Booster Regulator/Air Tank

Description 1 Piston seal 2 large 1 small 2 1 each large and small 2 1 2 Governor assembly 4 3 Check valve 2 4 Gasket 2 Rod seal 5 1 8 8 12 Mounting screw 6 12 7 Cover C assembly 1 Grease pack 1 2 1 2 1 The grease pack has 10 g of grease.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

For details, refer to page 2-4-92.

C85

2 !3 !4 !5 !6 !

JXCx-OMX0009

Example) Alarms were generated in order of (1) (5) 7 to 0 Alarm 3 Alarm 1 (The latest) (1) (2) (3) (4) (5) Alarm 2 0 (1) (2) (3) (4) 8 Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) (1) to (5) in the table indicate the codes for the generated alarms. F to 8 Alarm 4 Please refer to "16.2 Alarm details" for the alarm details. The executed instruction code is output.

Vacuum System Peripherals:

(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

2!6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

VQ7-6/7-8

2 (Cable 8 to 10) G1/2 (Cable 8 to 10) 153(166) 153(166) 141(154) 108.5(121.5) 141(154) 108.5(121.5) 50(63) 50(63) 5 3 38(53) 5 3 38(53) 32(42) 23(30) 32(42) 23(30) 1 1 2-3/8, 1/2, 3/4 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 30(42) 30(42) 30(42) 30(42) P port P port ( ): 3/4 Dimensions inside are for rubber seals. ( ): 3/4 3-10-24

45

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

HRX-OM-M005

fluid and facility water piping . 4-1 4.1.4 Operating signal from your system . 4-1 4.1.5 Check of emergency off [EMO] switch . 4-1 4.2 Opening of Facility Water Valve . 4-1 4.3 Filling of Circulating Fluid . 4-2 4.3.1 Preparation of circulating fluid . 4-2 4.3.2 Supply of circulating fluid . 4-3 4.4 Requirement for Product Startup . 4-4 4.4.1 Turning ON power. 4-4 4.4.2 Circulating fluid

CL

2 !3 !4 !5 !6 !7 !8 !

Intrinsically Safe Valve

1 (P) (EA) 5 3 (EB) 2-position double Manual override 2 (B) (A) 4 2 E: Push-turn locking lever type D: Push-turn locking slotted type Nil: Non-locking push type (EA) 5 1 (P) 3 (EB) 3-position closed center 2 (B) (A) 4 3 Note 1) (EA) 5 1 (P) 3 (EB) 3-position exhaust center 2 (B) (A) 4 4 Note 1) (EA) 5 1 (P) 3 (EB) Lead wire length 3-position pressure center 2 (B) (A) 4 Symbol 3 6 10 15 20

CM2

No. of auto switches mounted 2 Different sides C85 Auto switch model Same side n Different sides 1 Same side C95 D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 10 50 15 50 + 45 (n 2) n 2 2 15 + 45 ( ) (n = 2, 4, 6) CP95 10 60 15 60 + 45 (n 2) NCM NCA n 2 2 15 + 50 ( ) (n = 2, 4, 6) 10 65 15 65 + 50 (n 2) Dn 2 2 D-B5/B6 D-G5NTL 15 + 50 ( ) (n = 2, 4, 6) 75 10 15 -X 75 + 55

Poweraire.com - Instant Fittings Catalog TUBE x THREAD FITTINGS

PCF1/8-N01 $0.81 3/8 NPT1/4 PCF3/8-N02 $1.26 1/8 NPT1/4 PCF1/8-N02 $0.81 3/8 NPT3/8 PCF3/8-N03 $1.26 5/32 NPT1/8 PCF5/32-N01 $0.81 3/8 NPT1/2 PCF3/8-N04 $1.92 5/32 NPT1/4 PCF5/32-N02 $0.81 1/2 NPT1/4 PCF1/2-N02 $1.92 3/16 NPT1/8 PCF3/16-N01 $0.81 1/2 NPT3/8 PCF1/2-N03 $1.92 3/16 NPT1/4 PCF3/16-N02 $0.93 1/2 NPT1/2 PCF1/2-N04 $1.92 1/4 NPT1/8 PCF1/4-N01 $0.81 1/4 NPT1/4 PCF1/4-N02 $0.93 1

