6) C8 (One-touch fitting for ?8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190

6) C8 (One-touch fitting for ?8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190

6) C8 (One-touch fitting for ?8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190

0 to 6 mm on one side onlyReed auto switch (2-wire, 3-wire) Solid state auto switch (2-wire, 3-wire)2-color indication solid state auto switch (2-wire, 3-wire)+10 mm

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

/5 PORT, QE, VS7-6 BASE MT 3/8, 1.98777 lb, ModelSupply valve typeNozzle size (mm)Supply pressure range Note 2) psi (MPa)Standard supply pressure psi (MPa)Air consumption SCFM (L/min (ANR))Maximum suction flow SCFM (L/min (ANR))Maximum vacuum pressure psi (kPa)ZB03Large flow (N.C.)0.329 to 79.8 (0.2 to 0.55)50.8 (0.35)0.124 (3.5)0.07 (2)13.2 (?

6) C8 (One-touch fitting for ?8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190

6) C8 (One-touch fitting for ?8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190

Stacking type connector kit manifold for VQZ**2* valve, DIN rail mounting for ease of installation, Valves seperate from manifold for ease of maintenance, Maximum 20 stations available as standard, MFLD, BASE MOUNT W/FITTINGS, VALVE, VV5QZ* MANIFOLD VQZ 4/5-PORT, UJ, VV5QZ* BUILT IN FITTING ( 1.3376 lb

PSE530

Pressure Sensor Series PSE530 How to Order PSE53 0 M5 Sensor range Option None 0 1 2 3 Positive pressure [0 to 1 MPa] Vacuum [0 to 101 kPa] Low pressure [0 to 101 kPa] Compound pressure [101 to 101 kPa] Nil Port size Sensor cable (3 m) M5 R06 R07 M5 x 0.8 6 reducer 1/4 inch reducer L ZSE ISE Option ZSP Connector for pressure sensor controller (1 pc.) + Sensor cable (3 m) Description Part

Auto Drain Valve AD402 - A Series

Example) AD402-N04D-2VZ-A Semi-standard specifications Thread type Symbol Type Nil Rc F G N NPT Symbol Description 3 Bowl Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl Semi-standard Valve Nil None4 Port size V With bleed valve Symbol Port size 02 1/4 03 3/8 04 1/2 Nil Name plate and caution plate for bowl in SI units Pressure unit Z5 Name plate and caution plate for bowl in imperial units

AP500

Input pressure : 2 psig (14 kPa) inch (mm) FV4 MV4 TW4 760 0 2.78 (70.6) 700 -8 2.12 (53.8) Delivery pressure (mmHg abs) Derivery pressure (kPa) 600 -21 500 -35 400 -48 300 -61 200 -75 100 -88 0 -101 0 1 2 3 4 5 6 7 8 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

ASN AQ ASV AK How to Order VCHC F S 1 0 03 06 3 2 AS ASR ASQ Hexagon lock nut Round lock nut J Nil Lock nut option Speed controller Option None Electroless nickel plated Nil N Body size 1 2 3 4 M5 standard 01, 02 standard 03 standard 04 standard Tube size Note) With seal 4 6 8 10 12 04 06 08 10 12 Made to Order Refertopage612for details.

AV2000/3000/4000/5000

Grommet type only) With light/surge voltage suppressor (Not possible with grommet type) Port size Electrical entry 1/4 (AV2000 only) 3/8 (AV3000 only) 1/2 (AV4000 only) 3/4 (AV5000 only) 1 (AV5000 only) 02 03 04 06 10 G: Grommet Coil rated voltage 1 2 3 4 5 6 7 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC 240VAC (50/60 Hz) Other D: Type

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

(Only 400 VAC type) Thermo-chiller Air-cooled 200 V/400 V Type Standard Type HRS090 Series

/Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer (40 meshes) 25A, Barrel nipple 25A, Anchor bolt xing brackets 2 pcs.

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Thermo-chiller Basic Type HRSE Series

C 10 to 30 Cooling capacity Note 3), 11) (50/60 Hz) W 1000/1200 For option -T: 900/1100 1400/1600 For option -T: 1300/1500 Temperature stability Note 4) C 2 Circulating uid system Pump capacity (50/60 Hz) Note 5) MPa 0.08 (at 7 L/min)/0.11 (at 7 L/min) For option -T: 0.13 (at 7 L/min)/0.18 (at 7 L/min) Rated ow (50/60 Hz) Note 6) L/min 7/7 Tank capacity L Approx. 5 Port size Rc1/2 Fluid

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

HRW002-H HRW002-HS HRW008-H HRW008-HS HRW015-H HRW015-HS HRW030-H HRW030-HS Model Water-cooled Cooling method Ambient temperature/humidity Note 1) Temperature: 50 to 95F (10 to 35C), Humidity: 30 to 70%RH FluorinertFC-40/GALDEN HT200 Circulating fluid Note 2) Temperature range setting Note 1) 68 to 194F (20 to 90C) Cooling capacity (50/60 Hz common) (kW) 2 8 15 29 Circulating fluid system

VK3000

Construction Symbol (B) 2 (A) 4 5 (R1) 1 (P) 3 (R2) Component Parts No. Description Note Platinum silver Black Black Material Aluminum die-casted 1 2 3 4 5 6 Cover Body Resin Resin End cover Spool valve assembly Stainless steel Return spring Resin Molded coil Aluminum, NBR Black 1420 A