Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

137 8-16-13 13 Series CY1F Theoretical Output Weight Unit: kg Unit: N Piston area (mm2) Operating pressure [MPa] Standard adjustment bolt weight Weight of adjustment bolt for 25 mm adjustment Basic weight Model Bore size (mm) Additional weight per each 50 mm of stroke 0.2 0.3 0.4 0.5 0.6 0.7 CY1F10 78 23 31 39 46 54 0.520 0.095 0.004 0.012 10 15 CY1F15 176 0.815 0.133 0.004 0.012 15 35 52

Low Profile Guide Type

13 17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5 55 100,150,200,250,300,350,400,450,500,550,600 CYP Model KC KA KB KH KW L LA LL LW LZ ML MM N PA PB PC Q QA QB QW CY1F10 6.5 44 8 19 59 38 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 33 CY1F15 6.5 51 10 19 66 53 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 40 CY1F25 7.5 66 13 27 84.5 70 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 52

60

position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70 75 90 37.5 49 63 63 76 14 19 22 22 26 46.6 52

Process Valve

Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U VNB2-10A VNB2-15A VNB3-20A VNB4-25A 3 8 1 2 3 4 1 144.5 55 125.5 52 26 4.5 24.3 2.3 25 34 63 42 28 14 72.5 80.5 75 80 84.5 124 60.5 73 135.5 151.5 137 153 156 172 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 80 90 50 60 35 44 17.5 22 84 100 92 108 84 90 89 95 93.5 99.5 Port size: 10A, 15A, 20A, 25A Vacuum pilot K L N

Coolant Valve

Threaded Type/Port size: 10A, 15A, 20A, 25A K L Pg9 N P Applicable cable O.D. 6 to 8 F (Air operated) J (External pilot solenoid) Pilot port 12(P1) 2 x (Back side 10(P2)) 4 x M 8 1 Light/surge voltage suppressor (For DZ) Manual override (Non-locking push type) P1 D S Q E Bracket 15 H A R B C Main port 1(A) [Back side 2(B)] Port size: refer to table below A 63 63 80 90 B 42 42 50 60 K L 52

3 Port Air Operated Valve

35 43 NC 12 3R 1P NC 1/8 12(PA) port 12 6.7 18.5 65.2 60 59 24 X 12 M5 x 0.8 (Breathing hole) 19.5 39 1/8, 1/4 1(P) port 1566 VPA300/500/700 Series Air Operated Valve Base Mounted/Single Unit VPA500 Series/Base Mounted/Dimensions Standard/VPA544-102 03 A B 1/4, 3/8 2(A) port 13.5 28.5 SYA SYJA VZA 51 2 x 5.2 (For mounting) VFA 1/4, 3/8 3(R) port 47 17.6 23 1/8 12(PA) port NO 2A VFRA 42 52

3 Port Air Operated Valve VPA3145/3165/3185 Series

55 93 32 87.4 36 71 80 3 4 VPA3165 82.6 1 4 8.5 1 110 17 68 75 118 45 113 36 71 95 1 1 4 1 1 1 1 4 1 2 VPA3185 118 13 2 132 14 80 95 140 52 140 41 81 105 2 1575

WRF100

Dimensions WRF100-T200/T240/T270 WRF-T/T-type clamp arms (Without cover) 2 x M12 x 1.75 depth 24 4 x M8 x 1.25 depth 12 15 60 108 15 80 600.05 +0.015 0 2 x 8H7( ) depth 12 (2 x 4 x M5 x 0.8 through) For limit switch mounting C B A0.5 55 55 1000.3 Switch mounting bracket Note 2) 12 70 12 Fulcrum 13 40 15 10 F 2 x 4 x M10 x 1.5 depth 12 107 Note 3) 70 2 x 2 x 8H7 +0.015 0 ( ) depth 12 60 1 52

XLAQ/XLDQ

side exhaust Refer to page 478 for the maintenance parts. 470 XLAQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Auto switch (Option) B J XLA XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12 11 11 E 30 40 55 75 F 17 26 41 52

Air Suction Filter With One-touch Fittings ZFB Series

2 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 65 54 53 27.2 24.2 24 19.7 17.7 17.5 " " 15.2 18.5 21.7 14.4 15.5 50 15 12.5 22.5 26 48 12.8 8.5 52 57 64.5 28 30 34 9.5 11 13.5 24.5 27 30.5 13.5 14.5 16.5 16 17 21.5 61 65 81 17.5 21.5 25.6 16.6 18 23 70 87.5 30.2 34 21.7 24 280

