AS_FS Inline

Vaseline -X12 Example) AS2002FS-04-X12 Made to Order Body size Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X21 100 M5 standard 200 1/8 standard 205 1/4 standard 300 3/8 standard 400 1/2 standard Applicable tubing O.D.1 Example) AS2002FS-04-X21 Not particle-free Metric size Inch size 23 3.22 04 4 06 6 08 8 10 10 12 12 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

Note) Metric size 23 04 06 08 10 12 Inch size 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 Made to Order (For details, refer to page 622.)

JIS Standard Compact Hydraulic Cylinder

Cylinders with auto switch will be shipped together with the auto switch and auto switch mounting bracket (32 to 50) (not assembled). 264 JIS Standard Compact Hydraulic Cylinder: 10 MPa CHKD Series Specifications 20 25 32 40 50 63 80 100 Bore size (mm) Double acting/Single rod Action Hydraulic fluid Fluid CHQ 10 MPa Nominal pressure 15 MPa Proof pressure CHK CHK 13 MPa Maximum allowable pressure

Compact Cylinder Type Pin Clamp Cylinder C(L)KQG32 Series ø 32

workpiece [mm] For 8 For 9 For 10 For 11 Guide pin shape Round type Round type/Diamond type Symbol 115 116 117 118 119 120 125 126 127 128 129 130 135 136 137 138 139 140 145 146 147 148 149 150 Guide pin diameter [mm] 11.5 11.6 11.7 11.8 11.9 12.0 12.5 12.6 12.7 12.8 12.9 13.0 13.5 13.6 13.7 13.8 13.9 14.0 14.5 14.6 14.7 14.8 14.9 15.0 Applicable hole diameter of workpiece [mm] For 12 For 13

Series CA2 10-/11- 21-/22- Air cylinder ø40, ø50, ø63

70C With auto switch: 10C to 60C (No freezing) Ambient and fluid temperature 50 to 400 mm/s Stroke length tolerance Piston speed 0 +1.0 0 +1.4 Up to 250st mm 251 to 1000st mm Basic style / Axial foot style / Rod side flange style / Head side flange style Mounting style Grease 10-/11-: Fluorine grease 21-/22-: Lithium soap based grease Particle generation grade (Refer to front matter pages 13

Series CJ2 10-/11- 21-/22- Air cylinder / ø6, ø10, ø16

Suction flow rate l/min (ANR) 6/10/16 0.08MPa (Air cushion 0.1MPa) Without auto switch : 10C to 70C, With auto switch : 10C to 60C (With no condensation) Stroke length tolerance +1.0 0 50 to 400mm/s Basic style / Axial foot style / Rod side flange style 10-/11-: Fluorine grease, 21-/22-: Lithium soap base grease Mounting style Grease Particle generation grade (Refer to front matter pages 13

D series Pin Clamp Cylinder G G Series CKQ D/CLKQ D P P How to Order Built-in standard magnet D A 50 177 R A L KQG C P4DWSC With magnetic field resistant auto switch Built-in strong magnet D A 50 198 R A L KQP C P79WSE With magnetic field

Guide Pin Diameter Applicable hole diameter of workpiece Guide pin shape Round type For 15 For 16 For 13 12.5 12.7 12.8 12.9 13.0 14.5 14.7 14.8 14.9 15.0 15.5 15.7 15.8 15.9 16.0 Symbol 125 127 128 129 130 145 147 148 149 150 155 157 158 159 160 Guide pin diameter Round type Diamond type Applicable hole diameter of workpiece Guide pin shape Round type, Diamond type For 20 For 25 For 18 17.5

Compact Cylinder: Plate Type Double Acting, Single Rod Series CQU Size: 20, 25, 32, 40

Size Rod end thread 20 25 32 40 Piston area equivalent to 20 mm Piston area equivalent to 25 mm Piston area equivalent to 32 mm Piston area equivalent to 40 mm Rod end female thread Rod end male thread Nil M Cylinder stroke (mm) Size Stroke 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 20, 25 32, 40 Applicable Auto Switches/Refer to pages 13 through

ø32, ø40, ø50, ø63 Series CVQM Compact Cylinder with Solenoid Valve/ Guide Rod Type

(Page 5) Applicable Auto Switches/Refer to pages 11 to 13 for detailed auto switch specifications.

DMK

Refer to back page 50 for Safety Instructions and pages 13 to 17 for Fittings and Tubing Precautions. H/DL L/LL KC Caution How to Use KK Caution Please do not attach metal rods or metal pipes. Metal rods or pipes cannot be secured and the fittings will shoot out. Also, if tubes are attached after metal rods or pipes have been attached, the tubes will not hold and may come loose.

