0.01

(Nil) IN side connection symbol OUT side connection symbol IN side connection symbol Connection size OUT side connection symbol Connection size C04 C06 C08 C10 C12 02 N02 F02 C04 C06 C08 C10 C12 02 N02 F02 4 6 8 10 12 4 6 8 10 12 Clean One-touch fittings (KP series) Clean One-touch fittings (KP series) Specifications The specifications are the same as the standard models.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

ANR)] Air consumption [L/min(ANR)] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure 80 Suction flow 60 40 20 Air consumption 0 0 10 20 40 50 60 30 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-12 ZHP-12 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 100 90 80 70 60 50 40 30 20 10 0 Suction flow [L/min(ANR)] Air consumption [L/min

PF2D

12 16 14 18 20 0 5 10 15 20 25 30 40 35 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) Construction PF2D504/520 Component Parts Material No.

VN-OMP0002

12 12 12(P1) (P1) (P1) (P1) 10(P2) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) 15A 211 420-04 1/2 B(12.7) 20A 311 500-06 3/4 B(19.1) 25A 411 600-10 1 B(25.4) 2 32A 511 800-12 1 1/4 B(31.8) VNA01 VNA02 VNA03 VNA1 40A 611 900-14 1 1/2 B(38.1) (P1) () 12 50A 711 900-20 2 B(50.8) (P2) () 10 (),12(P1) 10(P2) EXH , 6 VN-OMP0002 1 2 3 () 4 P2 5 6 7 8 9 10 11 O O 12 13 14 7 VN-OMP0002 No.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

15 20 25 30 40 35 0 2 4 6 8 10 12 16 14 18 20 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) Construction PF2D504/520 Parts list Material Number Parts o !

VCB

Valve model Port size L J H G F E D C A B VCW20-12-01A VCB2 1/8, 1/4 13 6 4.5 5 12.8 12.8 30 25 40 34 VCW30-12-02A 1/4, 3/8 19 7 5.5 6 19 19 40 30 52 42 VCB3 VCW30-12-04A 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-02A 1/4, 3/8 19 7 5.5 6 23 23 40 30 52 42 VCW30-12-04A VCB4 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-06A 3/4 26 7 5.5 6 28.2 28.2 53 44 65 56 Two mounting screws (for mounting

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

Angle Seat Valve /

/N.O. 1/4 to 50A 10 to 12 N.C.

High Purity Fluoropolymer Needle Valve Series LVN 1

Symbol 2 3 4 Metric sizes 04 06 08 10 12 4 6 8 10 12 Inch sizes 03 05 07 11 13 1/8 3/16 1/4 3/8 1/2 Different diameter tubing order example Basic size With reducer Note) Applicable fitting: LQ2 Different diameter tubing (with plug-in reducer) can be selected within the same body class. (Example) Body class 3 A side: 10 x 8 B side: 8 x 6 Order as shown below.

VCS

Valve model Port size VCS21 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04A Note 1) 1/2 VCS41 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 mounting screws (for mounting bracket

NCA1

2 3 Series NCA1 Cylinder Large Bore Minimum operating pressure 8 psi (0.06 Mpa) Maximum operating pressure 250 psi (1.75 Mpa) 4 19 18 1 23 17 10 9 12 11 13 8 22 5 21 7 16 20 2 3 4 14 6 15 Note Component Material Qty.

Speed Controller with One-touch Fittings Series AS In-line Type 1

Metric size Inch size P . 15-11-3 3.2 With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Use 1/8" tube. 23 04 06 08 10 12 01 03 05 07 09 11 13 4 6 8 10 12 Flow Direction Symbols on Body JIS Symbol Symbol 15-9-10

Mechanical Valves Series NVM, NVFM, NVZNI

35 lbs (5.6 ks ) P T 0,138 in (3 5mm) O T 0 079 in (2mm) T T 0 216 in (5 Smm) '75 PSIG (5 Kg{/cm2) "75 PSIG (5 Kgt/cm2) A B c D E F G 4.25 (1 08) 2.20 (56) 1 . 3 2 :33.5 0.91 (231 0.24 (6) 0.81 'DN E 0.39 {10) A B c D E F G 4.O7 10s.5 2.03 t51 .5) 1.32 133-51 0.91 (231 0.47 (121 0.81 i20.5) 0.39 (10) Millimeters in Parentheses Millimeters in Parontheses NVM220-N02-08 230-N02-08 NVM220-N02

