! Contact our sales office for delivery dates and prices as this is a special model. SP133X-010E P: RU P.G.Information (Specialized Product) SMC CORPORATION Pilot Operated Check Valve 4-14-1,SOTO-KANDA, CHIYODA

Metric size Inch size Body size Port size 3 1/8 standard 06 6 07 1/4 Symbol Cylinder side 4 1/4 standard 08 8 09 5/16 01 R1/8 5 3/8 standard 10 10 11 3/8 02 R1/4 6 1/2 standard 12 12 13 1/2 03 R3/8 04 R1/2 N01 NPT1/8 N02 NPT1/4 N03 NPT3/8 N04 NPT1/2 XTO Series Applicable tubing O.D.

Pilot Operated Regulator AR425 to 935 Series

How to Order Internal pilot operated relieving type regulator AR 25 4 BG 02 Semi-standard Nil Flow direction: Right to left None (Standard) Regulator R Body size Port size Accessory 4 6 8 9 1 2 1 Symbol 1 Description Applicable model 02 03 04 06 10 12 14 20 1 4 Nil 2 1 8 3 B With bracket AR4 5 to 6 5 AR 25 AR 35 2 1 2 3 4 Gauge G46-10-02 G46-2-02 G Regulating pressure range 1 G46-P10-02-X30

-fl Seies

: Sta. l) NVFR2l 10-3G Sta. 2-6) NVFR221O-3G NW5FR2-10-06M-027 Mix: sta. 1) 1/4 side sta. 2-6) 1/8 bottom See Note 2) Four Station Manilold Ass'y as follows: sta. 1) NVF?

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

: Sta. l) NVFR2l 10-3G Sta. 2-6) NVFR221O-3G NW5FR2-10-06M-027 Mix: sta. 1) 1/4 side sta. 2-6) 1/8 bottom See Note 2) Four Station Manilold Ass'y as follows: sta. 1) NVF?

VXD21/22/23

LVA LVH Connection 1 4 3 8 1 2 3 4 02 03 04 06 10 LVD Thread type Nil T F N Refer to the table (2) given below for availability. Rc NPTF G NPT Thread LVQ Refer to page 17-3-16 for ordering coil only. 1 LQ 32 40 50 For 32A For 40A For 50A Flange LVN Refer to the table (1) given below for availability.

AR20-B to AR60-B

Example) AR30-03BG-NR-B-X425 Symbol Description Nq Body size 25 30 40 50 60 Symbol Description Nq Body size 20 25 30 40 50 60 Nw Pipe thread type Nil Rc N NPT F G + Nw Pipe thread type Nil Rc N NPT F G + 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size Nil Without mounting option B*2 With bracket a Mounting Option *1 H With set nut (for

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

VXP21/22/23

LVH Connection LVD 02 03 04 06 10 12 14 20 1 4 Thread type Nil T F N Refer to the table (2) given below for availability. 3 8 1 2 3 4 Rc NPTF G NPT Thread LVQ Refer to page 17-3-16 for ordering coil only. 1 1 1 2 LQ 1 4 1 2 LVN 32 40 50 For 32A For 40A For 50A Flange TI/ TIL PA Refer to the table (1) given below for availability.

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Metric size Inch size 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 06 08 10 12 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Type Port size 3 Universal Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2

q"s

0.1 o -1 2 4 6 a 1 0 0.0 0 25 50 75 lnputsignal (%F.S.) 1 . 0 1 0 25 50 75 Inputsignal (%F.S.) 500 1000 1500 Flow rale (l/min (ANR)) :':i ::l Relief flow characterjslics supp y pressure: 0.7 Mpa Flow characteristics suppty pressure: 0.7 Moa Pressufe chafaCtgristics set oressue: 0 2 MHa 0.8 0-7 t'. I { 0 s l I l 6 l ; D.0 t' 6 l 0.6 0.5 o.4 0.3 6 ' ) !

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

M L2 Pressure range Piping specification Symbol Description ISE70G 0 to 1 MPa ISE75G 0 to 2 MPa ISE76G 0 to 5 MPa ISE77G 0 to 10 MPa Symbol Description 02 Rc1/4 N02 NPT1/4 F02 G1/4*1 Option 3 Symbol Description Nil Operation manual Y None *1 ISO 1179-1 compliant Orifice K Operation manual + Calibration certificate Symbol Description Nil None T Yes*1 T Calibration certificate *1 Orifice

AMR3000 to 6000

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the

AMR3000 to 6000

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the

CEx-OML0058

Chapter 6: Piping 6-1 Example of Recommended Pneumatic Horizontal mounting Vertical flat mounting Vertical overhead mounting 19 Recommended pneumatic components Bore Directional valve Brake valve Regulator Piping Silencer Speed controller 40 VFS240R VFS210 AR425 Nylon 8/6 AN200-02 AS4000-02 50 VFS240R VFS210 AR425 Nylon 10/7.5 AN200-02 AS4000-02 63 VFS340R VFS210 AR425 Nylon 12/9 AN300

Quick Exhaust Valve Series AQ 1

4 9.3 5 4 9.3 AQ240F-06-00 AQ240F-06-06 13.7 13.7 15.4 6.2 13.7 26.7 40.7 8 10.0 14.7 6 11.6 6 6 11.6 6.2 40.7 AQ340F-06-00 AQ340F-06-06 13.7 19.5 13.7 13.7 6.3 44.8 31.7 13 19.6 11.8 6 11.6 11 6 11.6 6.3 44.8 AQ240F-07-00 AQ240F-07-07 13.7 13.7 15.4 6.2 13.7 27.3 40.7 8 10.0 15.1 6.2 1/4" 12 6 1/4" 12 40.7 AQ340F-07-00 AQ340F-07-07 16.8 20.3 13.7 16.8 7.1 52.2 33.1 20.0 13 11.8 1/4" 13.2

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

Note 3) Note 1) and Note 2) are with controlled clean air. How to Order VS31 3 02 1 5 Thread type Caution Nil Rc N NPT Standard 3 Body size For Safety Instructions and Solenoid Valve Precautions, refer to pages 4-18-2 to 4-18-6.

CE2

1 !2 !3 !4 !5 !6 !7 !8 !

33

Model Description Material Qty Note q Body PP 1 w EJ202S-005X11 Element PP/PE 1 EJ202S-075X11 e Particle filter bracket SGCC 1 r Nipple Stainless steel 1 Conversion from R to NPT t Extension piece Stainless steel 1 Conversion from NPT to Rc y Tapping screw 4 u Handle 1 When -H is selected i Sealant tape PTFE 1 206 HRSE Series Cooling Capacity Calculation Required Cooling Capacity

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported

CEx-OMQ0010

CE1-R20m CE1-H0374 CE1-R 20m CE1-H0374 CE1-H0374-1 CE1-H0374-2 CE1-H0374 CE1-H0374 CE1-H0374-1 CE1-H0374-2 20.5m 20.5m U 25mm *400 1 100 / 5-4 (1)CEU1CEU2CEU5 CE1-R**, 17 (2) (3)SFC-10 (4) (5)TDK ZGB2203-01U (6)CEU1CEU2CEU5 (7)CEU1(P)-D EMC (2004/108/EC) 6-1 18 40 VFS240R VFS210 AR425 8/6 AN200-02 AS4000-02 50 VFS240R VFS210 AR425 10/7.5 AN200-02 AS4000-02 63 VFS340R VFS210