Exhaust Cleaner for Vacuum Pump AMV Series AMV15 SP ZCUK 0.015 Inlet pressure (MPa) AMJ AFJ 0.01 AMV AMV AMV15 AMV160 AMV75 AMV37 AMV6 AMV3 ZH -X185 0.005 Related Products 0 100 200 500 1,000 2,000 5,000 10,000 20,000 Flow rate (L/min [ANR]) Dimensions AMV3, 6, 15, 37 AMV 75, 160 B Exhaust Exhaust A A B Port size IN IN C E 8 x d Flange part Model Port size A 231 305 410 710 562 860 B 123 153 210 210 500 500 C 80.7 105.3 d 19 19 E
Description Material ARM1000 ARM2000 134819-30#1 13615 13614 KA00347 16.5 x 13.5 x 1.5 KA00476 JIS B 2401 P7 (Initial setting) Inlet pressure: 0.7 MPa Outlet pressure: 0.2 MPa Flow rate: 10 L/min (ANR) 7 8 9 13626-30#1 13625 13624 KA00361 23 x 20 x 1.5 KA00087 JIS B 2401 P8 Valve Valve spring Valve guide Brass, HNBR Stainless steel Polyacetal 10 O-ring NBR Initial set point 11 O-ring NBR
3 Number of needle rotations Number of needle rotations AS3201F, AS3211F AS4201F, AS4211F r Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Component Parts No.
Fitting Type: Run Tee, Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: Tube O.D. 3/4", Tubing Size 3/4"x5/8", Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: Tube O.D. 3/4", Tubing Size 1/2"x3/8", Piping: Male, Thread: NPT, Packaging: -
Fitting Type: Run Tee, Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: Tube O.D. 1", Tubing Size 1"x7/8", Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: Tube O.D. 1", Tubing Size 3/4"x5/8", Piping: Male, Thread: NPT, Packaging: -
Fitting Type: Run Tee, Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: Tube O.D. 3/8", Tubing Size 3/8"x1/4", Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: Tube O.D. 1/2", Tubing Size 1/2"x3/8", Piping: Male, Thread: NPT, Packaging: -
Fitting Type: Run Tee, Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: Tube O.D. 1/2", Tubing Size 1/2"x3/8", Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: Tube O.D. 3/8", Tubing Size 3/8"x1/4", Piping: Male, Thread: NPT, Packaging: -
Fitting Type: Run Tee, Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: Tube O.D. 1/2", Tubing Size 1/2"x3/8", Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: Tube O.D. 1/2", Tubing Size 3/8"x1/4", Piping: Male, Thread: NPT, Packaging: -
Fitting Type: Run Tee, Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: Tube O.D. 1/2", Tubing Size 3/8"x1/4", Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: Tube O.D. 1/2", Tubing Size 1/2"x3/8", Piping: Male, Thread: NPT, Packaging: -
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 400mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic Flexible Cable
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor: A [Servo Motor (24 VDC)], Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 500mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic Flexible Cable)
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 1200mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic Flexible Cable
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 300mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic Flexible Cable
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 16, Motor Mounting Position: R (Right Side Parallel), Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 50mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: S (Standard
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: R (Right Side Parallel), Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 200mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: S (Standard
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: R (Right Side Parallel), Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 400mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: S (Standard
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: R (Right Side Parallel), Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 400mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: S (Standard
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: R (Right Side Parallel), Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 600mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: S (Standard
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: R (Right Side Parallel), Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 600mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: S (Standard
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 16, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 100mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic Flexible Cable