ZQ

VQ1 1 0 5 L Vacuum pressure switch ZQ1S D AS 31 C Solenoid valve VQ1 ZQ1 2 0 5 L Electrical entry Switch specifications Actuation Connector type 31 32 51 52 1 NPN output and analog output 2 NPN outputs 1 PNP output and analog output 2 PNP outputs 2 Normally open C Lead wire length: 0.6 m Connector type Pilot valve CL Lead wire length: 3 m Nil Standard type (1W) CN Without connector Rated

VG342

Flow Characteristics With DIN terminal block With terminal block Port size Flow characteristics 2 3 (A R) b Cv C [dm 3/(sbar)] 1 2 (P A) b Cv C [dm 3/(sbar)] 26 38 0.38 0.30 7.0 9.8 27 38 0.37 0.32 7.4 9.8 27 40 0.36 0.22 7.3 9.8 25 40 0.37 0.20 6.8 9.6 2 1 (A P) b Cv C [dm 3/(sbar)] 3 2 (R A) b Cv C [dm 3/(sbar)] 1/2 3/4 Port size Effective area (mm2) 2 3 (A R) 1 2 (P A) 235

PSxx-OMF0005CN

DIN (B ) DIN No. 1 2 DIN +(-) -(+) 612mm 0.50.6Nm (612) 0.50.6Nm 912 mm (G1/2) M3 0.50.6Nm 0.50.6Nm + M3 0.50.6Nm A-A () -9No.PS-OMF0005CN-E * 30 * 1 2 3 O 4 (0.40.5 Nm) (AR ) * 0.020.2 MPa 0.2 MPa 0.2 MPa ([]) ([] ) ()60mm -10No.PS-OMF0005CN-E N P R 1 IISA2 C S L 6 5 D E 2 IISA2 *1 16 1~6 C +2 *2 *A V 2 E2 (MPa) 0.2MPa 0.4MPa G2 (MPa) *P2 (MPapsi) SR *Z2 (psi) SL E4 (

3 Port Air Operated Valve Series SYJA300 1

N.O. 0.4 0.3 0.2 0.1 0.2 0.3 0.4 0.5 0.6 Operating pressure (MPa) Flow Characteristics/Weight C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Flow characteristics Weight (g) Effective area (mm2) Pilot port size Type of actuation Port size SYJA312-M3 SYJA322-M3 SYJA314-M5 0.41 0.18 0.086 0.35 0.33 0.086 Body ported N.C. N.O. N.C.

XL-OMV0002

1 2 3 H4 AC100V 600/150 800/220 1200/350 / AC200V 2400/150 3200/220 4800/350 Ass'y XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 Ass'y 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1)/ 2)16 PTC() 200V 200 PTC 150 100V PTC Ass'y 0 5 10 15 20 25 30 Ass'y ( Ass'y 30 8 XL-OMV0002 4 4-1.162540 Assy SUS304 SUS316L ( SUS304) ( A6063) C D C E E (

AR Series Modular Type Regulator

Assembly of a piston and a seal (KSYP-13). 454 Regulator AR10-A to AR40-A Series Dimensions AR10-A to AR40-06-A 2 x P1 (Port size) J A AC-A AF-A B C AF-A OUT IN H AR-A AR-A V AL-A Q AW-A (Pressure gauge port size) Pressure gauge (Option) 2 x P2 AC-B R S AF-A F AF-A U D Bracket (Option) AR -A -B N J M T AL-A AW -A -B Panel fitting dimensions AW Y AG W E AV IN OUT AF Z Plate thickness AR10-

High Speed Pilot Operated

Flow Rate Characteristics Operating Frequency Port size Valve flow rate characteristics 70 Ambient and fluid temperatures (Upper limit) [C] 1, 5, 3 (P , EA, EB) 4, 2 (A, B) 1 R 4/2 (P R A/B) 4/2 R 5/3 (A/B R E) Model 60 C [dm3/(sbar)] b C [dm3/(sbar)] b DXT1215 1/8 1/8 1.3 0.37 1.3 0.23 50 Calculation of effective area S and sonic conductance C: S = 5.0 x C 40 30 20 10 0 0 200 Operating

ALF400 to 900, ALT-5/-9

2 !3 !

Slit Valve

x 10 10 O-ring: FKM Internal leak Note 2) (Pam3/s) O-ring: Kalrez 6.5 x 10 9 6.5 x 10 8 Internal leak Note 2) (Pam3/s) at reversed pressure [Reversed pressure: 0.1 MPa (abs) or less] O-ring: FKM O-ring: Kalrez 6.5 x 10 7 6.5 x 10 11 External leak Note 2) (Pam3/s) Gate part 5 to 150 Operation temperature Note 3) (C) Actuator part 5 to 60 Inert gas Fluid 0.6 to 1 Operating time Note 4) (s)

11-cq2-e

For installation and removal, use an appropriate pair of pliers (tool for installing a C retaining ring). 2. Even if a proper plier (tool for installing a C retaining ring) is used, it is likely to inflict damage to a human body or peripheral equipment, as a retaining ring may be flown out of the tip of a plier (tool for installing a C retaining ring).

VVXA21/22

Port R Operating Fluid and Ambient Temperature Operating fluid temperature (C) (3) Vacuum Ambient temperature (C) Temperature conditions Air (Standard) Oil (Standard) (V) Port P Port A Maximum Minimum 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V in parentheses is option symbol. Option Material No.