Solid State Auto Switches

Diagnostic output OUT DC 3-wire type Brown Black DC (+) Blue DC () OUT DC 4-wire type Brown Black DC (+) Blue Orange DC () Connector Specifications M8-3 pin Connector model M8-3 pin M8-4 pin M12-4 pin 1 2 1 4 1 2 Pin arrangement 3 4 4 3 3 JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 Conformed standard 300 m/s2 Impact resistance IP67 (IEC60529 standard) Enclosure 100 M or more at 500

Applicable Auto Switch Model

8.5 4 3 5.5 4 4 4 5 6.5 6 4 6 OUT() Blue(Black) 2.5 2 3 2.5 Indicator light/Operation 3 2 3.5 6 5 6 5.5 2.5 3 3 3 5.5 5.5 5.5 6.5 3 3 3 5.5 5 5.5 5.5 Note) Average value at normal temperature including hysteresis.

Title not found

2 1-3/16 1-1/4 1-7/16 1-3/4 1-7/8 2 2-1/4 2-1/2 10 1-3/8 1-7/16 1-5/8 1-7/8 2 2-1/8 2-7/16 2-3/4 15 1-1/16 1-3/4 1-7/8 2-1/8 2-1/4 2-3/8 2-11/16 3 20 2 2 2-1/8 2-3/8 2-1/2 2-5/8 2-7/8 3-1/4 30 2-3/8 2-7/16 2-1/2 2-3/4 2-3/4 2-7/8 3-1/4 3-1/2 40 2-3/4 2-3/4 2-7/8 3 3 3-1/4 3-1/2 3-3/4 50 3-1/8 3-1/8 3-1/4 3-3/8 3-1/2 3-1/2 3-3/4 4 75 3-3/4 3-3/4 3-7/8 4 4 4-1/8 4-3/8 4-1/2 100 4-3/8 4-3/8

Title not found

2 1-3/16 1-1/4 1-7/16 1-3/4 1-7/8 2 2-1/4 2-1/2 10 1-3/8 1-7/16 1-5/8 1-7/8 2 2-1/8 2-7/16 2-3/4 15 1-1/16 1-3/4 1-7/8 2-1/8 2-1/4 2-3/8 2-11/16 3 20 2 2 2-1/8 2-3/8 2-1/2 2-5/8 2-7/8 3-1/4 30 2-3/8 2-7/16 2-1/2 2-3/4 2-3/4 2-7/8 3-1/4 3-1/2 40 2-3/4 2-3/4 2-7/8 3 3 3-1/4 3-1/2 3-3/4 50 3-1/8 3-1/8 3-1/4 3-3/8 3-1/2 3-1/2 3-3/4 4 75 3-3/4 3-3/4 3-7/8 4 4 4-1/8 4-3/8 4-1/2 100 4-3/8 4-3/8

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

, 3/4-2 port 3, 5 port 30 (42) 30 (42) 3/8, 1/2, 3/4 1 port 3/8, 1/2, 3/4 1 port Dimension inside is for rubber seal.

MXS

16 21 26 39 19 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 GA 16 16 16 16 51 61 109 159 KA NA 2 2 2 2 2 4 4 4 Refer to "Dimensions" of MXS 16 on p.3.11-19 for one with shock absorber as symmetric.

1

Series CS1 Series MB, Series MB1 Series MGG Bore size (mm) Bore size (mm) Bore size (mm) Port size Port size Port size 125 32 NPT 1/2 20 NPT 1/2 140 40, 50 NPT 3/4 25 NPT 1/8 160 63, 80 NPT 3/8 32 NPT 3/4 180 100 NPT 1/2 40 200 50 NPT 1/4 250 63 NPT 1 300 NPT 3/8 80 NPT 1/2 100 Standard model no.