 1/4 15.5 M8 x 1.25 8 16 31.5 16 106 6 4 5 10.5 37 179 244 65 46.5 24 5 M16 x 1.5 63 32 45 20 G 3/8 16.5 M8 x 1.25 8 16 31.5 16 121 6 4 9 12 37 194 259 75 56.5 24 5 M20 x 1.5 80 40 45 25 G 3/8 19 M10 x 1.5 10 21 38 16 128 8 4 11.5 14 46 218 300 95 72 30 5 M20 x 1.5 100 40 55 30 G 1/2 19 M10 x 1.5 10 21 38 16 138 8 4 17 15 51

CP95

M6 x 1 4 17 4 4 4 9 30 163 213 52 38 M16 x 1.5 50 8 16 106 32 16 40 20 31.5 G 1/4 15.5 M8 x 1.25 6 24 5 4 5 10.5 37 179 244 65 46.5 M16 x 1.5 63 8 16 121 32 45 16 20 31.5 G 3/8 16.5 M8 x 1.25 6 24 5 4 9 12 37 194 259 75 56.5 M20 x 1.5 80 10 16 128 40 45 21 38 25 G 3/8 19 M10 x 1.5 8 30 5 4 11.5 14 46 218 300 95 72 M20 x 1.5 100 10 16 138 40 55 21 38 30 G 1/2 19 M10 x 1.5 8 32 5 4 17 15 51

MY1

However, add -XB10 to the end of the part number for non-standard strokes from 51 to 599. Also when exceeding a 600 mm stroke, specify -XB11 at the end of the model number. (Except 10) 1 mm or less Backlash Possible (Non-lock type) Manual release Made to Order Specifications (For details, refer to page 8-31-1.)

LEH_C

/77 246/53 243/48 242/39 254/43 614 1640 52130 84210 (N) 40100 1) 3) 26 38 1128 /(mm/s) 2)3) 580 /550 5100 /550 5120 /550 + () (mm) 4) 0.02 (mm)5) 0.05 /(mm) 6) 0.5 1.0 / (m/sec 2) 7) 150 / 30 (c.p.m) 60 () 540 (%RH) 90 () 165 220 430 585 1120 1760 (g) 135 190 365 520 20 28 42 (DC24V) () A/B (800 /) (V) DC2410% 11/7 28/15 34/13 36/13 / (W) 8) 8/7 22/12 (W) 9) 14 42 19 51

Process Pump

-1S19 1S25 10 204 255 120 4 x 9 AIR SUP (P1) Rc, NPT, G 1/4" FLUID OUT With nut 249 A 8 8 195 157 118 91 51 18 FLUID IN With nut AIR SUP (P2) Rc, NPT, G 1/4" Tube Size Applicable for Nut Size (Tube size can be altered, using a reducer even within the same nut size.)

MXQ

With end lock (12): MXQ12-R Operating port 2-M5 x 0.8 5 22 22 51 3 Other dimensions are the same as basic style.

1.1

536) (426) 4 x 37 4 x 13 Caster with adjuster (Plugged) Tank drain port Rc 1/2 (69) (For anchor bolt) With casters (-A) (Option) 18 Series HRG Thermo-cooler Dimensions: Air-Cooled Refrigeration HRG010-A (-A) (991) (595) HRG HRGC HRZ HRW HEC HEB HED Technical Data Related Products Refrigerant high pressure gauge Ventilation air outlet Circulating fluid pressure gauge Eye bolt M12 (1300) (51

3 Port Solenoid Valve

52.8 61.2 63 71.4 73.2 81.6 83.4 91.8 93.6 102 103.8 112.2 114 122.4 124.2 132.6 134.4 L1 L2 SUP/EXH block fitting entry direction: Side Panel fitting dimensions/Mounting hole dimensions M3 thread through hole No. 10-32UNF (Inch size) 27.5 31.1 L1 L2 Station n 1 2 3 4 5 6 7 8 9 10 11 12 20.4 10.2 30.6 20.4 40.8 30.6 51 40.8 61.2 51 71.4 61.2 81.6 71.4 91.8 81.6 102 91.8 112.2 102.0 122.4

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

51 63.5 67 (All dimensions are common between standard stroke and long stroke except "A", "B", "C", "L" and "L1".)

Shock Absorbers and Rate Controls

A 8 D wf wt stAr()flf stA 33457 rEM0.llil .25 .47 .43 M l O x l .20 .85 .51 I Imm .28 stAl2Irt stA 332990Elvl.t5M .38 .71 .55 M l 2 x l .24 1.28 .0J l3mm .28 SLAltr20x.38 sta_ill33 (r.Rlorl|il.?

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LER MH LEH ML + Stroke MA MC MD Section XX LEY -X5 Section XX details 11LEFS XB 11LEJS XA H9 XA 25A[mm] Size Stroke range [mm] C D EH EV H J K L M O1 R S T U B V LEC 25 15 to 100 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 45 46.5 1.5 136.5 40 105 to 400 161.5 LEC S 32 20 to 100 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 60 61 1 156 60 105 to 500 186 LEC SS-T 63 50 to 200 21 40

Environment

LEPS Stroke LER 6 x MO thread depth MR XA H9 depth XA LEH LEY -X5 LEY -X5 MH Section XX details 11LEFS ML + Stroke (MB) MA MC MD Section XX 11LEJS XB XA H9 XA 25ALEC [mm] Size Stroke range [mm] A B C D EH EV FH FV GH GV H J K L M O1 LEC S 25 15 to 100 130.5 116 13 20 44 45.5 57.6 56.8 66.2 139.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 101 to 400 155.5 141 LEC SS-T 32 20 to 100 148.5 130 13 25 51