Table of Contents

Series VQ1000 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46

Plug-in Unit

(Serial transmission kit: EX126) 2-Rc 3/4 3(R) port 2-Rc 1/2 1(P) port 4-G 1/2 Conduit port VQC SMC SMC SMC SMC SMC SMC SMC SQ 95.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 77.5 90 72 VQ0 13 55.5 42.7 43.5 20.5 VQ4 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 33.5 11.5 15.7 12 2-Rc 1/8 (Pilot exhaust port) VQ5 (6.5) 21.5 2-Rc 1/8 (External pilot port) 27 2n-Rc 1/4, 3/8, C8, C10, C12 <4(A), 2(B) port> Rc 1/4:

7ND9071en

Description 1 1 Mounting bracket 2 1 Ear 3 4 Washer 4 4 Screw 28 4 Screw 29 1 Screw 36 1 Couplings jacket 47 1 Coupler socket 48 2 Screw 53 1 Plug (BJ actuators only) Item Qty Description 1 1 Mounting bracket 2 1 Draught piece 3 4 Washer 4 4 Screw 13 2 Screw 14 2 Hexagon nut 28 4 Screw 29 1 Screw 47 1 Coupler socket 48 2 Screw 53 1 Plug (BJ actuators only) Note: See 12.7 for old series B

Table of Contents

2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Micro Mechanical Valve Series VM1000

N F.O.F. 2 x 1 8 3 x 1 4 P.T.

JIS Standard Hydraulic Cylinder

), 1 85 100 90 110 15 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 D-A9 Note 2) 85 + 40 15 + 40 100 + 40 90 + 40 110 + 40 n (n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) 2 (Different surfaces and same surface), 1 60 75 65 85 15 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 60 + 30 D-A9V Note 2) 15 + 30

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

B 2 B 2 B 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE R 3 R 3 R 3 R 3 P 1 P 1 P 1 P 1 X A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2-One-touch fitting (X, PE ports) Applicable tube O.D.: 6 2n-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 Applicable connector: 26 pin MIL type with strain relief (L4) L3 (conforms to MIL-C-83503) 7.6 Connector case attachment lever (both sides) (3.2) 101.2

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Air Cylinder

10 15 50 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 50 + 45 (n 2) (n = 2, 3, 4, 5) D-H7l D-H7lW D-H7BA D-H7NF 10 15 60 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 60 + 45 (n 2) (n = 2, 3, 4, 5) CG3 JMB MB D-H7C D-C73C D-C80C 10 15 65 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 65 + 50 (n 2) (n = 2, 3, 4, 5) D-G5NT D-B5l/B64 10 15 75 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 75 + 55 (n 2) (n = 2, 3, 4, 5)

KJ

1 8 10.4 10 18 16 3 5 32 1 4 1 8 1 4 13.2 10 20.5 17 4.6 1 4 3 8 Applicable tubing 1 4 3 8 3 8 17.9 17 25.5 21 7 Connection thread 1 2 3 8 21.7 17 28 22 9.6 1 2 1 2 Reference dimensions after NPT thread installation.

HRX-OM-X037

HRL Series 3.3 Installation 3-41 HRX-OM-X037 Chapter 3 Transport and Setting Up Recommended piping circuit User's equipment Thermo-chiller 1 2 2 Circulating fluid outlet for CH2 Optical 2 2 systems Circulating fluid return port CH2 1 4 4 Circulating fluid outlet CH1 for Laser 4 4 source Circulating fluid return port CH1 3 For water-cooled type 5 4 6 Facility water inlet Facility 4 5 water

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

LJ1H

. 2-8H10 depth 8 4-M8 x 1.25 thread depth 10 160 20 80 LJ1 LG1 LC1 LX LC6D/LC6C Switches Rc 1/4 Vacuum suction port 100 217 (252) Work piece mounting reference plane Rc 1/4 Vacuum suction port 110 126 Cable entry 199.5 (234.5) 49.5 Stroke + 144 (table movement range) 68 105 120 68 44 Stroke + 393 (428) 2-T-slot 1 170 110 76 2-T-slot 2 Body mounting reference plane 8-M10 x 1.5 thread depth

ZP

-6 U4 For 4 soft tubing M-5AU-4 U6 For 6 soft tubing M-5AU-6 H Model A B C D 2 E F G H J K Vacuum inlet direction q Pad dia.

CQ2

With auto switch Standard CQP2B12Add #4 to SCQP212, #2 CQP2B16Add #4 to SCQP216, #2 CQP2B20Add #4 to SCQP220, #2 CQP2B25Add #4 to SCQP225, #2 With auto switch Standard CQP2B32Add #4 to SCQP230, #2 CQP2B40Add #4 to SCQP240, #2 CQP2B50Add #4 to SCQP250, #2 2.3-97 Series CQP2 12 to 50 Spring Extend Without Auto Switch 12 to 25 Rod end male thread Rod end male thread (mm) X L1 Bore (mm) H1 C1

15

(Recommended height 5 mm) LEC Y Motorless Motorless Dimensions [mm] Stroke L A B n D E 50 238 56 180 4 100 288 106 230 4 150 338 156 280 4 200 388 206 330 6 2 300 250 438 256 380 6 2 300 300 488 306 430 6 2 300 350 538 356 480 8 3 450 400 588 406 530 8 3 450 450 638 456 580 8 3 450 500 688 506 630 10 4 600 550 738 556 680 10 4 600 600 788 606 730 10 4 600 650 838 656 780 12 5 750 700

Slide Unit Series CX2/CXWM/CXWL

ZZ 2 x 2 x 5.2 through 2 x 2 x 9.5 counterbore depth 5 (6H7 hole pitch) depth 4 4 positions for set screws for fixing shock absorbers (M5) 2 x 2 x Rc 1/8 Plug (R 1/8) 4 x M6 x 1.0 thread depth 12 6H7 depth 8 +0.012 0 2 x Rc 1/8 Cylinder port Max. 6 2 x 2 x M6 x 1.0 thread depth 12 2 x 2 x 6H7 depth 8 +0.012 0 4 x 5.5 through 4 x 9.5 counterbore depth 5.5 2 x M10 x 1.0 Adjusting bolt 50 CX2

SYJ300/500/700

(For details, refer to page 4-4-11.) 4-4-6 7 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ300 Construction (A) 2 (A) 2 N.C.