Stations: 02 (2 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: Rc, Supply Unit Components: S (w/Flow Adj. Valve; Stop Valve: None), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: P (w/o Flow Adj.

3

Body material: C37, Stainless steel w VX2 q VXK e VXD r VXZ Component Parts VXS VXS t No.

Air Cylinder CLA Series Fine Lock Model

F5PW Indicator light / Operation D-A59W D-859W D-F5-W, DGs',W, D-J59W, D-Fs'F, D-.J59W, D-K59W. DJsBAL ON operarios f-l-l t u s e l t l l o r r Caution 6 When handling, please avoid dropping, cylinder nicks, and excessive shock.

Compact Cylinder

): JCQ, JCDQ 20 Both ends tapped: JCQA, JCDQA Both Ends Tapped [mm] O1 thread R R Bore size O1 R 20 M4 x 0.7 7 25 M4 x 0.7 7 32 M5 x 0.8 8 40 M5 x 0.8 8 Minimum lead wire bending radius 10 Auto switch F Q H thread effective depth C 4 x N through 2 x M5 x 0.8 (Port size) I D E M Z A + Stroke B + Stroke L W G M K J 25 to 40 Minimum lead wire bending radius 10 Auto switch H thread effective

SMC Wireless System PROFINET compatible

R/W detection / R/W no-detection button When the NFC reader/writer (R/W) is inserted into the USB port of the PC and the PC detects the NFC reader and writer, "R/W detected" is displayed. When the PC cannot detect it, "R/W undetected" is displayed.

SMC Wireless System EtherNet/IP ® compatible

R/W detection/ R/W no-detection button When the NFC reader/writer (R/W) is inserted into the USB port of the PC and the PC detects the NFC reader and writer, "R/W detected" is displayed. When the PC cannot detect it, "R/W undetected" is displayed.

FSQ seies

Use this box ior inductive loads, 5 metersor more ol lead wires, or 100,200VAC applica" D-48 swlch is used iof IooVAC or lsss Sin@ lhere F no votage lmilalon, you can s 6ct a suilable model lor your 2 AND connections for 2-wire system 2 OR connctions lor 2-wire system -go-f1;rw el rwo >w !r e\ " f = ; C ; i r _ , i o q m l r a 6 d . t o a d J o r . \\.:j+_ | aq6 oe.orr qredrasa I | -!

FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

ML2B

RZQ Symbol Specifications MI W S -X416 Holder mounting bracket I 5 m, 10 m, 15 m, 20 m Cable: 7, 6 core twisted pair shielded wire, oil, heat and frame resistant cable Extension cable (Option) CEP1 -X417 Holder mounting bracket II Note) Digital error under Controller (CEU2), Counter (CEU1 or CEU5) is included.

ML2B

RZQ Symbol Specifications MI W S -X416 Holder mounting bracket I 5 m, 10 m, 15 m, 20 m Cable: 7, 6 core twisted pair shielded wire, oil, heat and frame resistant cable Extension cable (Option) CEP1 -X417 Holder mounting bracket II Note) Digital error under Controller (CEU2), Counter (CEU1 or CEU5) is included.

ML2B

RZQ Symbol Specifications MI W S -X416 Holder mounting bracket I 5 m, 10 m, 15 m, 20 m Cable: 7, 6 core twisted pair shielded wire, oil, heat and frame resistant cable Extension cable (Option) CEP1 -X417 Holder mounting bracket II Note) Digital error under Controller (CEU2), Counter (CEU1 or CEU5) is included.

LEY-OM007

s 2] 7) 50/20 + LEY* _ / R / L (LEY*D) [] 540 [%] 90 RH ) 28 42 56.4 (DC24V) A/B 800 / [V] DC2410% [W] 8) 23 40 50 [W] 9) 16 15 48 [W] 10) 43 48 104 11) [N] 20 39 78 78 157 294 108 216 421 [W] 12) 3.6 5 5 [V] DC2410% LEY 16 [ _ / R / L ] LEY 25 [ _ / R / L ] LEY 32 [ _ / R / L ] [mm] 1) 30 50 100 150 200 250 300 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

(kg) Data Pitch moment Yaw moment Roll moment W L2 A2 L1 A1 L3 A3 Mp Mr Static moment Dynamic moment My W W W L2 A2 L3 A3 L1 A1 Mp Mr My W W W W Mey Mep We We L3 A3 L2 A2 W Note) It is not necessary to consider load factor when using this device vertically perpendicular.

Electromagnetic Digital Flow Switch

Fluid Passage Structure q r r No.

Series KV2 Fittings

p p p p m m m m R p m m m m m m m p p m m m m p m m m m p p m p m R M R R m p p m m R R m p p p m m p M M m p p m p p m p M m m m p p M m p p p M m p p p M R p R R p M p p R m M m p m m p m M p m m m m m m p m R m R p m m m M m p m m p m M p m m m m m m p m R m R p m m p R M R m m m p M M m p m p m R m m p p p p p p m p p R p p m m m m M m m m m p R m m m m R p m m m p M R R R p 26 Series

AC Servo Motor Driver (Pulse input type)

7 800 r/min 5.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

50/60 Hz 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC F G Supply valve/Release valve combination Pilot valve J K Supply valve Nil DC: 1 W (With indicator light: 1.5 W) AC Supply valve and release valve A Supply valve (N.O.)

VQC

High pressure type (1.0 MPa) Negative COM External pilot Low wattage type (0.5 W) Nil K N R Y Seal type 3 position closed center Note) For rubber seal type only.