XLAQ/XLDQ

side exhaust Refer to page 478 for the maintenance parts. 470 XLAQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Auto switch (Option) B J XLA XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12 11 11 E 30 40 55 75 F 17 26 41 52

Air Suction Filter With One-touch Fittings ZFB Series

2 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 65 54 53 27.2 24.2 24 19.7 17.7 17.5 " " 15.2 18.5 21.7 14.4 15.5 50 15 12.5 22.5 26 48 12.8 8.5 52 57 64.5 28 30 34 9.5 11 13.5 24.5 27 30.5 13.5 14.5 16.5 16 17 21.5 61 65 81 17.5 21.5 25.6 16.6 18 23 70 87.5 30.2 34 21.7 24 280

Vacuum Pad: Ball Joint Type

flats 3 E D C 3 2 A B Stroke: 20 to 50 mm Dimensions: 10 mm Stroke A (mm) B C D E F H I J Model ZPR20F10-0-A14 20 22 12.5 15.5 29.3 58.5 46.5 126.5 ZPR25F10-0-A14 25 28 50 ZPR32F10-0-A14 13 16 29.8 59 47 32 35 127 Additional Dimensions by Stroke (mm) (mm) Q: 6 Q: 8 Model H I J R S R S Stroke ZPR20F10-0-A14 20 +10 3 0 ZPR25F10-0-A14 30 +20 +7 12.8 24.3 15.2 26.2 ZPR32F10-0-A14 50 +40 +25 +52

MY2

1.8 x 1.1 MY2C25G MY2H25-16AStroke MY2H25-16BStroke MYH25-15AR4901 GMY25 RCS-8 TMY-25 P-5 4 x 1.8 x 1.1 MY2C40G MY2H40-16AStroke MY2H40-16BStroke MYH40-15AR4902 GMY40 RCS-12 TMY-40 C-9 7.15 x 3.75 x 1.7 Description Seal belt Dust seal band Scraper Piston seal Cushion seal Tube gasket O-ring O-ring Material Special resin Stainless steel Special resin NBR NBR NBR NBR NBR No. 14 15 22 50 51 52

NCQ8

(For detailed information about the contact protection box, please refer to page 50.) 0.39(10) Most sensitive position 52 Solid State Switch Direct Mounting Style D-M9N(V)/D-M9P(V)/D-M9B(V) For details about certified products conforming to international standards, visit us at www.smcworld.com.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Minimum rotation without energy absorption capacity decrease 52 43 40 60 71 62 82 Speed controller AS121F/Elbow type AS131F/Universal type One-touch fittings One-touch miniature fittings Series K J Miniature fittings Series M3 4. Products with shock absorber are not designed to smooth stop but to absorb the kinetic energy of the load.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

PD PC Supply port 2-P FF FE EB EA D FC FA GA FG FB FD GD HA, HB GC GB C B A 87 117 105 135 165 125 155 185 215 270 250 310 Model MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 59 79 72 92 112 86.5 106.5 126.5 144 184 165 205 28 38 33 43 53 38.5 48.5 58.5 71 91 85 105 6 (Effective depth 2.5) 19 20 30 28 38 48 32 42 52 55 75 64 84 16

MVGQ

x 0.8 M5 x 0.8 Series SYJ3000 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 20 30 M5 x 0.8 M5 x 0.8 M5 x 0.8 10 36 64 17 26 74 47 30 72 2 4 46 52 18 8 13 37 10 60 19 13 MVGQ Note 1) It is possible to manufacture the intermediate strokes other than the standard strokes by means of installing a spacer.

RB/RBL/RBQ

Basic type Series RBQC With bumper RHC MK(2) (mm) RS Q G Model Basic type With bumper Shock absorber h Hexagon nut G LL S B E 6 10 12 16 18 D M16 x 1.5 M20 x 1.5 M25 x 1.5 M30 x 1.5 M32 x 1.5 H 3.5 4 4 5 5 F C 22 27 32 41 41 MM K 4 7 8 8.5 13 RBQC1604 RBQC2007 RBQC2508 RBQC3009 RBQC3213 RBQ1604 RBQ2007 RBQ2508 RBQ3009 RBQ3213 14.2 18.2 23.2 28.2 30.2 14 18 23 28 30 7 9 10 12 13 31 44.5 52

