VFR

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

Electric Actuator/Slider Type

6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

C95

(n 4)/2 80 + 55 (n 4)/2 105 + 55 (n 4)/2 110 + 55 (n 4)/2 115 + 55 (n 4)/2 n A6 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 15 20 60 70 85 110 115 120 2 20 + 55 (n 2)/2 25 + 55 (n 2)/2 65 + 55 (n 4)/2 70 + 55 (n 4)/2 85 + 55 (n 4)/2 110 + 55 (n 4)/2 115 + 55 (n 4)/2 120 + 55 (n 4)/2 A59W

10

2 (n = 4, 8, 12, 16) Note 2) 75 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 80 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 85 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 95 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 100 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface) 1 45 50 55 60 70 75 D-A9lV n 45 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 50 + 30 (n 4) 2 (n = 4, 8, 12,

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Note 2) [ ] denotes normal position. Exhaust center: 4/2 5/3, Pressure center: 1 4/2 Note 3) ( ): Without sub-plate Note 4) For DC voltages.

LX

T-slot A dimension T-slot B dimension 6.5 T-slot B 27.5 4H9 +0.030 0 depth 4 Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model LXSH2BC-50 LXSH2BC-75 LXSH2BC-100 LXSH2BC-125 LXSH2BC-150 Refer to page 301 for mounting.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

1 4 3 8 VSA430 Individual EXH 1 2 VSA430 3 4 3 4 Common EXH , 1 2 3 4 How to Order 1 2 standard , 1 2 3 4 , 3 8 1 2 3 8 VSA440 3 4 Individual EXH 1 2 SA VV 4 2 0 N 1 05 Piping specifications/Side ported, bottom ported Manifold Air operated valve Series VSA 4 port valve Thread type Body size Nil Rc EXH port Symbol Size N Piping NPT NPTF PF Individual 1 Symbol Common Type 2 3 1 4 3 8 1 2

Fieldbus System

M4 mounting hole Connector for Handheld Terminal End Plate n 8 7 6 5 4 3 2 D side U side Station 1 3/4: 3/4" female thread (Rc, G, NPT/NPTF) 3/4 [3(R) port] 1/2: 1/2" female thread (Rc, G, NPT/NPTF) 1/2 [1(P) port] 56.6 30 101.2 15.7 8 95.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.3 11.5 72 43.5 42.7 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 20.6 21.5 11.5 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (

Made to Order

x MT Section XX 4 x YY depth YL 4 x MM depth ML Bottom view Detailed figure of section XX Section XX 4 x NN through 4 x OA through 4 x OB counterbore depth OL WA Z L (OL) HA: T-slot for hexagon bolt X0.02 R T DA DB HT H VA VB U X PW 10 6 2 x P GA GB G K J PB 2 x P (Plug) PA + Stroke S Q XAH9 depth XL AW + 2 x Stroke B + Stroke C + Stroke FA FB 3 + Stroke (mm) HT AW DB HA L K J H GB GA G FB

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

16.2 34 16.2 17 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 P 1 A 4 A 4 A 4 A 4 A 4 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" M5 x 0.8 [4(A), 2(B) port] Applicable D-sub connector: equivalent { } JIS-X-5101 MIL-C-24308 (L4) L3 (3.2) 101.2 Switch

Cylinder with Lock

8, 12, 16)*2 85 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 90 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 95 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 2 (Different surfaces, same surface) 1 50 55 60 65 70 D-M9mV D-M9mWV n 50 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 55 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 60 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 65 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 70 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 2

V

4)-01 1.5 0.08 1.4 0.5 0.3 (6A) VX312(0/2/4)-01 2.2 0.16 2.8 0.3 0.2 VX313(0/2/4)-01 3 0.24 4.3 Water 1 0.6 VX311(0/2/4)-02 1.5 0.08 1.4 0.5 0.3 VX312(0/2/4)-02 2.2 0.16 2.8 Oil 0.6 VX3224-02 2.2 0.19 3.4 1 VX3324-02 2.2 0.19 3.4 Air 0.3 0.2 VX313(0/2/4)-02 3 0.24 4.3 1/4 2 0.3 VX3234-02 3 0.33 6 (8A) 0.6 VX3334-02 3 0.33 6 0.15 VX3244-02 4 0.5 9 Steam 0.3 VX3344-02 4 0.5 9 0.6 VX3224-

Air Slide Table

4 +0.030 0 6H9 ( ) depth 4 14.5 12.5 A 12 11 6.6 A 7 NN x M8 x 1.25 thread depth 12 HB GB Cross-sectional view A-A Dimensions [mm] Model F G GB H HB I J M N NN Z ZZ MXQ20B-10Z 55 18 7 55 80 30 36 131.5 4 2 95 118 MXQ20B-20Z 46 18 7 55 80 30 36 141.5 4 2 95 118 MXQ20B-30Z 55 28 17 55 80 34 42 151.5 4 2 105 128 MXQ20B-40Z 65 28 17 65 90 34 52 161.5 4 2 115 138 MXQ20B-50Z 75 36 20 80 110 47

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

16) Note 2) 100 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface), 1 10 75 90 100 110 D-A9lV n (n = 2, 4, 6, 8) Note 1) 10 + 30 (n 2) 2 75 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 90 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 100 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (

Air Fittings & Tubing

KQY Male run tee KQY 1 4 1 4 The male thread for piping drastically cuts piping manhours 3 8 3 8 1 2 1 2 1 8 1 8 1 4 1 4 Branch Y KQU Branch Y KQU 3 8 3 8 1 2 1 2 1 8 1 8 Extended male elbow KQW Extended male elbow KQW 1 4 1 4 3 8 3 8 1 2 1 2 1 8 Refer to the catalog No.

Vacuum Pad

2 1.5 2 1.5 8 8 8 3 3 9 8 5.2 2 4 1.8 7 6 3.4 2 2.2 Lateral 4.5 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-10B;[Weight: 0.8 g] ZP3-13B;[Weight: 1.0 g] ZP3-16B;[Weight: 1.1 g] 9 9 6 4 4 6 9 6 4 2 2 2 2 2 2 2 2 2 10 10 10 17 16 11.4 3 14 13 8.4 3 11 10 6 2 Buffer Assembly Part No.

Fieldbus system EtherNet/IP compatible SI Unit

Content (IO size at each port) IO-Link master size setting No Process data size at each communication port Port 1 Port 2 Port 3 Port 4 44 byte 70 byte 134 byte 1 2/2/2/2 byte 2 2 2 2 2 4/4/4/4 byte 4 4 4 4 Can be selected 3 8/8/8/8 byte 8 8 8 8 4 16/16/2/2 byte 16 16 2 2 Can be selected 5 32/2/2/2 byte 32 2 2 2 Can be selected 6 16/16/8/8 byte 16 16 8 8 7 16/16/16/16 byte 16 16 16 16 8 24

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

SYJ3000/5000/7000

(B) 2 (A) 4 (B) 2 (A) 4 Effective area (mm2) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 3 (R) (B) 2 (A) 4 JIS Symbol 1 3 position pressure center 3 position pressure center (B) 2 (A) 4 (B) 2 (A) 4 3 (R) 1 (P) (Single) 0 (Fully open) (Fully closed) 1 2 3 4 5 6 7 1 (P) 5 (R1) 3 (R2) 1 (P) 3 (R) How to order valve with built-in speed controller SYJ5 5 When using SYJ553 model the speed controller must be opend