180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

9@0@1@2 MHW-A2001 MHW-A2501 MHW-A3201 MHW-A4001 MHW-A5001 wtio!1@2 yu!3!4!5 MHW2-D MHW-A2002 MHW-A2502 MHW-A3202 MHW-A4002 MHW-A5002 Finger assembly MHW2-D1 MHW-A2002-1 MHW-A2502-1 MHW-A3202-1 MHW-A4002-1 MHW-A5002-1 Finger A assembly Finger C assembly Finger B assembly MHW2-D MHW-A2006 MHW-A2506 MHW-A3206 MHW-A4006 MHW-A5006 y!

Large Flow Lubricator AL800/900 Series

IS400-1 (1S-1) IS400-2 (1S-2) Model Port size B J A C D E F G H I , 1 4 1 2 1 1 AL800-12 to 14-1 AL900-20-1 431 (481) 437 (487) 3 x M5 x 0.8 x depth 6 3 x M5 x 0.8 x depth 6 230 230 ( ): With float switch 117 117 60 60 100 100 2 59 63 166 162 73 73 1046

BP1000

) Operation Warning 1.

ZSE30/ISE30

Switch 100 kPa 0 100 kPa 500 kPa 1 MPa Pressure range 100 kPa 100 kPa For vacuum/ low pressure ZSE30 101 kPa 101 kPa 1 MPa 0 For positive pressure ISE30 100 kPa (0.1 MPa) 1 MPa Rated pressure range of switch Regulating pressure range of switch 16-2-14

Pressure Relief 3 Port Valve with Locking Holes

) Exhaust (OUTEXH) Model IN, OUT EXH C(dm3/s-bar) b Cv C(dm3/s-bar) b Cv VHS20 1/8 1/8 4.0 0.41 1.1 3.7 0.42 1.1 1/4 5.8 0.31 1.4 3.8 0.42 1.1 6 VHS30 1/4 1/4 8.8 0.44 2.4 8.0 0.46 2.3 3/8 14.1 0.28 3.5 7.8 0.46 2.2 1/4 9.5 0.49 2.8 13.3 0.47 3.6 VHS40 3/8 17.2 0.47 4.8 13.6 0.47 3.7 3/8 1/2 26.7 0.29 6.3 13.4 0.43 3.7 -6- 4.

VFR3000-OMJ0001

2 () C-R () C-R DC 3% AC 125% 3 4 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 5 5 5 5 / / / / / / / / (SSR (SSR (SSR (SSR )AC )AC )AC )AC 1) (C-R ) OFF 2)() 1.52 -10 Nm Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc 1/2 2830 5 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 5 5 5 5 / / / / ( ( ( ( ) ) ) ) DC 5m 1) 2) 1 ()ISO VG32

VG300-OMI0003

-2No.VG300**-OMI0003-A V V V VG342 G342 G342 G342 / / / / , 1 1 1 1 1.5 1.5 1.5 1.5 *3) *3) *3) *3) 3 3 3 3) ) ) ) 1 1 1 1 1 1 1 1 () -3No.VG300**-OMI0003-A VG342 VG342 VG342 VG342(R) (R) (R) (R) Series Series Series Series 3 3 3 3 / / / / C-R C-R DC % AC 15% SSR SSR SSR SSR AC AC AC AC 1 C-R OFF 2 1V -10 ( ( ( ( ) ) ) ) () 1 -4No.VG300**-OMI0003-A VG342 VG342 VG342 VG342(R) (R)

Compact

2-wire 12 V M9BWV M9BW Diagnostic indication (2-color indicator) Relay, PLC Yes Grommet 24 V 3-wire (NPN) 5 V, 12 V M9NAV*1 M9NA*1 IC circuit 3-wire (PNP) M9PAV*1 M9PA*1 2-wire 12 V M9BAV*1 M9BA*1 *1 Water resistant type auto switches are mountable on the above models, but SMC cannot guarantee water resistance.

ZFC Series

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

164.5 170 180 230 251 15 15 15 20 22 22 8 3 , , 8 3 4 1 2 1 Bracket dimensions E D C B A Model Port size 4 3 F 345 419.2 K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 , 87.5 125 4 3 ALD600-06 to 10 ALD900-12 to 20 , 1 4 3 175 250 135 209 460 613 175 250 2 1 1 1 4 1 2 , , ALDU600-06 to 10, ALDU900-12 to 20 D.P.