Pneumatic Purification

1 3/4 230/1/60 2 NPT 174 R134a 23.2 32.3 31.7 3.5 11.4 232 PDE100-S 310 8.2 11.4 2 230/1/60 2 NPT 174 R134a 23.6 42.3 34.4 11.8 15.7 462 PDE120-S 400 8.5 11.7 2 230/1/60 2 1/2 NPT 174 R134a 23.6 42.3 34.4 11.8 15.7 528 Flow readings at 100OF inlet temperature; 100OF ambient and 100 PSIG; 37OF pressure dew point PDE Series : Standard Series PDE15 ~ PDE20 Electronic dewpoint display Hot

NCRAI seies

til snal. rll-. c Qin^la rvl a..l .,-|.IE .eqFFr. 'w Double rod nd 90_ 90o 100 _100o 180 _ 1800 190_.190. W tu"b" -30mm: 90" or 180" onv Special order onfy stze-Nom (Torque) (mm) (inch) 30-13i16(16.5in-tbs) 50-2(80in-tbs) 63 _ 2 1/2 (150 in-tbs) 80 3 1/8 (270 in-lbs) tm-4(640in-tbs) Il*. @l lffi*",* With Auto Switch Capability t. qRAl?

Rotary Actuator NCRA1 Series Single Rack and Pinion

40 '-140'F(5-60'C) Tube bqe nm (inch) 300%),soe),63(2 AirYolume (inch3) N,lodel Botdion 90": l ,'tgo' 1@' lgAlBllv3o 0.45 0.85 l{cRAlo50 1.95 2.n 415 r{cRAl0A3 3.66 7.32 4.09 l,rc8AloS0 13.49 7.51 14.22 ircRA101n 15al 31.61 17.57 *Kinelic rEgy is ttle n|ar abobd enqgD, wfi oplimum djustnnt of tle cr.hion Series:NCRAI NCRAAJ/3o, t'lCRAlOsO NCRATO$,80, {n r{cRAloso lo.2-2 irc8A106s 10.2-3

IDX-OM-W053

CM PE FM1 PRS P FM2 PE CM FM 12 OLR PTC PTC ILS PRS TB PE GFCI EDV 6 3 6 6 4 2 6 4 7 A A 7 1 7 2 A m 3/h(ANR) 1) (50/60Hz) 0.32/0.375 10 1ANR 65% 2 7 3 7 1 8 C 8 C 8-1 8-2 1) 2) 8-3 8 1 9 G G 9-1 9 1 10 H 10 H 10-1 ( ) 10-2 () AD48-2-A 10 IDFA6E-20-H N.O. () 0.151.0MPa 10 1 10 H IDF-S1941 () 1 AD48-2-A 1 1) 2019 3 2019 2 SERIAL No.XP IDF-S1940

IDX-OM-U021

MADE IN G IDF100150F i-2 i-6 IDX-OM-U021 i i-3 HFC IDF100150F i-3 i-7 IDX-OM-U021 i i-4 / 1 1.5 () IDF100150F i-4 / i-8 IDX-OM-U021 1 1 1-1 i.2.9 1 2 IDF100F-30 C.RV IDF100F-30-CRV1 IDF 100 F 30 C 1 2 G 3 K 100 125 150 ) 100kW 125kW P 150kW ) R V 30 AC200V(50Hz) AC200/220V(60Hz) 1 C 1 G 2 K 3 P R V 1-1 IDF100150F 1 1 IDX-OM-U021 1 1-2 1-2-1 (C) 1-2-2 G 1-2-3 K

PSE20xA.eng

This product is not designed to be explosion proof. 1.2 to 1.6 Orange ZS-28-C-2 1.0 to 1.2 Green ZS-28-C-3 1.2 to 1.6 Blue ZS-28-C-4 22-20 0.3-0.5 Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system. 1.6 to 2.0 Grey ZS-28-C-5 Troubleshooting Do not cut the insulator.

PSE200.eng

Displays in turn 1.2 to 1.6 Orange ZS-28-C-2 System Error Displayed in the case of an internal data error. kgf/cm2 bar psi inHg mmHg For compound and vacuum kPa Direct output mode 1.0 to 1.2 Green ZS-28-C-3 Unit label kgf/cm2 bar For low pressure kPa psi After maintenance is complete, perform appropriate functional inspections and leak tests.

IDX-OM-U022

-4 i.2.6 . i-4 i.2.7 . i-4 i.2.8 . i-5 i.2.9 . i-6 i.3 . i-7 i.4 / . i-7 1 1.1 . 1-1 1.2 . 1-2 1.2.1 C . 1-2 1.2.2 G . 1-2 1.2.3 K . 1-2 1.2.4 R . 1-2 1.2.5 V . 1-2 1.3 . 1-3 2.1 . 2-1 2.2 . 2-2 2.2.1 . 2-2 2.2.2 . 2-3 2.2.3 . 2-4 2.2.4 . 2-4 2.2.5 . 2-5 2.2.6 . 2-6 2.3 . 2-8 3 / 3.1 . 3-1 3.2 . 3-1 3.3 . 3-2 3.4 . 3-2 1 3.5 . 3-2 3.6 . 3-2 3.7 . 3-3 3.8 . 3

Adsorption Plate

A B C D Standard (back side) Rectangular A position Rectangular B position Square A position Shape 1 2 Rectangular Square There are no differences in aperture ratio or adsorption force due to changes in particle diameter of elements.