Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 8 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: T (NPTF)

Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 10 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: T (NPTF)

Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 2 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: T (NPTF)

Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 4 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: T (NPTF)

Model: VPA300, Exhaust Type: Common Exhaust, Stations: 3 Stations, Symbol: 1, Port Size: 1/4, Thread Type: NPTF

Model: VPA300, Exhaust Type: Common Exhaust, Stations: 6 Stations, Symbol: 1, Port Size: 1/4, Thread Type: NPTF

Model: VPA300, Exhaust Type: Common Exhaust, Stations: 8 Stations, Symbol: 1, Port Size: 1/4, Thread Type: NPTF

Model: VPA300, Exhaust Type: Common Exhaust, Stations: 10 Stations, Symbol: 1, Port Size: 1/4, Thread Type: NPTF

Model: VPA300, Exhaust Type: Common Exhaust, Stations: 2 Stations, Symbol: 1, Port Size: 1/4, Thread Type: NPTF

Model: VPA300, Exhaust Type: Common Exhaust, Stations: 4 Stations, Symbol: 1, Port Size: 1/4, Thread Type: NPTF

Series: 3 (VP300), Exhaust Type: 42 (Individual Exhaust), Pilot Type: R (External Pilot), Stations: 10 Stations, Symbol: 3, Port Size: 02 (1/4), Thread Type: T (NPTF)

Stations: 10 Stations, Piping: 3 (P Common, R Individual, A Side), Thread: T (NPTF)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 10 Stations, Passage: 3 (P: Common, EA,EB: Individual, Port A,B: Side), Port Size: 02 (1/4), Thread: T (NPTF)

Base Mounted Wiring: Plug-in w/Terminal Block, Pilot Type: Internal Pilot or None, Junction Cover: One-piece Junction Cover, Stations: 10 Stations, Passage: P: Common, EA,EB: Individual, Port A,B: Side, Port Size: 1/4, Thread: NPTF, Control Unit: -, Voltage of Air Release Valve: -, Q: -

Stations: 10 Stations, Piping: P Common, R Individual, A Side, Thread: NPTF, Option: -, CE/UKCA Compliant: -

Series: VP300, Exhaust Type: Individual Exhaust, Pilot Type: External Pilot, Stations: 10 Stations, Symbol: 3, Port Size: 1/4, Thread Type: NPTF

A_HEC-OM-K001

Host STX 47H Setting data ETX Check sum CR 103 102 101 100 (H) (L) Chemical Thermo-con ACK CR Host SOH UT STX 47H Setting data ETX Check sum CR 103 102 101 100 (H) (L) Chemical Thermo-con ACK UT CR Note) The setting range is from -100 to 0%.

Clean Room Rodless Cylinder Series CYP ø15, ø32

L1 M2 = m g (L1 + B) 103 2. Static moment m x g = 1 9.8 (50 + 48) 103 Review M2. Since M1 & M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103 m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We (L2 + A) 103 3.

Peltier-type Chiller Thermo-con/ Compact Type

Cooling capacity = Considering a safety factor of 20%, 93.3 W x 1.2 = 112 W Circulating Fluid Typical Physical Property Values Ethylene Glycol Solution 20% Temperature [C] Density [kg/m3] Specific heat C [J/(kgK)] 10 1.03 x 103 3.93 x 103 20 1.03 x 103 3.95 x 103 30 1.02 x 103 3.97 x 103 40 1.02 x 103 3.98 x 103 50 1.01 x 103 4.00 x 103 60 1.01 x 103 4.02 x 103 Water Density : 1 x 10 3

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

L1 M2 = m g (L1 + B) 103 2. Static moment m x g = 1 9.8 (50 + 48) 103 Review M2. Since M1 & M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103 m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We (L2 + A) 103 3.