VZ100/300/500 R A: 0.19 A P: 0.13 VP VG Grommet (G) Body Ported Base Mounted VZ300 VP S070 M5 x 0.8 0.66 2 3 (A R) VQ L plug connector (L) VKF (Standard) VQZ 100 VAC 50/60 Hz With surge voltage suppressor (G) (L) (M) (D) With light/ surge voltage suppressor (L) (M) (D) VZ500 200 VAC 50/60 Hz 24 VDC VZ VS 2.5 2 3 (A R) (Option) N. C. N. O.
(mm) L L Dd9 d l l d m t Used snap ring t m Used snap ring Part No.
C95 Center Trunnion Style: CA2T CP95 With rod boot NCM Z + l + 1/2 Stroke Z + 1/2 Stroke G G 2-P (Rc, NPT, G) Width across flats KA 4-J 2-cushion valve MM NCA TDe8 DD E e TY -X B1 20H1 B C AL l 9 f K A N F TT N h + l Data TX TZ S + Stroke H ZZ + l + Stroke ZZ + Stroke Stroke range (mm) A Bore size (mm) B B1 C AL D E F G H1 J K KA MM N P Without rod boot With rod boot 40 up to 500 20 to 500
+ + 38.7 25.5 A A 19.2 9.4 21 (Pitch) P=17 21 1/8 (A port) 19.2 9.4 A A 18.5 (Pitch) P=16 21 M5 x 0.8 (A port) L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (WO) 49 49 49 49 P R P R P R P R 57.2 [59.4] 67 [69.2] 52.2 58.7 66.1 76.1 Max. 10 77 Pg7 65.2 [72.2] Approx. 300 (Lead wire length) 41.1 M8 x 1 58.6 68.1 Approx. 300 (Lead wire length) 38.7 79.4 54.1 [61.1]
ARBF2000-00-P JIS Symbol Inlet pressure 0.7 MPa Outlet pressure (MPa) P port regulation A port regulation B port regulation Flow rate (l/min (ANR)) ARBF3050-00-A ARBF3050-00-P Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa Outlet pressure (MPa) Outlet pressure (MPa) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) ARBF4050-00-A ARBF4050-00-P Pilot Valve Assembly: SF4-Inlet pressure 0.7 MPa
XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust
XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust
00-A-5 0 0 200 400 600 800 1000 1200 1400 VQ45 (Plug lead type) B ARBQ4000-00-B-5 Flow rate (l/min(ANR)) P ARBQ4000-00-P-5 ARBQ4000-00-P (P B) 0.7 Outlet pressure (MPa) 0.6 SMC 0.5 0.4 0.3 0.2 50 147 0.1 0 0 200 400 600 800 1000 1200 1400 B 2 SMC Flow rate (l/min(ANR)) 12 1 P 5 3 R2 R1 Pressure Characteristics 59 PE 4 A Conditions Inlet pressure: 0.7 MPa Outlet pressure: 0.2 MPa Flow rate
If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.
