® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

gpm (40 L/min) 6.6 gpm (25 L/min) Facility water required flow rate Temperature stability Note 3) 0.54F (0.3C) Pump capacity Note 4) (50/60 Hz)(MPa) 0.45/0.65 (at 30 L/min) 0.40/0.60 (at 4 L/min) 0.40/0.60 (at 40 L/min) 0.40/0.60 (at 40 L/min) Circulating fluid flow range Note 5)(L/min) 2.4 to 13.2 gpm (9 to 50 L/min) 0.8 to 4.2 gpm (3 to 16 L/min) Tank capacity Note 6) Approx. 3.4 gal (13

ISG

Cable gland Max. diameter of an electric cord 20a 20b 20c 12 13 15 How to Order 3. Terminal thread type is M4. 0 W 1 03 1 0 ISG Mounting/Piping Caution Multipurpose pressure switch 1. Mounting is possible in either horizontal or vertical orientations.

Series 10-MGF Guide table ø40, ø63, ø100

Specifications Bore size(mm) Item 40/63/100 1.5MPa 1.0MPa 0.1MPa 10 to 60C (With no freezing) Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Piston speed +1.0 0 20 to 200 mm/s mm Stroke length tolerance Grease Particle generation grade Fluorine grease Grade 2 (Refer to front matter pages 13 to 22 for details.) 94

MXJ_New

Since there are applicable auto switches other than those listed above, refer to page 13 for details. Auto switches are shipped together, but not assembled. 4

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Decimal display Hexadecimal display 10 A 11 b 12 c 13 d 14 E 15 F Note 4) Applicable to non-magnetizing lock 47

Series MHR3 11- 3 Finger Rotary Actuated Air Gripper 22- Size: 10, 15

Model External Internal Open/Close stroke (Diameter) Port size Lubrication Gripping force N (Effective value at 0.5 MPa) Note 1) Nominal size Weight g Note 2) Action Model Finger opening width (mm) Finger closing width (mm) Stroke (mm) 11221122125 (130) MHR3-10 MDHR3-10 MHR3-15 MDHR3-15 Vacuum suction type 10 7 6.5 16 22 6 M3 x 0.5 Double acting Non-lube 11221122230 (235) 15 13 12 19 27 8

Series SY3000/5000 Valve Replacement Parts 1 How to Order Port Block Assembly Mounting screw 0V 6A SY One-touch fitting Series Thread type 3 3000 Nil Rc 5 F 5000 G N NPT T NPTF Pilot type ∗ Except M5 Nil Internal pilot R External pilot A, B port size Thre

Valve mounting screw falling-out-prevention type Internal pilot External pilot Internal pilot External pilot SY30V-16A SY30V-16AR SY50V-16A SY50V-16AR SY30V-16A-1 SY30V-16AR-1 SY50V-16A-1 SY50V-16AR-1 SY3000 SY5000 13

Heavy Duty Stopper Cylinder ø 50, ø 63, ø 80 RS2H Series

2 h Vibration RSH Tightening nut Endurance 500 m/s2 (approx. 50 G), X, Y, Z direction each 10 times MIW MIS Impact IEC standards IP67 (Immersion proof and oil proof by JEM standards IP67G) Enclosure Note 1) At load current 100 mA and cord length of 2 m Note 2) Between case and whole live part Figure 1 Figure 2 Dimensions Output Circuit E2E-X2D1-N E2E-X2D1-N/2-wire Brown 7 30 Load + V 26 13

VM100F

Description Material Note 8 O-ring NBR 9 Valve NBR 10 Spring Stainless steel 11 Seal NBR 12 Cassette 13 Spacer Steel 14 Plug Brass Electroless nickel plating 5 Plunger POM White 3-port Gray 2-port 6 O-ring NBR 7 O-ring NBR 3

Blow Gun Series VMG

Without nozzle KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 VMG1-R02-300 VMG1-R02-350 VMG1-R02-400 KNH-R02-100 KNH-R02-150 KNH-R02-200 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 01 02 03 04 05 06 07 11 12 13 21 22 23 24 1 1.5 2 2.5 3 3.5 4 1 1.5 2 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 Connection size Piping connection method Symbol Size and model no.

