CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

depth C U 4-N through 8-O counterbore Q F 2-P (Port size) (Rc, NPT, G) MK(2) I RS Q G RS H A 22 D M E Z 11 Lead wire min. bending radius 10 RZQ Auto switch D-A7, A8 MI W S K M E CEP1 S J L B + Stroke A + Stroke CE1 CE2 Rod end male thread ML2B H1 C J G5-S Auto switch D-A9, F9 CV MVGQ Rod end nut C1 X L1 CC RB Rod End Male Thread (mm) Bore size (mm) C1 X H1 L1 J 32 20.5 23.5 28.5 M14 x 1.5

High Vacuum Angle Valve, XL Series

10 -6 Port A pressure Pa 1.3 x 10 -9 {1 x 10 -8} at ordinary temperatures, excluding gas permeation Internal External 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Leakage Pa m 3/s {Torr l/s} VCR 1.3 x 10 -11 {1 x 10 -10} Fitting Swagelok 1.3 x 10 -10 {1 x 10 -9} VCR/SWJ (Swagelok) Piping connection system 3/8B Connection size 1/4B 5 to 40C (41 to 104F) Operating

CL

x 1.5 l m t Applicable snap ring Part no.

CRQ2

Applicable shaft types: K, T Equal dimensions are indicated by the same marker. 20L1 = L1 = L1 L1 = Q1 = M Q1 = M Q1 = M L1 = L1 Q1 = M L1= Q1 = M K axis L1 T axis Q1 Q1 (mm) Q1 Q1 L1 L1 Size Thread M 3 x 0.5 M 4 x 0.7 M 5 x 0.8 M 6 x 1 M 8 x1.25 M10 x 1.5 Rc 1/8 Q1 (mm) 20 30 10 15 40 J axis Z axis (mm) Size Thread M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 2.5 2.5 3.3 2.5 3.3 4.2 5

MGP

M3 x 0.5 x 30l or more 40, 50, 63 10N 3 M5 x 0.8 x 40l or more 80, 100 24.5N 3 Remove the bolt for normal operation. It can cause lock malfunction or faulty release. 2. Locking type manual release While pushing the M/O knob turn it 90 counter clockwise. The lock is released (and remains in a released state) by aligning the mark on the cap with the OFF mark on the M/O knob.

MG

M5 x 0.8 Nil Slide bearing Ball bushing bearing M L NPT Rc N G TF Copper-free For bore size 16, M5 x 0.8 is only available.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

This could cause an auto switch malfunction. 19.2 20 3.5 0.3 3 4 x M2.5 x 0.45 thread depth 2.5 6.5 12.5 K M 21 3 x M3 x 0.5 thread depth 5 2 N 1 x F 3 depth 2.5 +0.03 0 9 27 F 4 4 x M2.5 x 0.45 thread depth 3.5 6 (Extension end adjuster) 1.5 13.5 3.5 5.5 12 15 10 14 27 20 31 0.5 Retraction end adjuster 4 Extension end adjuster 5.5 3 N x M3 x 0.5 thread depth 4 Note 1) Note 2) 3 depth 2.5

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

2 x M5 x 0.8 2 2 x M3 x 0.5 thread depth 4 3H9 ( ) depth 3 +0.025 0 HA GA +0.025 0 B A 3H9 ( ) depth 3 NN x M4 x 0.7 thread depth 8 4 1 6.5 7 7 15 3.2 B A 6.5 13 6.5 13 H (NN 1) x H G Section AA Section BB (mm) Model F 25 25 40 50 38 50 ZZ 74 79 90 108 126 176 M 49 54 65 83 101 151 Z 48.5 53.5 64.5 82.5 100.5 150.5 K 23.5 33.5 43.5 53.5 63.5 88.5 J 19.5 29 39 56 60 96 I 13 8.5 9.5 10.5

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -

Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: C6H (ø6 One-touch Fitting, Straight Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

High Vacuum Angle Valve

1010 (FKM) 1.3 x 1011 (FKM) A w, e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

New

P 1 (IN), 2 (OUT) port 2 x M5 Thread depth N B 2 x P 1 (IN), 2 (OUT) port 2 x M5 Thread depth N K K J H J H Conduit terminal DIN terminal F Cable 6 to 12 Q D D S G1/2 Qp2 F 34 (44) 31.5 32 R 25 T C K C R E E Sp2 A A B1 2 x P 1 (IN), 2 (OUT) port B1 2 x P 1 (IN), 2 (OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N K J H J H G1/2 (mm) Grommet Grommet (with surge Dimensions Size Port

SMC Basic Pneumatics

per square mtr Newton Earth acceleration m I m2 mt m s'' s ' m s-2 m2 kg N a,F,1-6,e.p A,S v v a) J F G = kg ' rn's'2 9.80665 m's-2 N Impulse Ns Newton Second w E , W E , W M P Work Potential energy Kinetic energy Torque Power Joule = Newton meter Joule Joule Joule Watt J J t ' J w = kg . m2's-2 0.5-m-i = J's-l 3.

%silltr

per square mtr Newton Earth acceleration m I m2 mt m s'' s ' m s-2 m2 kg N a,F,1-6,e.p A,S v v a) J F G = kg ' rn's'2 9.80665 m's-2 N Impulse Ns Newton Second w E , W E , W M P Work Potential energy Kinetic energy Torque Power Joule = Newton meter Joule Joule Joule Watt J J t ' J w = kg . m2's-2 0.5-m-i = J's-l 3.

Electric Actuator/Slider Type

W F1 Rod operating range Note 1) (Stroke + G mm) T Z V EV H thread depth C U M M J D 4 x O1 thread depth R Y L B + Stroke K Note 2) M M S 4 x O1 thread depth R A + Stroke EH Note 1) Range within which the rod can move.