Support Guide/11-LEFG Series

Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Rc1/8 M6 1 M10 x 1 M6 x 1 M12 x 1.75 Rc1/8 M8 1.25 M14 x 1.5 M8 x 1.25 913

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

1 Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 CRB2 CRBU2 CRB1 MSU CRJ CRA1 CRQ2 MSQ MRQ D20PAT.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

1 !2 !3 !4 !5 !6 !7 !

Air Catch Sensor

ISA11-4L-01BG ZSE2 ISE2 ISA15-1-01G ZSP ISl ZSM Accessories (Optional) PFl Bracket ISA-1-A Gauge G33-3-01 DIN rail ISA-2-1 to 7 IFl Gauge/G33-3-01 Bracket /ISA-1-A DIN rail/ISA-2-1 to 7 Material: SPC (Nickel plated) Material: Aluminum 10 hex. 100 110 q w e r t L 90 10 25 5 4-4.5 7.5 30 R1/8 34 42 28 4.5 35 27 9 16.5 13 5.6 L Applicable model Part No. 105 140 175 210 245 280 315 Description

Symbol: 205R (Base Mounted, 3 Port, Universal), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material/Port Size: 1N (NPT1/8, PVDF), Lead Wire Length, Electrical Entry, Light/Surge Suppressor: KOZ (Plug Connector, w/o Connector)

Symbol: 205R (Base Mounted, 3 Port, Universal), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material/Port Size: w/o Sub-plate, Lead Wire Length, Electrical Entry, Light/Surge Suppressor: KOZ (Plug Connector, w/o Connector)

Symbol: 095R (3 Port, Universal), Function: Y (Plug Connector), Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Lead Wire Length: KOZ (Plug Connector, w/o Connector)

Symbol: 09R4 (N.O., Port 3 IN, Port 2 OUT), Function: Y (Plug Connector), Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: KOZ (Plug Connector, w/o Connector)

Symbol: 092R (3 Port, Universal), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: None, Lead Wire Length: KOZ (Plug Connector, w/o Connector)

Symbol: 092R (3 Port, Universal), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Reverse Mounting Prevention Pin: None, Lead Wire Length: KOZ (Plug Connector, w/o Connector)

Symbol: 092R (3 Port, Universal), Function: Standard, Voltage: 6 (12VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Reverse Mounting Prevention Pin: None, Lead Wire Length: KOZ (Plug Connector, w/o Connector)

Symbol: 092R (3 Port, Universal), Function: Standard, Voltage: 6 (12VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Lead Wire Length: KOZ (Plug Connector, w/o Connector)

Symbol: 092R (3 Port, Universal), Function: Y (Plug Connector), Voltage: 5 (24VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: None, Lead Wire Length: KOZ (Plug Connector, w/o Connector)

Symbol: 092R (3 Port, Universal), Function: Y (Plug Connector), Voltage: 5 (24VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Reverse Mounting Prevention Pin: None, Lead Wire Length: KOZ (Plug Connector, w/o Connector)

Symbol: 092R (3 Port, Universal), Function: Y (Plug Connector), Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Lead Wire Length: KOZ (Plug Connector, w/o Connector)

Symbol: 092R (3 Port, Universal), Function: Y (Plug Connector), Voltage: 6 (12VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Reverse Mounting Prevention Pin: None, Lead Wire Length: KOZ (Plug Connector, w/o Connector)

Symbol: 092R (3 Port, Universal), Function: Y (Plug Connector), Voltage: 6 (12VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Lead Wire Length: KOZ (Plug Connector, w/o Connector)

Symbol: 095R (3 Port, Universal), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: None, Lead Wire Length: KOZ (Plug Connector, w/o Connector)

Symbol: 095R (3 Port, Universal), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: KOZ (Plug Connector, w/o Connector)