Table of Contents

2.5 6.5 8.5 M5 x 0.8 Width across flats 7 15-2-57 5 Series M Series M5 Hose Elbow: M-5HL-4/-6 Weight (g) 4.4 5.2 Effective area (mm2) 1.4 2.4 Model F E D C B A M-5HL-4 M-5HL-6 6.5 8.5 1.8 2.5 7 8 8.5 9.5 12.5 13.5 16.5 17.5 M5 x 0.8 Hose Elbow: M-5HLH-4/-6 Width across flats 7 Weight (g) Effective area (mm2) 1.4 4.5 6.6 2.4 I H G F E D A B C Model 7 8 15 16 5.5 6 6.5 8.5 1.8 2.5 7 8 12 13.5

Table of Contents

Stroke + 126 3.3 24 1 5 3 5.8 8 3 21 59 F 5H9 +0.030 0 depth 5 T-slot dimensions (2/1) 29.5 5H9 +0.030 0 depth 5 6 T-slot 4-M5 x 0.8 (for body mounting) thread depth 8 (11.5) 38 E Refer to page 299 for mounting.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

CRQ2 Angle adjusting screw Angle adjusting screw Angle adjusting screw MSQ MRQ 0 A R R 9 n Dot ot gl e A e n at at v n io a o gl io io ct dj o e re u n n gr a st di dj ra ra in y g u g 20in n n e st di st g k g in re u e e g of dj ct a di of of io e re e n gl ct n g k A k io n e e n ra y y gr n gr io o o at o o ot v v R e e 9 9 0 0 The rotation range under the adjustment of an angle at 60

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Note) If it is pressurized from the port indicated with the arrow, the shaft rotates in the clockwise direction. 11-7-42 Angle adjusting screw Angle adjusting screw 0 A R R 9 n ot ot gl e e n at at v io a o io io ct dj o re u n n gr st di ra ra in y g g in n n e di st g k g re u e e of dj ct a of of io e e n gl n g k A k n e e ra y y gr n gr io o o at o o ot v v R e e 9 9 0 44 Series CRA1

1

(Standard body dimensions) DE E -X -XA17 -XA21 20DA Data MM MM 30 (Standard body dimensions) 30 (Standard body dimensions) T A A E E 6-17-13 12 Simple Specials: -XC14: Change of Trunnion Bracket Mounting Position These changes are dealt with Simple Specials System.

MG

0 r o @2 e !

MGP

Note 6) Dimension E' cannot be less than the standard dimension E.

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Air Cylinder

3 o e i !0 r !5 @0 !6 !4 @ A !7 !9 !8 @ B @ C Boss-cut Integrated clevis Spring extend t !2 u @1 y q !3 r !5 @0 !6 !0 i e o !4 !1 @ A !9 !8 @ B @ C !7 Boss-cut Integrated clevis Component Parts No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 4) M5 fittings for M5 thread are attached without being incorporated.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 4) M5 fittings for M5 thread are attached without being incorporated.

Vacuum System Peripherals:

e Valve Model SX340 is for internal pilot.

VM

VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB

MHF2

thread depth 12 Mounting thread 6 127.5 5 Finger closing port M5 x 0.8 50 142 2-M5 x 0.8 thread depth 5.5 122 26 10.6 Mounting thread E 20 20 24 33 E 0 -0.1 1.2 4-4.3 through (mounting hole) 27 37 1.2 37 M5 x 0.8 Finger opening port 4-7.5 +0.1 0 Close: 0 E-E Open: 641 8-M4 x 0.7 thread depth 4 106 Attachment mounting thread 4-M5 x 0.8 thread depth 5.5 Mounting thread 20 43 Groove for auto

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Except for M5 Actuation type 1 2 position single 2 2 position double A, B port size 3 3 position closed center Manual override Thread piping 4 3 position exhaust center Nil Non-locking push type D Push-turn locking slotted type Applicable series 5 3 position pressure center Symbol Port size E Push-turn locking lever type 10-SY5000 M5 M5 x 0.8 10-SY3000 01 1 8 10-SY7000 02 1 4 Coil type Light

smcmaintenancepartslist

2 r Pressure gauge r Outlet Pressure gauge e e Outlet y Fluid release Replacement Parts No. Description Part No.

LX

Stroke + 126 3.3 24 1 5 3 5.8 8 3 21 59 F 5H9 +0.030 0 depth 5 T-slot dimensions (2/1) 29.5 5H9 +0.030 0 depth 5 6 T-slot 4-M5 x 0.8 (for body mounting) thread depth 8 (11.5) 38 E Refer to page 299 for mounting.

o

r r tr t: t; :r:'r : Tspe 41 Manifold: Side Ported,/ NVV5J3-41'E!sE@-M5,B3T inch (mm) Grommet(G). (H) ' ?