Unit Size: 75mm, Cup Flange Shape: 42mm x 42mm, Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: Basic, Cup Diameter: ø25, Cup Form: Bellows, Cup Material: NBR, Attachment: with (Guide) Attachment

Unit Size: 75mm, Cup Flange Shape: 42mm x 42mm, Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: Basic, Cup Diameter: ø25, Cup Form: Bellows, Cup Material: Silicone Rubber , White, Attachment: with (Guide) Attachment

Unit Size: 75mm, Cup Flange Shape: 42mm x 42mm, Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: Basic, Cup Diameter: ø32, Cup Form: Bellows, Cup Material: NBR, Attachment: with (Guide) Attachment

Unit Size: 75mm, Cup Flange Shape: 42mm x 42mm, Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: Basic, Cup Diameter: ø32, Cup Form: Bellows, Cup Material: Silicone Rubber , White, Attachment: with (Guide) Attachment

Unit Size: 75mm, Cup Flange Shape: 42mm x 42mm, Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: Basic, Cup Diameter: ø25, Cup Form: Multistage Bellows, Cup Material: Silicone Rubber , White, Attachment: with (Guide) Attachment

Unit Size: 75mm, Cup Flange Shape: 42mm x 42mm, Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: Basic, Cup Diameter: ø32, Cup Form: Flat, Cup Material: Urethane Rubber, Attachment: with (Guide) Attachment

Unit Size: 75mm, Cup Flange Shape: 42mm x 42mm, Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: Bellows Type for Film Packaging Workpieces, Cup Diameter: ø20, Cup Form: 2.5-stage Bellows, Cup Material: Silicone Rubber, Blue, Attachment: with (Guide) Attachment

Unit Size: 75mm, Cup Flange Shape: 42mm x 42mm, Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: Basic, Cup Diameter: ø20, Cup Form: Bellows, Cup Material: FKM, Attachment: with (Guide) Attachment

Unit Size: 75mm, Cup Flange Shape: 42mm x 42mm, Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: Basic, Cup Diameter: ø20, Cup Form: Flat with Rib, Cup Material: NBR, Attachment: with (Guide) Attachment

Unit Size: 75mm, Cup Flange Shape: 42mm x 42mm, Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: Basic, Cup Diameter: ø25, Cup Form: Flat with Rib, Cup Material: Urethane Rubber, Attachment: with (Guide) Attachment

Unit Size: 75mm, Cup Flange Shape: 42mm x 42mm, Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: Basic, Cup Diameter: ø10, Cup Form: Flat with Rib, Cup Material: NBR, Attachment: with (Guide) Attachment

LIQUID CANISTERS

. :: 8055 E.

Large blow and

.: P Without bracket Air pressure supply (P) port Thread size: Q R J K Note 1) 4 x Sa Thread depth Sb 2 x L O H I N G A M Vacuum flow Dust bag When dust bag is mounted T F E D Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--

•

Sft{; ~RE E S ITt -380 Non-corrosive stainless steel is used for diaphragm (SUS630) and fitting (SUS304) . ~Hg ~ PRESSURE SWITCH rt3 , Po Atmospheric pressure detection and vacuum pressure measurement for load lock chamber in semiconductor production equipme~ nt ~ .

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Trace the intersection D to obtain the intersection E. 4. The intersection E is the dew point under pressure 0.7 MPa with the ambient temperature of 30C and the relative humidity of 60%. Value for E is at 62C. 5. Trace the intersection E upward, and C leftward to obtain the intersection D. 6.

2.0

LPV22 (N.O.) y y r r t i t u u o e e w w q q Component Parts No.

Fluoropolymer Piping Equipment

Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 LQ1/LQ3/LVN/LQHB Series

Lock-Up Valve IL201/211/220 Series

0 Exhaust portr Adjusting springe Upper diaphragmw Upper diaphragm chamberq SIG Lower diaphragmy Lower diaphragm chambert OUT IN1 Springo Valvei Pistonu IN2 171 A IL201/211/220 Series Construction 2 12 IL211 IL201 1 r r e t e !2 !2 u t u w w i !9 i !9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !

Cylinder Speed Checker

Cylinder Speed Checker (Sensor head + Display part) e Auto switch with pre-wired connector D-M9NSAPC 2 pcs. Auto switch with pre-wired connector PCA-1557798 1 pc. Y connector w Display part w Display part e Auto switch with pre-wired connector The sensor head is not used when the checker is used for the time required for stroke/operation count measurement.

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

When used as a switch output device Setting of NPN open collector 2 outputs Setting of PNP open collector 2 outputs Brown DC(+) q Brown DC(+) q Load Black OUT1 r Black OUT1 r Load Main circuit Main circuit + + 12 to 24 VDC 12 to 24 VDC White OUT2 w White OUT2 w Load Load Blue DC() e Blue DC() e When used as an IO-Link device Brown L+ q L+ Black C/Q r Main circuit C/Q IO-Link master White