IIIIIII

35 lbs (5.6 ks ) P T 0,138 in (3 5mm) O T 0 079 in (2mm) T T 0 216 in (5 Smm) '75 PSIG (5 Kg{/cm2) "75 PSIG (5 Kgt/cm2) A B c D E F G 4.25 (1 08) 2.20 (56) 1 . 3 2 :33.5 0.91 (231 0.24 (6) 0.81 'DN E 0.39 {10) A B c D E F G 4.O7 10s.5 2.03 t51 .5) 1.32 133-51 0.91 (231 0.47 (121 0.81 i20.5) 0.39 (10) Millimeters in Parentheses Millimeters in Parontheses NVM220-N02-08 230-N02-08 NVM220-N02

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

Valve model Port size L J H G F E D C A B VCW20-12-01A VCB2 1/8, 1/4 13 6 4.5 5 12.8 12.8 30 25 40 34 VCW30-12-02A 1/4, 3/8 19 7 5.5 6 19 19 40 30 52 42 VCB3 VCW30-12-04A 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-02A 1/4, 3/8 19 7 5.5 6 23 23 40 30 42 52 VCW30-12-04A VCB4 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-06A 3/4 26 7 5.5 6 28.2 28.2 53 44 56 65 Two mounting screws (for mounting

Flame Resistant

For Flow Control Equipment Precautions, refer to Handling Precautions for SMC Products and the Operation Manual on the SMC website, http://www.smcworld.com Tubing O.D. 6, 8, 10 6 8, 10 8 10, 12 10 12 C values: Sonic conductance dm3/(sbar) Free flow 0.6 1.1 1.2 1.6 2.2 4.2 4.4 Controlled flow 0.7 1.1 1.3 2.2 2.6 4.4 4.8 Free flow 0.2 0.3 0.3 0.2 0.2 0.3 0.3 b values: Critical pressure ratio

VCB

Port size VCB2 VCW20-12-01A 34 40 25 30 12.8 12.8 5 4.5 6 13 1/8, 1/4 VCW30-12-02A 42 52 30 40 19 19 6 5.5 7 19 1/4, 3/8 VCB3 VCW30-12-04A Note 1) 48 56 36 44 23 23 6 5.5 7 23 1/2 VCW40-12-02A 42 52 30 40 23 23 6 5.5 7 19 1/4, 3/8 VCB4 VCW30-12-04A Note 1) 48 56 36 44 23 23 6 5.5 7 23 1/2 VCW40-12-06A 56 65 44 53 28.2 28.2 6 5.5 7 26 3/4 2 mounting screws (for mounting bracket) are included

D. P. Lube ALD600/900 Series

O-ring Seal Seal 6 7 8 9 10 11 12 Zinc die-casted, NBR 126115AP GA46-10-01 AF11-3 126140 11307 126115AP GA46-10-02 AF11-3 126060 11307 126046 126047 Maintenance Warning NBR NBR NBR NBR 1. Before removing the oil filler plug, loosen it two and a half turns to completely release the pressure inside the case.

Compact Manometer Series PPA 1

G PPA AL 14-12-3 4 Compact Manometer Series PPA PPA100/101/102 How to Order Unit specifications PPA10 0 M Pressure specifications Nil M Option/Case holder With the unit switching function(1) 0.1 to 1 MPa (For high pressure) 101 to 10 kPa (For vacuum) 10 to 100 kPa (For low pressure) 0 1 2 Fixed in SI unit (2) None With PPA-B Nil B Note 1) With unit switching function is not permitted to sell

Compact Manometer Series PPA 1

G PPA AL 14-12-3 4 Compact Manometer Series PPA PPA100/101/102 How to Order Unit specifications PPA10 0 M Pressure specifications Nil M Option/Case holder With the unit switching function(1) 0.1 to 1 MPa (For high pressure) 101 to 10 kPa (For vacuum) 10 to 100 kPa (For low pressure) 0 1 2 Fixed in SI unit (2) None With PPA-B Nil B Note 1) With unit switching function is not permitted to sell