Solid State Auto Switch:

D-M9Pm-5 D-M9Bm-5 Sheath Outside diameter [mm] 2.6 Insulator Number of cores 3 cores (Brown/Blue/Black) 2 cores (Brown/Blue) 2.6 Outside diameter [mm] 0.88 15 Conductor Effective area [mm2] 0.15 Strand diameter [mm] 0.05 Min. bending radius [mm] (Reference value) 17 Weight 5.5 Most sensitive position [g] Auto switch model D-M9Nm-5 D-M9Pm-5 D-M9Bm-5 0.5 m (Nil) 7 6 Lead wire length 1 m (M) 13

Actuator Position Sensor D-MP Series

Lead Wire Specications Model D-MP Sheath Outside diameter [mm] 2.6 Insulator Number of cores 4 (Brown/Blue/Black/White) Outside diameter [mm] 0.57 Conductor Effective area [mm2] 0.08 Minimum bending radius [mm] (Reference values) 13 Weight [g] Model D-MP025 D-MP050 D-MP100 D-MP200 Lead wire length 2 m (A) 29 31 37 51 0.3 m (B) 17 19 25 39 0.3 m (C) 25 27 33 47 How to Order D MP 025 A Measuring

High Precision Filter for Liquids FGH Series

Filter for Liquids FGH Series RoHS FGD How to Order FGE FGG FGH T 100 03 002 J FGA High precision filter for liquids Element seal FGC Symbol T Material PTFE FGF Filtration accuracy Body size FGH FGH Filtration accuracy Applicable for: Applicable body Symbol 002 004 006 013 X20 Element length L117 L246 L496 Applicable element EJ701S EJ801S, ED801S EJ901S, ED901S Symbol 100 200 300 2 m 4 m 6 m 13

Low Maintenance Filter Series FN1/FN4

Lock Bowl and Cover: Stainless steel 304, O-ring: NBR/FKM Material Stainless steel 304 Material Step type Step type Construction Cylindrical type Cylindrical type Cylindrical type 5 m, 20 m 5 m, 20 m 5 m, 20 m 5 m 5 m Nominal filtration rating 0.6 MPa Differential pressure proof 1.8 l (when reservoir is set separately) 6 l 1.1 l (when reservoir is set separately) Reservoir tank capacity 13

Thermo-chiller Air-cooled 200 V Type Standard Type HRS100/150 Series

Note 9) If the product is used at altitude of 1000 m or higher, refer to Operating Environment/Storage Environment (page 120) Item 13 * For altitude of 1000 m or higher. 100 A

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

Without auto switch: 10C to 70C With auto switch: 10C to 60C (With no condensation) Ambient and fluid temperature Mounting bracket Bore size (mm) 10 16 Foot bracket Flange CJ-L016C CJK-L016C CJ-F016C CJK-F016C Stroke length tolerance +1.0 0 50 to 400 mm/s Piston speed Mounting style Grease Particle generation grade (Refer to front matter 13 for details.)

NARM Ser ies

0.05 to 0.7) 23~140F (5 to 60C) (No freezing) Ambient and fluid temperature Fluid Air Cracking pressure (Valve) psig (MPa) 3 (0.02) Construction Relief style Port size/Weight Model Porting Port size Weight lb (g) Small Size Pressure Gauge 15mm Reverse flow function available on the standard model IN OUT Total weight (n: stations) Regulator (Except manifold) 1 8 1 8 (80 X n) + 23 Common IN .13

Ionizer IZN10 Series

When using piping materials prepared by the customer, secure a sectional area of a 4 mm inside diameter (approx. 13 mm3 or more) for the air passage of the piping, and if using tubing, ensure a minimum bending radius.

Thermo-chiller Air-cooled 200 V Type Inverter Type HRSH Series (UL Standards)

Note 9) If the product is used at altitude of 1000 m or higher, refer to Operating Environment/Storage Environment (page 186) Item 13 * For altitude of 1000 m or higher. Note 10) The anchor bolt xing brackets (including 6 M8 bolts) are used for xing to wooden skids when packaging the thermo-chiller. No anchor bolt is included. 166 B

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

gpm (40 L/min) 6.6 gpm (25 L/min) Facility water required flow rate Temperature stability Note 3) 0.54F (0.3C) Pump capacity Note 4) (50/60 Hz)(MPa) 0.45/0.65 (at 30 L/min) 0.40/0.60 (at 4 L/min) 0.40/0.60 (at 40 L/min) 0.40/0.60 (at 40 L/min) Circulating fluid flow range Note 5)(L/min) 2.4 to 13.2 gpm (9 to 50 L/min) 0.8 to 4.2 gpm (3 to 16 L/min) Tank capacity Note 6) Approx. 3.4 gal (13