5.0 MPa Pilot Operated 2 Port Solenoid Valve Series VCH40

) Pressure [MPa] Impact/Vibration resistance Unrestricted Mounting orientation Mass Rated voltage Note 1) DC solenoid without a light/surge voltage suppressor Note 2) AC or DC solenoid with an indicator light: It will cause delays around 20 to 30 msec in the OFF response time. 1.9 kg 1.67 kg 12 VDC, 24 VDC, 100 VAC, 200 VAC (50/60 Hz) 10% of rated voltage DIN connector Class B 5 W (DC), 13

VS7-6 How to Order E Q VS7 6 FG S 1 Symbol Option Connector Rated voltage Port size of sub-plate Number of solenoid Single — Without sub-plate None 100V AC 1 S — — Connector SV ∗ Indicator light 1 4 A02 200V AC 2 0 N Double D FG Side piping FJG W/o conn

(Wiring) Interface Regulator Specifications VQ Specifications Interface regulator model Applicable solenoid valve Regulation port Max. operating pressure Setting pressure range Ambient and fluid temperature Pressure gauge port size Weight (kg) Air supply side eff area (mm2) S (P=0.7MPa, P1=0.5MPa) ARB250 VS7-6 A B P 1.0MPa (1) VQ4 VQ5 0.1 to 0.83MPa (1) 5 to 60 oC (3) VQZ 1 8 0.55 16 16 13

Series VXK21/22/23 Direct Operated 2 Port Solenoid Valve with Built-in Y-strainer For Air/Single Unit How to Order (Single Unit) Specifications 2 21 01 1 G 0 R 1 VXK AC 0 2 21 01 1 G 5 VXK DC Model Bracket Orifice size Refer to the Table (1) None Nil Fo

Dimensions page 13 (Single unit) 5

VX

=+4 7> Terminal box 13 ( =+4 7> Electrical entry Nil # T 5 % & 23 (( =+4 7> 51 4 ! G 53 55 56 (? ! C ) ! ! D !"# Coil insulation type # 9% ,* /) 3 ? $% % 33 1 ,) % % 1 ) ,, ) /) H B 7 !"# ! , & Ordering example VX021-001GB-01 !"# $ % & VX021-002DBT-04 ' ( !

VX

=+4 7> Terminal box 13 ( =+4 7> Electrical entry Nil # T 5 % & 23 (( =+4 7> 51 4 ! G 53 55 56 (? ! C ) ! ! D !"# Coil insulation type # 9% ,* /) 3 ? $% % 33 1 ,) % % 1 ) ,, ) /) H B 7 !"# ! , & Ordering example VX021-001GB-01 !"# $ % & VX021-002DBT-04 ' ( !

SS5Y5 13 STA MANIFOLD BASE. 1.72900 lb. VVM.

Lateral vacuum inlet with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, ZP PAD SIZE 10-25, VACUUM SERIES, ZP VACUUM PAD, UM, ZP PAD SIZE 10-25, 0.02449 lb

Laterial vacuum entry without buffer series, Pad diameter: 02, 04, 06, 08, 10, 13, 16, 20, 25, 32, 40, 50 (mm), Pad style: flat, flat w/ribs, deep, bellows, Material: NBR, silicon rubber, urethane rubber, flourine rubber, EPR, Rotating or non-rotating, Multiple vacuum entry/mounting thread diameters, VACUUM PAD W/O BUFFER, VACUUM SERIES, ZP VACUUM PAD, UL, ZP PAD SIZE 10-25, .06139

Laterial vacuum entry without buffer series, Pad diameter: 02, 04, 06, 08, 10, 13, 16, 20, 25, 32, 40, 50 (mm), Pad style: flat, flat w/ribs, deep, bellows, Material: NBR, silicon rubber, urethane rubber, flourine rubber, EPR, Rotating or non-rotating, Multiple vacuum entry/mounting thread diameters, Y TYPE ADAPTOR, ZP SERIES, VACUUM SERIES, ZP VACUUM PAD, 22, ZP NO SIZE RATING, .04400

Tube material includes nylon, soft nylon and polyurethane.One-touch fittings manifold, Models: 11, 12, 13, 15, 16, Variety of tube sizes available, Inch and metric sizes available, ONE TOUCH FITTINGS MANIFOLD, CONNECTORS, KM FITTING MANIFOLD, CX, KM 4MM, .06062 lb