0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3140-L-M5 M8 connector (W0): SYJ3140-W0-M5 M plug connector (M): SYJ3140-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to the page
Manual override (Pitch) P = 10.5 9 (Pitch) P = 10.5 12.5 L2 3.5 L1 (Station n) (Station 1) (Station 1) (Station n) (Light/Surge voltage suppressor) (Light/Surge voltage suppressor) 43.5 [50.5] + + + + + + + 28.1 A A B B 15 15 12 12 B B A A 1 1 3 3 (Pitch) P = 10.5 13.5 (Pitch) P = 10.5 M3 x 0.5 (A, B port) M3 x 0.5 (A, B port) 14.5 L plug connector (L) M plug connector (M) M8 connector (WO
With air cushion GA WA GB WB 2 x P (Rc, NPT, G) Cushion valve, Width across flats WH W 10 With rod boot 8 8 8 IJ IJ e e JH f f l l JW ZZ + l + Stroke ZZ + l + Stroke h + l h + l 80, 100 (mm) Bore size Stroke range Rc, NPT port G port A AL B B1 C D E F FD FT FX H H1 I J K Standard Long stroke GA GB P GA GB P 20 Up to 200 201 to 1500 12 10 (12) 1/8 12 10 (12) M5 x 0.8 18 15.5 40 13 14 8 12
port size P Spring extend One-touch fitting port size P Spring return H1 H G F D CX MM AL CI L NA A CD I B1 E K N NN P RR U Bore size (mm) 0 0.033 20 41 8 13 8 10 24 30 18 9 5 9 14 15.5 13 5 28 M8 x 1.25 15 24 M20 x 1.5 1/8 20 0 0.033 25 45 8 13 10 10 30 30 22 9 5.5 9 14 19.5 17 6 33.5 M10 x 1.25 15 30 M26 x 1.5 1/8 26 0 0.033 32 45 8 13 12 10 30 30 22 9 5.5 9 14 19.5 17 6 37.5 M10 x 1.25
~dth across flats 12 \ Appllcable tube 0.0. , p MBX.ds II ~\Width across ha ls 12 A "I \ APPhcable tube 0 .0. . p A w M6 X I.25 w .. ; 8 --, 0 0 u >1 ~ j uj >l l/' ~ .L Ud I .tll II PA .8 J Flat with rib Flat with rib Deep type/ ZPR25D only Deep type/ ZPR400 only a r H Width across flats 12 '.~ 11i. .f "'I ~'--:;~m2L I T ~l 1-'--' R \ APpl;cabla luba 0 .0. , p II:I!
Note 3) When specifying more than one option, enter symbols in alphabetical order. 23 Series VQ5000 Base Mounted Type Dimensions (mm) 1in 25.4mm Kit (Lead Wire Kit) L 83 29.5 29.5 2-1/8 (pilot EXH. port) 12 21 47.5 36 PE R2 5 R1 3 1 P SMC 2-G1 (electrical entry) 6-3/4 Ports P(SUP), R(EXH) Cable length L 0: 600mm L 1: 1500mm L 2: 3000mm U D U D U D 179 106 46.8 59.2 83.5 55.5 M5 ground screw
41.2 1/8 NPTF P(SUP) port 46.5 L type plug connector (L) M type plug connector (M) (Lead wire length) Cover diameter 1.5 Cross sectional area 0.23mm2 66 300 (Lead wire length) Indicator light 300 61 Indicator light 49 55.5 Cover diameter 1.5 Cross sectional area 0.23mm2 P R 1 3 P R 1 3 Dimenisons n : Stations (Max. 20 stations) Equation L1=10.5n+9.5 L2=10.5n+22.5 L n 2 30.5 43.5 75 85.5 16
Tentative determination of L type (W + WB) E = () 2 2 V 1000 Note 2) E > Es Determination of pressure (P) when making intermediate stop P > Ps Consider made-to-order products, depending on an operating condition. P Ps Tentative determination of L type (For intermediate stops, refer to page 8-15-29.) (Refer to page 8-31-1.)
High pressure 2.0 MPa (-X425) P.53 P.77 P.107 Low temperature 30 to 60C (-X430) P.53 P.77 P.106 High temperature 5 to 80C (-X440) P.53 P.77 P.106 Clean series (10-) P.54 P.63 P.80 P.80 P.111 P.111 Copper, fluorine and silicone-free + Low particle generation (21-) P.54 P.63 P.80 P.80 P.111 P.111 Related Product Modular adapter Example) Air filter + 3 port valve Easy modular connections for
Unit AC20C to 40C Dimensions AC20C A Pressure gauge port size G Q F E T L P B C H IN OUT U H L J Pressure gauge (accessory) K M Square embedded type pressure gauge (accessory) Port size N Min. clearance for maintenance Drain Drain D Air filter Mist separator Regulator AC25C, 30C, 40C A Q G F E T Pressure gauge port size L P H B C OUT IN U H L Pressure gauge (accessory) K M Square embedded