CJP

20 17 6 13 5 20 15 6.5 12 8 M12 x 1.0 10 0 0.5 22 +0.065 0 6 M5 x 0.8 8 9 24 18.5 6 15.5 6 24.5 20 8 14 10 M14 x 1.0 12 Symbol Z S 5 st 10 st 15 st 20 st 30 st ZZ Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st 20 st 30 st 6 10 15 62.5 63.5 52.5 67.5 57.5 45.5 58.5 50.5 40.5 35.5 53.5 48.5 70.5 69 60.5 85.5 75.5 65.5 50.5 79 65.5 64 55.5 45.5 40.5 59 54 76 73 66 91 81 71 52

CXS

K L N NN Q R U 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-Rc 1/8 thread depth 5 SS T Bore size (mm) 2 x 2-4.3 through 2 x 2-8 counterbore with depth 4.3 2 x 2-5.5 through 2 x 2-9.5 counterbore with depth 5.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2-M4 x 0.7 with depth 6 15 54 19 70 52

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

52 72 63 80 100 50 54 47 38 42 35 128 128 148 28 28 48 110 140 166 142 180 210 28 25.5 32.5 88 92 85 (mm) Bore size (mm) X XA XB XC XL YY YL Z 24 28 11 63 80 100 8 10 10 6 7 7 5 6 6 80 100 124 4 5 5 20 24 28 M10 X 1.5 M12 X 1.75 M14 X 2.0 (mm) MGTM (Slide bearing) MGTL (Ball bushing bearing) (mm) AA A E DB Bore size (mm) Bore size (mm) AA E BD 75st, 100st Larger than 100st 37 57 63.5 64

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

137 8-16-13 13 Series CY1F Theoretical Output Weight Unit: kg Unit: N Piston area (mm2) Operating pressure [MPa] Standard adjustment bolt weight Weight of adjustment bolt for 25 mm adjustment Basic weight Model Bore size (mm) Additional weight per each 50 mm of stroke 0.2 0.3 0.4 0.5 0.6 0.7 CY1F10 78 23 31 39 46 54 0.520 0.095 0.004 0.012 10 15 CY1F15 176 0.815 0.133 0.004 0.012 15 35 52

MXF

For details about auto switches with pre-wire connector, refer to page 8-30-52. 8-6-2 3 Low Profile Slide Table Series MXF Specifications Bore size (mm) 8 12 16 20 Piping port size M3 x 0.5 M5 x 0.8 Air Fluid Double acting Action 0.15 to 0.7 MPa Operating pressure 1.05 MPa Proof pressure 10 to 60C Ambient and fluid temperature MX 50 to 500 mm/s Piston speed Rubber bumper on both sides Cushion

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

For details about auto switches with pre-wire connector, refer to page 8-30-52.

10-cns-e

.: GR-S-010 (10 g), GR-S-020 (20 g) Piston seal NBR 47, 50 to 52, 55 and 56 are non-replaceable parts, so they are not included in the seal kit.

10-my1c-e

Seal Kit List (15, 16, 34 and 52 are not included in the seal kit. Order them as required with by individual part numbers.) Description Qty. No.

Refrigerated Air Dryers

LS Added: Refrigerated Air Dryers IDU55E/75E Deleted: Refrigerated Air Dryers IDU55C/75C Number of pages has been increased from 44 to 52. MR The Quick Reference Guide to Air Preparation Equipment has been changed. Number of pages has been decreased from 52 to 48.

Booster Relay Series IL100

OUT SIG IN OUT SIG 3 x Rc1/4 60 IL211 14.5 Panel fitting dimension 58 45 Panel 35 Max. 4 2 x 6.6 2 52 10 137 62 31 21 5 SIG OUT IN1 OUT1 SIG 2 IN2 OUT2 OUT 5 x Rc1/4 60 IL220 14.5 Panel fitting dimension 2 x 6.6 45 58 Panel 35 Max. 4 2 18 57 10 130 2 OUT IN1 SIG 30 15 4 x Rc1/4 IN2 60 58

Lock-Up Valve IL201/211/220 Series

OUT SIG IN OUT SIG 3 x Rc1/4 60 IL211 Panel fitting dimension 14.5 IP 58 45 Panel 35 Max. 4 IW 2 x 6.6 2 52 10 1301 AW 137 62 31 21 5 IL1 SIG OUT IN1 OUT1 SIG 2 IL2 IL2 IN2 OUT2 IT OUT 5 x Rc1/4 CP 60 IS IL220 VFN 14.5 INT Panel fitting dimension 2 x 6.6 45 58 Panel 35 Max. 4 2 18 57 10 130 2 OUT IN1 SIG 30 15 4 x Rc1/4 IN2 60 173