Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N01 (NPT 1/8)

Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: None, Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: B (Panel Mount Adapter), Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Title not found

Air pressure lock-up Spring with air pressure lock-up An pressure Air pressure s'-pp,y exhausl I t Afpressure An p@ssure supPry 4rEst ! l Aiipresure Airpressure ertausr st)Ppty t l AirPrssure Airprasure erhast slppiy t l Lock releasing Locking Lock releasing Locking Air pressure drives the brake piston. Air pressure and spring force combine to drive brake piston.

60

H S U P EXH. H S EXH. U H S P U P G H F SUP. SUP.

Digital Flow Switches Series PF2A

(de-energized) 490 m/s2 in X, Y, Z directions 3 times each 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Status LEDs Response time Hysteresis Power supply voltage Enclosure Operating temperature range Withstand voltage Insulation resistance Vibration resistance Impact resistance Noise resistance Note 1) For digital flow switch with unit switching function.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

1 t i With auto switch (Built-in magnet) 20, 25 12, 16 t y e !2 !0 q r !3 !1 w t !1 !2 !0 o q r !3 w y e Component Parts No.

Compact Type

Axial piping available (6, 10) Compact Type Dual-Rod Cylinder Series CXSJ 6, 10, 15, 20, 25, 32 How to Order Piping Standard piping (6 to 32) Axial piping (6, 10) Nil Nil TN TF Standard piping Axial piping Port thread type Nil Port position M thread Rc1/8 NPT1/8 G1/8 6 to 25 P Port position 32 CXS P 6 M 50 F9BW J S Number of auto switches Compact type Nil S n 2 1 n M L Bearing type Slide

ZSE5/ISE5

Jf Sl.W') GNOI~1 : ~EDiM,> I OIlC\ ~SlW< ::HJ1eIma ~ __ _ ___ J !... ___ _ _ J !... _ _ __ J Precautions Construction/ Parts List Piping (DBe sure to apply a wrench to the metal seclion (17mm) during piping. Never apply a wrench to the resin section of the main unit. , ::g}Clean tube fittings by air-blow (0 remove foreign matter from inside.

Micro-Mist Separator with Prefilter Series AMH

D-SMC, P-63 (M) 2nd printing September 1996. D-SMC, P-59(YG) March 1997. 29(YG) Printed in Japan.

MK

Full stroke Clamp stroke Made to Order Heat resistant Max. 150C Refer to to p.5.4-1 regarding detailed specifications. 4.1-1 Series MK/MK2 Precautions Precautions Be sure to read before handling. Refer to p.0-39 to 0-46 for Safety Instructions and actuator and auto switch precautions.

Air Cylinder Series MB

E1 L1 R1 E1 L1 MM NDH10 NX U1 NDH10 NZ A A1 R1 U1 MM NX 32 40 50, 63 80 100 125 32 40 50, 63 80 100 125 20 22 28 40 40 46 30 40 50 65 65 I-03M I-04M I-05M I-08M I-10M I-12M Y-03M Y-04M Y-05M Y-08M Y-10M Y-12M +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 0.10 0.30

XM, XY

9 9 486 Stainless steel High Vacuum Angle/In-line Valve XMC, XYC Series Dimensions XYC-25, 40/In-line type C D G C B J H 45 E A Fn (KF flange) (mm) Model A 85 115 B 48 66 C 1 2 D 23.5 38 E 40 55 Fn G 64 84 H J XYC-25 XYC-40 100.2 130 26 41 28 36 XYC-50 to 80/In-line type C D G Fd XLA C XL (K flange) XLQ XM XY XM XY B DH J XSA K XVD 45 XGT CYV A Fn (KF flange) E M (mm) Model A 121 148 177

AR Series Modular Type Regulator

A : Max. 3.5 AR20-A to AR25-A : Max. 4 AR30-A to AR40-06-A : Max. 8 Model Standard specifications Optional specifications Round type pressure Round type pressure gauge gauge (with color zone) Bracket mount Panel mount P1 P2 A B C D F J H J H J M N Q R S T U V W Y Z AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 25 28 30 4.5 6.5 40 2 18 18.5 AR20-A 1/8, 1/4 1/8 40 67.4 23.5 22

Vacuum Filter AFJ Series

Note 2) The seal is for 40 m and 80 m elements. 784 Vacuum Filter AFJ20 to AFJ40 Series Dimensions AFJ20 N T J M D U Bracket (Option) S SP R ZCUK C B V Q IN OUT AMJ AFJ AFJ 2 x P (Port size) AMV ZH -X185 Related Products Clearance for maintenance G A AFJ30, AFJ40 N T J D M U Bracket (Option) S R C V Q IN OUT 2 x P (Port size) B Clearance for maintenance G A E Model Standard specifications

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 40 50 63 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 10 14 14 45 55 68 21 26 32 36 46 53 34.5 40 46.5 40 45 50 46 55 66 59 71 82 23.5 28 34.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) MM XA XL Y ZZ MA MB MC N P S 40 50 63 M6 x 1.0 M8 x 1.25 M8 x 1.25 12 16 16 6 6 6 9.5 12.5 15 178 195 221 16 16 16 12 15 15 44 50 56

CXWM/CXWL

If they are placed far apart from each other, please consult with SMC. 20Shock Absorber Specifications RB0805-X552 RB0805 RB1006-X552 RB1006 RB1411-X552 RB1411 Shock absorber (1) Data CXWM20/25CXWM10/16CXWM32Applicable slide unit Maximum energy absorption (J) 0.98 3.92 14.7 Stroke absorption (mm) 5 6 11 Max. collision speed (m/sec) 0.05 to 5 Max. operating frequency (cycle/min) (2) 70 80

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

3-Position Rotary Table

MSQ Angle adjustment Range Figure 5 MSZ MSZ CRQ2X MSQX ad a ge ju Cl lt MRQ an st bo oc t r m nd en g k en tm wi in e us 10 10 se t r st on dj a ju an r on ti ot ad iti ta os ge at p ro er y nt io e b C e b n y is e ge n ad w d k an c ju lo t r C st in en g m bo st lt ju b ad M 0 ax 19 im e u ng m ra ro n ta tio Center position adjustment Table 2 R: Clockwise adjustment L: Counterclockwise