XLA- ∗ -F7NJ ∗ - ∗ Series

temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN

XL-OMV0002

XLC-16 XLC-25 XLC-40 XLC-50-1 XLC-63-1 XLC-80-1 XLC-100-1 XLC-160-1 16 25 40 50 63 80 100 160 560(5150) -5 Pa (abs) 110 l/s 1 5 14 45 80 160 200 300 800 10 (FKM) 1.310 Pam 3/S -11 (FKM) 1.310 KF(NW) KF(NW)K(DN) SUS316LSUS304FKM() 2 MPa (G) 0.30.6 0.40.6 cm 3 3 0.5MPa 38 91 430 280 500 1000 2300 3700 M5 Rc 1/8 Rc1/4 kg 0.28 0.46 1.1 1.4 2.3 4.0 8.7 14.5 1) 2) Y-VAC2 3) 1 7 XL-OMV0002

XL-OMY0002

48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 13 XL-OMY0002 8 X L D 25 M9N A A ( X A N1 A ) 25 40 B A 50 63 80 C P11 160 100 FKM() P8 KF (NW) D K (DN

Low torque Metal seal type Rotary joint

Printed in Japan. 1st printing June, 2002 D-MITAKA P-80 (DN) This catalog is printed on recycled paper with concern for the global environment.

Size: 6 (60), Valve Type: 1 (Normally Closed), Body Material: C (Brass), Seal Material: N (NBR), Port Size: 10 (Thread; 1), Thread Type: F (G), Rated Voltage: 5 (24 VDC), Electrical Entry: DN (without DIN Connector, w/Surge Voltage Suppressor)

Size: 1 (Series 10), Valve Operation Type: 1 (Normally Closed), Valve Type: Nil (Standard), Body Material: C (Brass), Seal Material: N (NBR), Orifice Diameter/Port Size: 201 (Orifice Diameter: ø2.4mm; Port Size: 1/8), Thread Type: F (G), Rated Voltage: 5 (24 VDC), Electrical Entry: DN (without DIN Connector, w/Surge Voltage Suppressor)

Stations: 8 Stations, Port Size: N3 (5/32" One-touch Fitting), SI Unit: ZENN (EtherNet/IP, -COM), Number of Input Blocks: 3 (Input Block 3 pcs.), Input Block: 3 [M8, 4 Inputs (3 Pins)], Input Block COM: PNP(+) or w/o SI/Input Block, Option 1: DN (DIN Rail Mount & Name Plate), Option 2: S (Built-in Silencer, Direct Exhaust)

Stations: 7 Stations, Port Size: N3 (5/32" One-touch Fitting), SI Unit: ZENN (EtherNet/IP, -COM), Number of Input Blocks: 4 (Input Block 4 pcs.), Input Block: 3 [M8, 4 Inputs (3 Pins)], Input Block COM: PNP(+) or w/o SI/Input Block, Option 1: DN (DIN Rail Mount & Name Plate), Option 2: S (Built-in Silencer, Direct Exhaust)

Size: 9 (90), Valve Type: 1 (Normally Closed), Body Material: B (Bronze), Seal Material: F (FKM), Port Size: 20 (Thread; 2), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: DN (without DIN Connector, w/Surge Voltage Suppressor)

Model Type: Standard, Piping: F (Direct Piping Type), Tank Size: None, Port Size: 14 [1 1/2 (40A)], Thread Type: N (NPT), OUT Port Piping: None, Rated Voltage: 3 [120 VAC, (110 VAC)], Electrical Entry: DN (DIN Terminal w/o Connector, w/Surge Voltage Suppressor, All Voltages), Fluid and Ambient Temp.: B (-40 to 60°C), Silencer: S (Silencer)

Stations: 6 Stations, Port Size: N3 (5/32" One-touch Fitting), SI Unit: ZENN (EtherNet/IP, -COM), Number of Input Blocks: 4 (Input Block 4 pcs.), Input Block: 3 [M8, 4 Inputs (3 Pins)], Input Block COM: PNP(+) or w/o SI/Input Block, Option 1: DN (DIN Rail Mount & Name Plate), Option 2: S (Built-in Silencer, Direct Exhaust)

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 80, Flange Type: D [K(DN)]

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 100, Flange Type: D [K(DN)]

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 160, Flange Type: D [K(DN)]

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 63, Flange Type: D [K(DN)], Port Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface)

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 100, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: H0 (5 to 150°C, No Heater)

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 80, Flange Type: D [K(DN)], Port Direction: K (w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface), Temperature: 5 to 60°C, Auto Switch: M9P--Solid State, Gen.

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 63, Flange Type: D [K(DN)], Port Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Temperature: 5 to 60°C, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed)

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 63, Flange Type: D [K(DN)], Port Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Temperature: 5 to 60°C, Auto Switch: M9B--Solid State, Gen.

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 63, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed)