Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

For pipe fitting 4B through 6B Applicable fittings For pipe fitting 3/4B through 3B Welding Welding Piping B Reducing tees B 1 1 x 1 x 1 24 or more 11/4 11/2 11/4 x 11/4 x 1 1B socket 11/2 x 11/2 x 1 cut in half 2 x 2 x 1 2 21/2 x 21/2 x 1 21/2 3 x 3 x 1 3 Pipe 4B through 6B Reducing tees B Socket Pipe : JIS B 2301 : JIS B 2302 : JIS B 3452 Without flash 16-12-8 4 Paddle Style Flow Switch

Multistage Ejector (N)ZL Series

G1/2 1/2-14NPT 1/2-14NPTF Nil F N T Lead wire length 0.5 (2.9)m Lead wire length 0.5 (2.9)m Not required for nil, vacuum adapter (GN) and vacuum pressure gauge (G).

HEC-OM-U015

ERR02 System error 2 #1 and #2 change when [ ] or [ ] is pressed. Indicates control operation mode during normal operation and set values during setting mode selection.

Safety Instructions

Do not connect the ground wire to a water pipe or a gas pipe due to a risk of explosion. 2.

EXxx-OMT0014_E

Input (Only connector "0") 2 1 2 Input No.1 1 3 Power supply (0 V) 1: Input No.1 is connected to the pin No.2 of the input connector "0", 2 input signals can be directly inputted the input connector "0". 2: N.C.: Not connected 5 3 4 Input 4 Do not operate the product outside of the specifications. Do not use for flammable or harmful fluids.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

M5 x 0.8 2 x 4-OA effective depth RA 2 x 4-OB Depth of counterbore RB F Q Y I 4-N through 0.2 D E M L B + Stroke K 0.2 A + Stroke M E 25, 30, 40 H effective thread depth C 2-Rc1/8 (NPT1/8, G1/8) F Q Y 2 x 4-OB Depth of counterbore RB 2 x 4-OA effective depth RA J I 4-N through 0.2 D W E M K L B + Stroke 0.2 A + Stroke M E (mm) Bore size (mm) Stroke range (mm) Note) A OA B C D E F H RB I J

Vacuum Ejector Body Ported Type/Box Type (Built-in Silencer)

Conditions and environments outside of the given specifications, or use outdoors or in a place exposed to direct sunlight. 2.

Air operated valve

Foreign matter caught in the seat (2) 8 VG300**-OMH0006-A Countermeasures No.

IN20267

TYPE Class Instance Attribute Size Description Output 100 100 3 1 INT Position set-point Input 150 150 3 2 INT 2 bytes measured position, 2 bytes diagnostics Figure 16-1 Explicit Messaging 41 - IN20267 Installation and Handling 17. Air supply 17.1. Use clean air.

Membrane Air Dryer

3/8 1/2 1/2 1/2 Type M 2.7 3.2 3.3 2.7 3.2 3.3 Mass kg Type V 3.1 3.7 3.8 3.1 3.7 3.8 * Note 1.

Multistage Ejector Series ZL

G1/2 1/2-14NPT 1/2-14NPTF Nil F N T Lead wire length 0.5 (2.9)m Lead wire length 0.5 (2.9)m Not required for nil, vacuum adapter (GN) and vacuum pressure gauge (G).

ATX-OM-F004E

The instructions described in this manual must be followed in addition to ISO 4414*1) and JIS B 8370*2) and other safety regulations. *1) ISO4414: Pneumatic fluid power Recommendations for the application of equipment to transmission and control systems. *2) JIS B 8370: General rules for pneumatic equipment.

Electronic Pressure Switch Series (Separate Type)

thread Panel mounting possible Selectable pressure unit Auto shift function URJ TSJ Panel mounting possible Selectable pressure unit Auto shift function Note Page 16-6-1 16-6-7 16-5-1 16-7-1 16-8-1 16-4-5 16-2-1 16-2-15 16-2-45 16-2-28 16-2-36 16-2-48 16-1-4 16-1-5 4 Mechanical Pressure Switch Series Mechanical Pressure Switch Series Model Selection Table Positive Pressure Negative Pressure

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Refer to Figure 2 and 3. [Figure 3] [Figure 2] 1. Stop operation and reduce the filter's internal pressure to atmosphere. 2. Rotate the cover counterclockwise (O on the cover L marking). Refer to Figure 1. Case Element [Figure 1] Case Cover Cover 5. Adjust the protrusion on the cover and the slit on the case so that they match up, then push the cover into the end of the case.

ITV_P-E

Power cable 1 Brown Power supply Vcc 2 White NC 3 Blue GND 4 Black Monitor output Signal cable 1 Brown Input signal 1 2 White Input signal 2 3 Blue Input signal 3 4 Black Input signal 4 5 Gray Common Common is no polarity.

VCHR

operated regulator (Air operated type) IN 2 22.0 MPa 2 port air operated valve Best Pneumatics No. 7 637 636

Manifold Regulator Modular Type ARM2500/3000 Series

x 1.5 14.5 x 10.5 x 2 Bracket A 2 Bracket KA00078 KA00083 2 1 set assembly Bracket B O-ring 136312 136412 NBR 7 13 JIS B 2401 P3 JIS B 2401 P5 Hex. socket head cap screw 2 KA00299 KA00961 O-ring NBR 8 How to order (1) When adding n stations to ARM Regulator n pcs.

Digital Flow Switch (Remote type sensor unit)

The warranty period of the product is 1 year in service or 1.5 years after the product is delivered, whichever is first.2) Also, the product may have specified durability, running distance or replacement parts. Please consult your nearest sales branch. 2.

Precision Regulator

Note*) The bracket for IR1000 series is not compatibile with IR1000-A series Note 2) See pressure unit table below.

Slit Valve

2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.