Vacuum Pad: Ball Joint Type

flats 3 E D C 3 2 A B Stroke: 20 to 50 mm Dimensions: 10 mm Stroke A (mm) B C D E F H I J Model ZPR20F10-0-A14 20 22 12.5 15.5 29.3 58.5 46.5 126.5 ZPR25F10-0-A14 25 28 50 ZPR32F10-0-A14 13 16 29.8 59 47 32 35 127 Additional Dimensions by Stroke (mm) (mm) Q: 6 Q: 8 Model H I J R S R S Stroke ZPR20F10-0-A14 20 +10 3 0 ZPR25F10-0-A14 30 +20 +7 12.8 24.3 15.2 26.2 ZPR32F10-0-A14 50 +40 +25 +52

MY2

1.8 x 1.1 MY2C25G MY2H25-16AStroke MY2H25-16BStroke MYH25-15AR4901 GMY25 RCS-8 TMY-25 P-5 4 x 1.8 x 1.1 MY2C40G MY2H40-16AStroke MY2H40-16BStroke MYH40-15AR4902 GMY40 RCS-12 TMY-40 C-9 7.15 x 3.75 x 1.7 Description Seal belt Dust seal band Scraper Piston seal Cushion seal Tube gasket O-ring O-ring Material Special resin Stainless steel Special resin NBR NBR NBR NBR NBR No. 14 15 22 50 51 52

NCQ8

(For detailed information about the contact protection box, please refer to page 50.) 0.39(10) Most sensitive position 52 Solid State Switch Direct Mounting Style D-M9N(V)/D-M9P(V)/D-M9B(V) For details about certified products conforming to international standards, visit us at www.smcworld.com.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Minimum rotation without energy absorption capacity decrease 52 43 40 60 71 62 82 Speed controller AS121F/Elbow type AS131F/Universal type One-touch fittings One-touch miniature fittings Series K J Miniature fittings Series M3 4. Products with shock absorber are not designed to smooth stop but to absorb the kinetic energy of the load.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

PD PC Supply port 2-P FF FE EB EA D FC FA GA FG FB FD GD HA, HB GC GB C B A 87 117 105 135 165 125 155 185 215 270 250 310 Model MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 59 79 72 92 112 86.5 106.5 126.5 144 184 165 205 28 38 33 43 53 38.5 48.5 58.5 71 91 85 105 6 (Effective depth 2.5) 19 20 30 28 38 48 32 42 52 55 75 64 84 16

MVGQ

x 0.8 M5 x 0.8 Series SYJ3000 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 20 30 M5 x 0.8 M5 x 0.8 M5 x 0.8 10 36 64 17 26 74 47 30 72 2 4 46 52 18 8 13 37 10 60 19 13 MVGQ Note 1) It is possible to manufacture the intermediate strokes other than the standard strokes by means of installing a spacer.

RB/RBL/RBQ

Basic type Series RBQC With bumper RHC MK(2) (mm) RS Q G Model Basic type With bumper Shock absorber h Hexagon nut G LL S B E 6 10 12 16 18 D M16 x 1.5 M20 x 1.5 M25 x 1.5 M30 x 1.5 M32 x 1.5 H 3.5 4 4 5 5 F C 22 27 32 41 41 MM K 4 7 8 8.5 13 RBQC1604 RBQC2007 RBQC2508 RBQC3009 RBQC3213 RBQ1604 RBQ2007 RBQ2508 RBQ3009 RBQ3213 14.2 18.2 23.2 28.2 30.2 14 18 23 28 30 7 9 10 12 13 31 44.5 52

CJP

20 17 6 13 5 20 15 6.5 12 8 M12 x 1.0 10 0 0.5 22 +0.065 0 6 M5 x 0.8 8 9 24 18.5 6 15.5 6 24.5 20 8 14 10 M14 x 1.0 12 Symbol Z S 5 st 10 st 15 st 20 st 30 st ZZ Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st 20 st 30 st 6 10 15 62.5 63.5 52.5 67.5 57.5 45.5 58.5 50.5 40.5 35.5 53.5 48.5 70.5 69 60.5 85.5 75.5 65.5 50.5 79 65.5 64 55.5 45.5 40.5 59 54 76 73 66 91 81 71 52

CXS

K L N NN Q R U 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-Rc 1/8 thread depth 5 SS T Bore size (mm) 2 x 2-4.3 through 2 x 2-8 counterbore with depth 4.3 2 x 2-5.5 through 2 x 2-9.5 counterbore with depth 5.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2-M4 x 0.7 with depth 6 15 54 19 70 52

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

52 72 63 80 100 50 54 47 38 42 35 128 128 148 28 28 48 110 140 166 142 180 210 28 25.5 32.5 88 92 85 (mm) Bore size (mm) X XA XB XC XL YY YL Z 24 28 11 63 80 100 8 10 10 6 7 7 5 6 6 80 100 124 4 5 5 20 24 28 M10 X 1.5 M12 X 1.75 M14 X 2.0 (mm) MGTM (Slide bearing) MGTL (Ball bushing bearing) (mm) AA A E DB Bore size (mm) Bore size (mm) AA E BD 75st, 100st Larger than 100st 37 57 63.5 64