VM

VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB

Digital Flow Switches Series PF2A

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

HRX-OM-X037

9.4.15 HRL200-W-40-T2 CH1 .9-19 9.4.16 HRL100/200-W-40-T2 CH2 .9-19 9.5 Pump Capacity . 9-20 9.5.1 HRL100-A/W-40 CH1 .9-20 9.5.2 HRL200-A/W-40 CH1 .9-20 9.5.3 HRL300-A-40 CH1 .9-21 9.5.4 HRL-A/W-40 CH2 .9-21 9.5.5 HRL100/200/300-A/W-40-T2 CH1 .9-22 9.5.6 HRL300-A-40-T3 CH2 .9-22 9.6 Types of Hazard Labels . 9-23 9.6.1 Positions of danger warning label .9-24 9.7 Standards . 9-25 9.8 Daily

Series: 25A-ZSE20, Rated Pressure Range: B (0 to -101 kPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specifications: M (SI Unit Only), Piping Specifications: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Series: 25A-ZSE20, Rated Pressure Range: B (0 to -101 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specifications: M (SI Unit Only), Piping Specifications: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

HRX-OM-W002

W [ ] 3 BK 18AWG BK 8 8 3 W L1/L V M V 1 1 [ ] 2 WH 18AWG BK 18AWG BK 9 9 2 V G 3 U U [ ] 1 RD 18AWG BK 5 5 1 U (CN3) PM PUMP 7 7 Option T1 6 6 4 4 3 3 2 2 1 1 PM PUMP 2/2 PM PUMP (CN1) 16AWG G/Y G4 [ ] V G PM 16AWG G/Y G4 [ ] G U DC Power Supply Standard BL DCPS [ ] 18AWG G/Y G2 5 5 Condenser 18AWG BK 1 1 3 3 3 3 18AWG BK 3 3 1 1 1 1 C3 (CN51) (CN1) (CN6) Compressor CM CM AC Power Board

HEC_W-E

E R R 1 1 W R N P V < 3 1 . 6 C # 1 S V 3 0 . 0 C M O D E N o r m a l 4th line Indicates control operation mode during normal operation and set values during setting mode selection. Fig.5-4Display 5.5 Reservoir Cap Reservoir Cap Removed to supply recirculating fluid before operation. Install prior to operation. Clockwise to open Counter-clockwise to close.

7

P p p 2-wire 12 V M9BW P P P p p Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NA p p P p p IC circuit 3-wire (PNP) M9PA p p P p p 2-wire 12 V M9BA p p P p p Water resistant (2-color indicator) Grommet Yes 3-wire (NPN equivalent) 5 V A96 P P IC circuit Reed auto switch 2-wire 24 V 12 V 100 V A93 P P P P Relay, PLC No 5 V, 12 V 100

Multistage Ejector Series ZL112/212 1

12 V 6 V 5 V 3 V 5 6 V S R Lead wire length 0.5 (2.9) m NPN output Analog output PNP output 27 26 67 Lead wire length 0.5 (2.9) m Lead wire length 0.5 (2.9) m Not required for Nil, vacuum adapter (GN) and vacuum pressure gauge (G).

NAMUR Interface 3 Port Solenoid Valve Series VFN200N 1

Cylinder ports should be NAMUR hole pattern. 100/200 V (50/60 Hz) 24 V 15 to +10% of rated voltage Class B or equivalent 5.0 VA/60 Hz, 5.6 VA/50 Hz 2.3 VA (1.5 W)/60 Hz, 3.4 VA (2.1 W) 9/50 Hz 1.8 W VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 VT VP 3 1 AC

Booster Regulator/Air Tank

V 10 T = t x = 89 x = 89 (s).

XLAQ/XLDQ

Rear flange surface Right flange surface Left flange surface Rear flange surface Right flange surface Right flange surface Left flange surface With indicator E H V I G L H A V V M A C U U Without indicator Flange side e Temperature specifications/Heater r Auto switch type Applicable flange size 25 40 50 Symbol Nil Auto switch part no.

PF2A/PF2W

Internal voltage drop: 1 V or less (With load current of 80 mA) PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (With load current of 80 mA) Switch output Note 4) Output specifications NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulse Pulse width: 50 msec Accumulated Note 4) pulse output Output voltage: 1 to 5 V; Load impedance:

MGP

X 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 8 8 10 10 13 15 18 21 18 13 15 18 21 5 5 6 6 18 22 24 30 12 16 20 25 26 30 36 42 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 X 0.8 M5 X 0.8 M5 X 0.8 15 10 19 MGC 53 37 10.5 M5 X 0.8 M5 X 0.8 Rc1/8 12.5 10.5 25 53.5 37.5 11.5 M6 X 1.0 M6

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

One-touch Fittings Series KQ2

M5 A D1 L1 D2 M L2 Part No.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Horizontal 20 Lateral load 100% 10 Lateral load 50% W 5 Horizontal empty weight deflection 2 Lateral empty weight deflection 1 Load point distance 0.5 Figure 2.

Microspeed Cylinder

As a rule when W + Pa>PA adjust P so that W + Pa = PA. (2) Installing a regulator with check valve at position (b) can decrease lurching during descent and actuation delay during ascent. As a rule adjust P so that W + PA = Pa.

2/3 Port Valve

Refer to Table w to select the port size of the screw-in styles (6A to 50A) and flanges (32F to 50F).

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Ui = 28 V li = 225 mA (resistively limited) Pi = 1 W Ci = 0 nF Li = 0 mH 52-SY5000 52-SY7000 52-SY9000 Series 10 to 45C (No freezing) Temperature class T6 Ambient and fluid temperature 10 to 50C (No freezing) Temperature class T4, T5 40C less (at rated) Coil temperature rise 24 VDC (system rated voltage) at 1.1 W Barrier input voltage (non hazardous area) 12 VDC at 0.52 W Coil rated voltage