Vacuum Ejector Body Ported Type/Box Type (Built-in Silencer)

Conditions and environments outside of the given specifications, or use outdoors or in a place exposed to direct sunlight. 2.

Air operated valve

Foreign matter caught in the seat (2) 8 VG300**-OMH0006-A Countermeasures No.

IN20267

TYPE Class Instance Attribute Size Description Output 100 100 3 1 INT Position set-point Input 150 150 3 2 INT 2 bytes measured position, 2 bytes diagnostics Figure 16-1 Explicit Messaging 41 - IN20267 Installation and Handling 17. Air supply 17.1. Use clean air.

Membrane Air Dryer

3/8 1/2 1/2 1/2 Type M 2.7 3.2 3.3 2.7 3.2 3.3 Mass kg Type V 3.1 3.7 3.8 3.1 3.7 3.8 * Note 1.

Multistage Ejector Series ZL

G1/2 1/2-14NPT 1/2-14NPTF Nil F N T Lead wire length 0.5 (2.9)m Lead wire length 0.5 (2.9)m Not required for nil, vacuum adapter (GN) and vacuum pressure gauge (G).

ATX-OM-F004E

The instructions described in this manual must be followed in addition to ISO 4414*1) and JIS B 8370*2) and other safety regulations. *1) ISO4414: Pneumatic fluid power Recommendations for the application of equipment to transmission and control systems. *2) JIS B 8370: General rules for pneumatic equipment.

Electronic Pressure Switch Series (Separate Type)

thread Panel mounting possible Selectable pressure unit Auto shift function URJ TSJ Panel mounting possible Selectable pressure unit Auto shift function Note Page 16-6-1 16-6-7 16-5-1 16-7-1 16-8-1 16-4-5 16-2-1 16-2-15 16-2-45 16-2-28 16-2-36 16-2-48 16-1-4 16-1-5 4 Mechanical Pressure Switch Series Mechanical Pressure Switch Series Model Selection Table Positive Pressure Negative Pressure

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Refer to Figure 2 and 3. [Figure 3] [Figure 2] 1. Stop operation and reduce the filter's internal pressure to atmosphere. 2. Rotate the cover counterclockwise (O on the cover L marking). Refer to Figure 1. Case Element [Figure 1] Case Cover Cover 5. Adjust the protrusion on the cover and the slit on the case so that they match up, then push the cover into the end of the case.

ITV_P-E

Power cable 1 Brown Power supply Vcc 2 White NC 3 Blue GND 4 Black Monitor output Signal cable 1 Brown Input signal 1 2 White Input signal 2 3 Blue Input signal 3 4 Black Input signal 4 5 Gray Common Common is no polarity.

VCHR

operated regulator (Air operated type) IN 2 22.0 MPa 2 port air operated valve Best Pneumatics No. 7 637 636

Manifold Regulator Modular Type ARM2500/3000 Series

x 1.5 14.5 x 10.5 x 2 Bracket A 2 Bracket KA00078 KA00083 2 1 set assembly Bracket B O-ring 136312 136412 NBR 7 13 JIS B 2401 P3 JIS B 2401 P5 Hex. socket head cap screw 2 KA00299 KA00961 O-ring NBR 8 How to order (1) When adding n stations to ARM Regulator n pcs.

Digital Flow Switch (Remote type sensor unit)

The warranty period of the product is 1 year in service or 1.5 years after the product is delivered, whichever is first.2) Also, the product may have specified durability, running distance or replacement parts. Please consult your nearest sales branch. 2.

Precision Regulator

Note*) The bracket for IR1000 series is not compatibile with IR1000-A series Note 2) See pressure unit table below.

Slit Valve

2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

FGE-C

2 FGES L A FGES L B FGES L C 1) () (R) 12 (MPa) 0.7 () 80(60) 4 4 2)8 4 2)12 (mm) 6570250 6570500 (8 6570250) 6570750 (12 6570250) (MPa) 0.1 SUS304 SUS304 O FGESNBR FGELFKM SS400 (kg) 10 13 18 (L) 14 21 29 1) 2) 3) 3 1) (P5) ( ) 1 (2 ) /4 (1 ) () 2-1 2/12.5Nm / 2- 9/12 FGX-OM-L009-B 2) IN/OUT IN/OUT V P36 4 1) () 2) 0.1MPa() P910 5.

Membrane Air Dryer

Plug * Please do not remove Body Holder Air inlet port * Outlet port in case of Option R Purge air outlet port Case Front Back Fig 2.1 Names of parts (Example: IDG30A) -3- 2. Installations and Operations 2. Installations and Operations: Piping Air Supply Warning a.

TCU

-1-N-X6 TCU1065l-2-N-X6 L X 3.8 + 200 L X 5 + 200 6 4 N X 12 2 3 to 66 1 3 to 35 37 67 N X 12 TCU0604l -2-N-X6 TCU1208l-1-N-X6 12 8 L X 2.5 + 200 L X 3 + 200 37 N X 18 3 3 to 44 67 N X 24 2 3 to 30 TCU0604l -3-N-X6 TCU1208l-2-N-X6 B (Black), W (White), R (Red), BU (Blue), Y (Yellow), G (Green), C (Clear), YR (Orange) l 2.4-5

ALB900

1 1 1 1 1 2 2 2 1 Relay valve Pressure gauge Diaphragm assembly Valve assembly NLP seal PNY seal Wear ring O-ring NBR NBR Cloth-inserted phenol aldehyde resin NBR Glass fiber-inserted epoxy resin !2 1 Bowl assembly 126059-4A 126060 NBR !3 2 Seal Zinc die-casted !4 Lubrication plug assembly 1 126115AP NBR AF11-2 11307 !5 !

ZISE10.eng

(Model: ZS-39-R) Take care not to bend the claws of the DIN rail adapter when mounting. Engage the pressure switch with claw 2 of the DIN rail adapter, then press down horizontally on to claw 1 until it clicks.

Pilot Operated Regulator AR425 to 935 Series

How to Order Internal pilot operated relieving type regulator AR 25 4 BG 02 Semi-standard Nil Flow direction: Right to left None (Standard) Regulator R Body size Port size Accessory 4 6 8 9 1 2 1 Symbol 1 Description Applicable model 02 03 04 06 10 12 14 20 1 4 Nil 2 1 8 3 B With bracket AR4 5 to 6 5 AR 25 AR 35 2 1 2 3 4 Gauge G46-10-02 G46-2-02 G Regulating pressure range 1 G46-P10-02-X30