AMR3000 to 6000

N Bracket dimensions With auto-drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 AMR3000 AMR4000 AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 440 10 10 45 70 101 121 131 161 51 61 66 81 28

•

{O. 1 1 . 02kg l/cm~} {-1 10.2kgf/cm"'1 I Max operating plessure 200kPa (2.04kgjlcm~ 200kPa {2.04kgl:cmZ } l MPa{10 .2k9.!!

XL-OMY0003

SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5 10 XL-OMY0003 6-2 1 2 b 3 1 2 O 4 a aa b O O

VND

D E F G H J Model 1 8 1 4 1 4 VND50D-32A VND60D-40A VND70D-50A 1 4 1 2 1 1 2 105 120 140 77 96 113 53 60 74 26.5 30 37 121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 LVA LVH LVD Port size Flange: 32F, 40F, 50F LVQ J (Valve open) LQ Indicator (Option) LVN Pilot port TI/ TIL PA PAX PB 4 x 2-18 mounting hole Applicable flange Pilot port Rc A B C D E F G H J Model 8 10 12 50 40 32 1 8

Low Maintenance Filter Series FN1

Rc 1/4 108 Head end cylinder port Rc 1/4 Dustproof cover Rod end cylinder port (Manual lock release) D (Stroke) Rc 1/8 Unlocking port IN OUT (125) (102) C B A Rc 1 DRAIN 195 (270) Dimensions (mm) A B C D Model Bore size (Nominal size B) FN111 FN112 610 (730) (844) 20 Rc 1 860 (1000) (1134) 40 8 Series FN1 Options Reservoir Dust removal filter 108 32 0 315 45 P.C.D.220 70 70 90 270 (80) 50

SY3000-OMH0002

industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 2 No.SY3000-OMH0002 / / / / 1 1 3) 3) 1 1 () 3 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 / / / / 1 DC VQ (DC ) N.O.( ) 3 () 0.1 2 C-R ( ) C-R ( ) 3 3 EXH ( ) ( ) 3 DC 3% AC 20% (SSR )AC 1) (C-R ) OFF 2)() 4 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 /

Support Guide/11-LEFG Series

Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.

VFR5000-OMN0001

industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -(1:) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 2 VFR5000-OMN0001 / / / / 1 1 3) 3) 1 1 () 3 VFR5000-OMN0001 VFR5000 Series 5 / 1 DC 3 () 0.1 2 C-R () C-R DC 3% AC 20% ( ) () () 3 3 EXH (VVFS5000-R-04-1,2) ( ) () 3 4 No.VFR5000-OMN0001 VFR5000 Series 5 / (SSR )AC 1) (C-R ) OFF 2)() 1 -10 1 1) M5 1/6~1/4 1

VP3145-OMM0003

industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 : JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 VP3145-OMM0003 VP31*5 / 1 1.5 *3) *3) 1 1 3 VP3145-OMM0003 VP31 5 3 / / () C-R C-R ( ) DC 5% AC 15% (ON)(OFF) 0.1 0oC 0.2Mpa (INOUT ) 4 VP3145-OMM0003 VP31 5 3 / ( ) 9 ) 1 ()ISO VG32 2 ()ISO VG32 5m Nm Rc 3/8 2224 Rc 1/2 2830 Rc 3/4 2830 Rc 1 3638 Rc 11/4 4042

VT307N-OMV0001

-2VT307N-OMV0001 / *3) 1 1.5 *3)1 1 () [] -3VT307N-OMV0001 VT307 3 / / () () ( ) () C-R ( ) C-R DC 3% , () ( AC 15% ) (SSR)AC 1) (C-R ) OFF 2)() 1V ,-10 1 DC N.O.() 3 4 No.VT307N-OMV0001 VT307 3 / () DC 30N 1) 2)1 ()ISO VG32 (SDS) 1 Nm Rc 1/8 35 Rc 1/4 812 5 No.VT307N-OMV0001 VT307 3 / () () 30 ( ) , 1 ()ISO VG32 6 No.VT307N-OMV0001 VT307 Series/ DIN 1) ()